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2025
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G/S
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Development, design and testing of semiconductors, semiconductor machines and apparatus, and semi... |
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Invention
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Contaminant trap system for a reactor system.
A contaminant trap system of a reactor system may ... |
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G/S
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Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
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G/S
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Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
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Invention
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Methods of filling recesses on substrate surfaces and forming voids therein.
A method of filling... |
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Invention
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Susceptors with film deposition control features.
A susceptor has a circular pocket portion, an ... |
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Invention
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Electrode plate for semiconductor manufacturing apparatus |
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Invention
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High temperature coatings for a preclean and etch apparatus and related methods.
A coating and a... |
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Invention
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Methods and systems for forming doped silicon nitride films.
A method of forming a doped silicon... |
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Invention
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Synthesis and use of precursors for ald of molybdenum or tungsten containing thin films.
Process... |
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Invention
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Method and system for forming a silicon oxycarbide layer and structure formed using same.
Method... |
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Invention
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Method and system for depositing molybdenum layers.
Methods and systems for forming molybdenum l... |
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Invention
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Formation of sicn thin films.
Methods for depositing silicon-containing thin films, such as SiCN... |
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Invention
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Susceptor assembly for plasma apparatus.
A susceptor assembly for a reactor system may provide v... |
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Invention
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Fixture and method for determining position of a target in a reaction chamber.
A fixture include... |
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Invention
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Vapor deposition of films comprising molybdenum.
Vapor deposition processes for forming thin fil... |
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Invention
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Selective passivation and selective deposition.
Methods for selective deposition are provided. M... |
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Invention
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Method, system and apparatus for forming metal-insulator-metal and/or metal-ferroelectric-metal d... |
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Invention
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Methods and apparatus for reaction space pressure measurement.
Various embodiments of the presen... |
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Invention
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Methods and apparatus with dual exhaust plenums.
Various embodiments of the present technology m... |
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Invention
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Lift pin actuators, actuator arrangements and semiconductor processing systems having lift pin ac... |
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Invention
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Substrate processing apparatus with temperature controller.
An apparatus for processing a substr... |
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Invention
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Area selective deposition.
Disclosed is a method, system and apparatus for selective deposition ... |
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Invention
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Substrate processing system with a positively-biased substrate and a method thereof.
A method to... |
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Invention
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Method of determining end point of chamber cleaning process.
A method of determining an end poin... |
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Invention
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Methods of filling a recessed feature on a substrate employing metal sequential infiltration synt... |
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Invention
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Methods and assemblies for modifying a surface.
The disclosure relates to methods and assemblies... |
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Invention
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Systems, methods, and structures for threshold voltage control.
Semiconductor processing apparat... |
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Invention
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Atomic layer deposition methods and associated methods for depositing a layer on a substrate.
At... |
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Invention
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Gas injection systems for supplying gas into a reaction chamber and semiconductor processing syst... |
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Invention
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Diffuser for uniform gas delivery in cross-flow reactors.
Diffuser includes a top surface and a ... |
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Invention
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Systems, methods, and vessels for epitaxial depositions.
Apparatuses, vessels, and methods for f... |
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Invention
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Chemical source vessel and reaction system.
A chemical vessel used for holding a liquid chemical... |
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Invention
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Apparatus for detecting internal positions of a chamber in a wafer processing system.
An object ... |
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Invention
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Shaft members, shaft arrangements and semiconductor processing systems including shaft members, a... |
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Invention
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Method, system and apparatus for n-metal film deposition.
Disclosed is a method, system and appa... |
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Invention
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Substrate processing method.
A method of forming a film on a substrate comprises providing the s... |
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Invention
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Susceptors, semiconductor processings systems, and related methods.
Susceptors, related systems,... |
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Invention
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Methods for etching metal oxide layers employing cyclical etching processes, and associated metho... |
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Invention
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Vessel for containing precursor.
A vessel for containing a precursor in liquid or solid form is ... |
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Invention
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Wafer boat.
A wafer boat for holding substrates in a spaced vertical arrangement is disclosed. T... |
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Invention
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Structure including a photoresist underlayer and method of forming same.
Methods of forming stru... |
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Invention
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Method of depositing silicon nitride thin film in trench of substrate.
A method of depositing a ... |
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Invention
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Detecting failed pulse from rf power source.
In one embodiment, an RF power source provides a pu... |
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Invention
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Apparatus and method for providing a pulse of a precursor.
Apparatus, systems and methods for pr... |
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Invention
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End effector and substrate processing system using the same.
An end effector used for transporti... |
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Invention
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Metal oxide film and metal film liner combination in a semiconductor structure, related devices, ... |
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Invention
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Methods, structures, and systems for lithographic patterning.
Methods, related structures, and r... |
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2024
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G/S
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Machines and machine tools for the assembly and packaging of electronic chips and structural part... |
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G/S
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Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconduc... |
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G/S
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Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
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G/S
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Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
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Invention
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Substrate calibration fixture |
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Invention
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Precursor vessel nozzle |
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2023
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G/S
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Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturi... |
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Invention
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Vertical flow control ring |
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G/S
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Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
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G/S
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Machines for manufacturing semiconductors, and structural parts therefor; semiconductor manufactu... |
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2022
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G/S
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Custom manufacturing of semiconductors; custom manufacturing of integrated circuits; custom manuf... |
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2021
|
Invention
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Weighted lift pin |
