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2024
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Invention
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Method and apparatus for cleaning a reaction chamber.
A method and substrate processing apparatu... |
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Invention
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Coupling agent, coating system comprising the same, related method and uses. A coupling agent (10... |
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Invention
|
Low vapor-pressure precursor dosage control. A method and apparatus for controlling dosage of a l... |
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Invention
|
A thin-film deposition apparatus for batch processing. A substrate processing apparatus (100), co... |
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Invention
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A thin-film deposition apparatus cluster. A substrate processing system (1900) comprising, a rece... |
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Invention
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A thin-film deposition apparatus reaction chamber. An apparatus, comprising a main body part of a... |
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Invention
|
A thin-film deposition apparatus. A substrate processing apparatus (100) that includes a reaction... |
|
2023
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Invention
|
Precursor container. Precursor container, comprising a first volume formed by a first chamber to ... |
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Invention
|
Ald apparatus, method and valve.
An apparatus, a method and a valve with a reactive chemical inl... |
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Invention
|
Coated items and manufacturing thereof.
A method for manufacturing a coated item 10 in a chemica... |
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Invention
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Method, insert and apparatus for process control and monitoring of thin film deposition. A method... |
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Invention
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Method of operating a deposition or cleaning apparatus. A deposition or cleaning apparatus compri... |
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2022
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Invention
|
Adjustable fluid inlet assembly for a substrate processing apparatus and method. A fluid inlet as... |
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|
Invention
|
Multifunctional coating, method of manufacturing thereof, related coated items and uses.
A metho... |
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Invention
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Multifunctional coating, method of manufacturing thereof, related coated items and uses. A method... |
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Invention
|
A substrate processing apparatus and a method. A substrate processing apparatus (100), comprising... |
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|
Invention
|
Precursor container apparatus.
A precursor container apparatus, comprising a first volume to hou... |
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Invention
|
Precursor container apparatus. A precursor container apparatus, comprising a first volume to hous... |
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|
Invention
|
Plasma resistant coating, related production method and uses.
A method of producing coated subst... |
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Invention
|
Plasma resistant coating, related production method and uses. A method of producing coated substr... |
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Invention
|
Nanolaminate coating, related coated items and uses, method for improving resistance of a substra... |
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Invention
|
Substrate processing apparatus and method.
A substrate processing apparatus, includes a reaction... |
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Invention
|
Substrate processing apparatus and method. A substrate processing apparatus (100), comprising a r... |
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Invention
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Substrate processing apparatus and method. a) to form a substrate loading gap therebetween, a sub... |
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Invention
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Substrate processing apparatus and method. A substrate processing apparatus, comprising a reactio... |
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2021
|
Invention
|
Coating by ald for suppressing metallic whiskers.
A deposition method includes depositing on a s... |
|
2020
|
Invention
|
Substrate processing apparatus and method.
A substrate processing apparatus, including a reactio... |
|
|
Invention
|
Substrate processing apparatus and method.
A substrate processing apparatus includes an inner ch... |
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|
Invention
|
Substrate processing apparatus and method. A substrate processing apparatus comprising an inner c... |
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|
Invention
|
Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods. A ... |
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|
Invention
|
Substrate processing apparatus and method. A substrate processing apparatus including an inner ch... |
|
2019
|
Invention
|
Plasma in a substrate processing apparatus.
A substrate processing apparatus and a related metho... |
|
|
Invention
|
Substrate processing methods and apparatus.
A method and a substrate processing apparatus includ... |
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|
Invention
|
Porous inlet.
A substrate processing apparatus including a reaction chamber with an inlet openin... |
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2018
|
G/S
|
Machines and machine tools for atomic scale layer deposition; atomic scale layer deposition appar... |
|
|
G/S
|
Treatment and coating of materials by means of the atomic scale layer deposition method and consu... |
|
|
G/S
|
Machines and machine tools for atomic scale layer
deposition; atomic scale layer deposition appa... |
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2017
|
G/S
|
Atomic scale layer deposition machinery and machine tools for use in connection therewith; thin f... |
|
|
G/S
|
Treatment and coating of materials by atomic scale layer deposition method and consulting connect... |
|
|
Invention
|
Adjustable fluid inlet assembly for a substrate processing apparatus and method. A substrate proc... |
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|
Invention
|
Uniform deposition.
A reaction chamber of a substrate processing apparatus contains a reaction s... |
