Abstract

An atomic force microscope includes a raster scan control mechanism configured to perform a raster scan between a cantilever having a probe at a free end and a sample relative to each other across an XY plane in a fluid, an interaction control mechanism configured to vibrate the cantilever and to control an interaction generated between the probe and the sample, and a sample information acquisition circuit configured to acquire sample information including inclination information of a sample surface with respect to the XY plane based on a control result of the interaction control mechanism. The interaction control mechanism is configured to control the interaction generated between the probe and the sample in accordance with inclination of the sample surface with respect to the XY plane.

IPC Classes  ?

• G01Q 10/06 - Circuits or algorithms therefor
• G01Q 60/24 - AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Abstract

An atomic force microscope is to acquire sample information by a raster scanning of a cantilever with respect to a sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information including timing information. The timing information includes a first timing at which a relative speed between the cantilever and sample decreases lower than a threshold, and a second timing at which the relative speed increases higher than the threshold after the first timing. The atomic force microscope also includes a raster-scanning controller to control the raster scanning, and an interaction controller to decrease the strength of an interaction between the cantilever and sample at the first timing, and increase the strength of the interaction at the second timing.

IPC Classes  ?

• G01Q 10/06 - Circuits or algorithms therefor
• G01Q 60/24 - AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Abstract

An atomic force microscope acquires sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane, while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information, a raster-scanning controller to control the raster scanning based on the raster scanning information, and an interaction controller to control strength of the interaction based on the raster scanning information. The interaction controller relatively reduces the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases.

IPC Classes  ?

• G01Q 10/06 - Circuits or algorithms therefor
• G01Q 60/24 - AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
• G01Q 60/32 - AC mode

Abstract

A scanning probe microscope includes a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal. The phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample.

IPC Classes  ?

• G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
• G01Q 10/06 - Circuits or algorithms therefor
• G01Q 60/32 - AC mode
• B82Y 35/00 - Methods or apparatus for measurement or analysis of nanostructures

Abstract

A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

IPC Classes  ?

• G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01Q 10/04 - Fine scanning or positioning
• G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope

Abstract

A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism.

IPC Classes  ?

• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
• G01Q 30/14 - Liquid environment
• G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope

Abstract

A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

IPC Classes  ?

• G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01Q 10/04 - Fine scanning or positioning