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2025
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G/S
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Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
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Invention
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Exhaust component cleaning method and substrate processing apparatus including exhaust component.... |
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Invention
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Substrate supporting plate, thin film deposition apparatus including the same, and thin film depo... |
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Invention
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Gapfill methods and processing assemblies.
The disclosure relates to methods of filling gaps in ... |
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Invention
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Substrate treatment apparatus and method of cleaning inside of chamber.
Examples of a substrate ... |
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Invention
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Method and system for depositing transition metal carbide.
The present disclosure relates to met... |
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Invention
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Methods and systems for depositing a layer.
Plasma-assisted methods for depositing materials and... |
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Invention
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Flange and apparatus for processing substrates.
The disclosure relates to a flange for a process... |
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Invention
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Structures with doped semiconductor layers and methods and systems for forming same.
Methods and... |
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Invention
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Heater assembly including cooling apparatus and method of using same.
A cooling apparatus and me... |
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Invention
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Titanium aluminum and tantalum aluminum thin films.
A process for depositing titanium aluminum o... |
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Invention
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Vanadium containing layers and methods and systems for depositing said layers.
The present discl... |
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Invention
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Structures comprising dipole-lined conductive wires and related systems and methods.
Methods and... |
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2024
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Invention
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Method, system and apparatus for forming a threshold voltage shifting layer.
A method comprising... |
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Invention
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Methods of forming indium molybdenum oxide layers and associated indium molybdenum oxide layers. ... |
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Invention
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3 pillar boat in a load lock chamber and methods of making pillar boat in load locks for semicond... |
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Invention
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Methods and assemblies for selective deposition of metal-containing material.
The current disclo... |
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Invention
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Chamber arrangements including backpressure controllers, semiconductor processing systems includi... |
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Invention
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Systems and methods for removal of residue coating deposited on metallic parts during processing.... |
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Invention
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Transfer chambers, associated semiconductor processing systems, and methods for preventing moistu... |
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Invention
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Methods of forming interconnect structures including low dielectric constant layers and associate... |
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Invention
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Methods and apparatus for insulating gas lines.
Various embodiments of the present technology ma... |
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Invention
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Apparatus for a substrate support with multi-zone control.
Various embodiments of the present te... |
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Invention
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Methods for depositing gap filling fluids and related systems and devices.
Methods and systems f... |
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Invention
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Temperature control module for a furnace reactor and method of controlling temperature of a furna... |
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Invention
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Apparatus for thermal control of a wafer.
An apparatus with a wafer temperature control capabili... |
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Invention
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Methods and systems for forming a layer comprising silicon and composition and synthesis of silic... |
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Invention
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Area selective deposition.
A method, system and apparatus for selective deposition on a substrat... |
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Invention
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Compositions, methods, and systems for forming silicon containing films. The present disclosure r... |
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Invention
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Methods and systems for forming a layer comprising silicon. Disclosed are methods and systems for... |
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Invention
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Structures and methods of forming structures.
The disclosure relates to methods of forming a str... |
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Invention
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Methods and apparatus for gas distribution.
Various embodiments of the present technology may pr... |
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Invention
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Methods of forming a bilayer hardmask and associated deposition methods using a bilayer hardmask.... |
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Invention
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Substrate transfer arm and apparatus using the same.
Provided is a substrate transfer arm, more ... |
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Invention
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Chamber arrangements with upper and lower pyrometers, semiconductor processing systems including ... |
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Invention
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Metallic articles, semiconductor processing systems having metallic articles, and methods of maki... |
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Invention
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Metal and phosphorous containing films and methods and systems for producing said films and appli... |
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Invention
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Load lock arrangements configured for performing parallel processes, and associated systems and m... |
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Invention
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Process gas recycling.
Described herein are systems and methods that may be useful in the contex... |
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Invention
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Method of forming oxide materials.
Described herein are methods and systems for forming oxides c... |
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Invention
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Support sleeve for supporting a process vessel and associated semiconductor processing furnaces. ... |
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Invention
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Methods for depositing a boron doped silicon germanium layer and associated compositions.
Method... |
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Invention
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Configurable and modular load lock chamber systems and methods of making load locks for semicondu... |
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Invention
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Substrate preheating module, a device processing assembly with a substrate preheating function an... |
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Invention
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Substrate cooling apparatus using conduction and radiance.
An apparatus for cooling substrates i... |
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Invention
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Apparatuses and methods for filling a gap.
A method and system for depositing silicon using a mu... |
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Invention
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Selective bottom-up fill.
Disclosed is a method, system and apparatus for filling a gap feature ... |
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Invention
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Method of filling gaps on substrate surface using plasma.
A method of forming a silicon oxide fi... |
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G/S
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Machines and machine tools for the assembly and packaging of electronic chips and structural part... |
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G/S
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Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconduc... |
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Invention
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Methods and apparatus for vapor pressure monitoring.
Various embodiments of the present technolo... |
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G/S
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Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
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G/S
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Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
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2023
|
G/S
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Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturi... |
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G/S
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Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
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G/S
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Machines for manufacturing semiconductors, and structural parts therefor; semiconductor manufactu... |
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2022
|
Invention
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Foreline flange assembly |
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G/S
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Custom manufacturing of semiconductors; custom manufacturing of integrated circuits; custom manuf... |
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2021
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G/S
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Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
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2020
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G/S
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Machines for the assembly and packaging of electronic chips;
machines for manufacturing semicond... |
