|
2024
|
G/S
|
Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
|
|
Invention
|
Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based rad... |
|
|
Invention
|
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposi... |
|
|
Invention
|
Gas-phase reactor system including a gas detector.
Methods of and systems for performing leak ch... |
|
|
Invention
|
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribu... |
|
|
Invention
|
Selective deposition of material comprising silicon and oxygen using plasma.
Methods and vapor d... |
|
|
Invention
|
Method of depositing epitaxial material, structure formed using the method, and system for perfor... |
|
|
Invention
|
Substrate processing apparatus.
A substrate processing apparatus capable of removing signal inte... |
|
|
Invention
|
Methods for forming a semiconductor device structure and related semiconductor device structures.... |
|
|
Invention
|
Selective passivation and selective deposition.
Methods for selective deposition, and structures... |
|
|
Invention
|
Substrate processing apparatus and method.
A substrate processing method and apparatus to create... |
|
|
Invention
|
Method of forming structures for threshold voltage control.
Methods and systems for depositing r... |
|
|
Invention
|
Precursor capsule, a vessel and a method.
The current disclosure relates to a precursor capsule ... |
|
|
Invention
|
Methods for forming a doped hafnium zirconium oxide layer on a substrate.
The technology of the ... |
|
|
Invention
|
Metal and carbon containing layers, including methods and systems for their manufacture.
Aspects... |
|
|
Invention
|
Gas injector.
A gas injector and an apparatus constructed and arranged to process a plurality of... |
|
|
Invention
|
Methods of filling trenches on substrate surface.
A method of filling trenches on a surface of a... |
|
|
Invention
|
Motor arrangements, semiconductor processing systems having motor arrangements and related method... |
|
|
Invention
|
Semiconductor manufacturing apparatus and process.
In general, the various aspects of the techno... |
|
|
Invention
|
Selective deposition of organic polymer material and deposition assemblies.
The disclosure relat... |
|
|
Invention
|
Selective deposition of inhibitor material and a deposition assemblies.
The disclosure relates t... |
|
|
Invention
|
Substrate processing systems and methods using virtual machine architecture for operating substra... |
|
|
Invention
|
Substrate processing apparatus with flow control ring and method of using same.
A substrate proc... |
|
|
Invention
|
Methods for forming a metal silicate layer for controlling a threshold voltage of a metal-oxide-s... |
|
|
Invention
|
Methods and system for mitigating cvd foreline growth.
Various embodiments of the present techno... |
|
|
Invention
|
Methods and systems for electric field-assisted lithography.
Lithographical systems and methods.... |
|
|
Invention
|
Thermal switch for wafer temperature modulation.
A method, system and apparatus for substrate pr... |
|
|
Invention
|
Methods and apparatus for a susceptor assembly.
Various embodiments of the present technology ma... |
|
|
Invention
|
Methods and apparatus for a gas line matrix and interchange assembly.
Various embodiments of the... |
|
|
Invention
|
Deposition of organic material.
In one aspect, a method, system and apparatus are disclosed for ... |
|
|
Invention
|
Microwave-enhanced atomic layer etching.
The current disclosure relates to methods of etching a ... |
|
|
Invention
|
Gapfill method, system and apparatus.
Methods and systems are disclosed for depositing an oxide ... |
|
|
Invention
|
Nitrogen-based oxygen-free dipoles, related devices, related systems, and related methods.
The t... |
|
|
Invention
|
Substrate processing system with a capability to monitor gate valves and the method thereof.
Sem... |
|
|
Invention
|
Remote computer access lockout systems and methods for substrate processing systems.
Substrate p... |
|
|
Invention
|
Method for improved silicon deposition.
The technology of the present disclosure generally relat... |
|
|
Invention
|
Hafnium-containing structures and related methods and systems.
Methods, systems, and structures ... |
|
|
Invention
|
Systems and methods for removing collateral depositions from within chamber arrangements in semic... |
|
|
Invention
|
Methods of forming semiconductor structures, semiconductor processing systems and related compute... |
|
|
Invention
|
Methods for forming semiconductor structures including two-dimensional metal dichalcogenide layer... |
|
|
Invention
|
Non-contact cooling assembly for cooling substrates.
A non-contact cooling assembly for cooling ... |
|
|
Invention
|
Methods and systems for filling a gap.
Disclosed are methods and systems for filling a gap. A me... |
|
|
Invention
|
Apparatus constructed and arranged to process a plurality of substrates.
An apparatus for proces... |
|
|
Invention
|
Selective deposition of oxide material and a deposition assembly.
The disclosure relates to meth... |
|
|
Invention
|
Multiple-chamber reactor for selective deposition of silicon nitride and method of using same.
A... |
|
|
Invention
|
Load lock arrangements, semiconductor processing systems including load lock arrangements, and as... |
|
|
Invention
|
Semiconductor processing system, a semiconductor precursor storage vessel and a method of forming... |
|
|
Invention
|
Methdos and systems for filling a gap.
Disclosed are methods and systems for filling a gap. An e... |
|
|
Invention
|
Substrate processing method.
Provided is a method of filling a gap with a flowable oxide film. I... |
|
|
G/S
|
Machines and machine tools for the assembly and packaging of electronic chips and structural part... |
|
|
G/S
|
Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconduc... |
|
|
G/S
|
Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
|
|
G/S
|
Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
|
2023
|
Invention
|
Method of forming vanadium nitride layer and structure including the vanadium nitride layer. Meth... |
|
|
G/S
|
Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturi... |
|
|
G/S
|
Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
|
|
G/S
|
Machines for manufacturing semiconductors, and structural parts therefor; semiconductor manufactu... |
|
2022
|
G/S
|
Custom manufacturing of semiconductors; custom manufacturing of integrated circuits; custom manuf... |
|
|
Invention
|
Susceptor |
|
2021
|
G/S
|
Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
|
2020
|
G/S
|
Machines for the assembly and packaging of electronic chips;
machines for manufacturing semicond... |
|
2017
|
G/S
|
Machines and machine tools, namely semiconductor wafer processing equipment, including thermal tr... |
