Abstract

A system for glass substrate inspection, such as flat patterned media, includes an air table that holds the glass substrate. The air table includes chucklets that emit gas as air bearings. A camera is disposed over the air table and moves in a direction across a width of a top surface of the glass substrate. An assembly includes a gripper and a probe bar configured to be transported under the camera. The gripper is configured to grip a bottom surface of the glass substrate opposite the top surface. The probe bar delivers driving signals to the glass substrate through a plurality of probe pins.

IPC Classes  ?

• B65G 49/05 - Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
• B65G 7/06 - Devices adapted to be interposed between loads and the ground or floor, e.g. crowbars with means for assisting conveyance of loads using fluid at high pressure supplied from an independent source to provide a cushion between load and ground
• H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
• G01N 21/958 - Inspecting transparent materials
• G01N 21/84 - Systems specially adapted for particular applications
• G02F 1/1333 - Constructional arrangements