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2024
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Invention
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Method and apparatus for controlled splitting of fluid flows. A method and apparatus for the cont... |
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Invention
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Method and apparatus for controlled splitting of fluid flows.
A method and apparatus for the con... |
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2020
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Invention
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Preloaded piezo actuator and gas valve employing the actuator. A valve arrangement for controllin... |
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2018
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G/S
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Apparatus for measuring gas concentration Gas regulators, namely, mass flow controllers |
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G/S
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Apparatus for measuring gas concentrations |
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2016
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Invention
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Method and apparatus for gas flow control. A method and apparatus for self-calibrating control of... |
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Invention
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Method and apparatus for gas flow control. An apparatus for controlling the flow of a gas, contai... |
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2014
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Invention
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Mass flow controller with multiple communication protocols.
A system for utilizing more than one... |
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2012
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Invention
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Method and apparatus for in situ testing of gas flow controllers. Methods and apparatus utilize a... |
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2011
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Invention
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Transient measurements of mass flow controllers. An apparatus to measure the transient response o... |
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Invention
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Method and apparatus for identifying the chemical composition of a gas. 3) delivered into the pla... |
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2010
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Invention
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Method and apparatus for gas flow control.
A method and apparatus for self-calibrating control o... |
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2009
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Invention
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Method and apparatus for enhancing in-situ gas flow measurement performance. An in-situ gas flow ... |
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Invention
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Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassi... |
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2008
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Invention
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Method and apparatus for identifying the chemical composition of a gas. Embodiments of the presen... |
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2007
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Invention
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System and method for vacuum chamber leak detection. Leaks in a processing chamber, including “vi... |
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Invention
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Techniques for calibration of gas flows. An embodiment of a method in accordance with the present... |
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Invention
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Data timestamp management. Embodiments of the present invention relate to managing timestamps ass... |
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Invention
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System and method for controlling process end-point utilizing legacy end-point system. Embodiment... |
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2006
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Invention
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High-speed secs message services (hsms) pass-through including bypass. A method and system for in... |
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Invention
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Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor ... |
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Invention
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End point detection method for plasma etching of semiconductor wafers with low exposed area. A me... |
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2000
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Invention
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Wide range gas flow system with real time flow measurement and correction. A gas delivery system ... |
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1999
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Invention
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Method for wide range gas flow system with real time flow measurement and correction. A gas deliv... |
