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2020
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Invention
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Method and apparatus for producing silicon-containing materials.
A process of producing silicon-... |
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Invention
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Method and apparatus for producing silicon-containing materials. In order to produce silicon-cont... |
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Invention
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Device and method of producing liquid silicon.
An apparatus that forms liquid silicon includes a... |
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Invention
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Device and method for producing liquid silicon. An apparatus for forming liquid silicon comprises... |
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Invention
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Device and method for producing liquid silicon. The invention relates to a device for forming liq... |
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2016
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Invention
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Process and plant that decomposes monosilane. A method that decomposes monosilane wherein a monos... |
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Invention
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Process and system for decomposing monosilane. A process is described for decomposing monosilane,... |
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Invention
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Column and process for disproportionation of chlorosilanes into monosilane and tetrachlorosilane ... |
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2012
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Invention
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Reactor and process for producing high-purity silicon. A reactor for producing silicon by means o... |
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2011
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Invention
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Plant for preparation of monosilane. What is described is a plant for preparation of monosilane (... |
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Invention
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Methods of producing crystalline semiconductor materials.
A method of producing a crystalline se... |
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Invention
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Monocrystalline semiconductor materials.
A method of producing a monocrystalline semiconductor m... |
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Invention
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Production of a crystalline semiconductor material. The invention relates to a method for produci... |
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Invention
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Production of monocrystalline semiconductor materials. The invention relates to a method for prod... |
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Invention
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Method for producing high purity silicon.
A process of producing high-purity silicon includes pr... |
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Invention
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Method for producing high purity silicon. The invention relates to a method for producing silicon... |
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2010
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Invention
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Process and plant for preparing trichlorosilane.
A process for preparing trichlorosilane include... |
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Invention
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Plant and process for preparing monosilane.
A plant and a process prepare monosilane (SiH4) by c... |
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Invention
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Plant and process for preparing monosilane. A description is given of a system and a process for ... |
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Invention
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Process and plant for preparing trichlorosilane. A process is described for producing trichlorosi... |
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Invention
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System and process for producing monosilane. A description is given of a system and a process for... |
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Invention
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Process and system for producing trichlorosilane. A process is described for producing trichloros... |
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Invention
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Method and system for producing monosilane. 3) includes a reaction column having a feed line for ... |
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Invention
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Method and system for producing monosilane. A description is given of a plant for preparing monos... |
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Invention
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Method and system for producing monosilane. The invention relates to a system for producing monos... |
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Invention
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Purifying metallurgical silicon. The invention relates to a method for purifying metallurgical si... |
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2009
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Invention
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Process and apparatus for preparing ultrapure silicon. Described is a process for preparing high-... |
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Invention
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Method and device for the production of high-purity silicon. A method is described for producing ... |
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Invention
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Process and apparatuses for preparing ultrapure silicon. A process for preparing high-purity sili... |
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Invention
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Reactor for producing polycrystalline silicon using the monosilane process. A reactor that produc... |
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Invention
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Reactor for producing polycrystalline silicon using the monosilane process. A reactor (10) is dis... |
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Invention
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Reactor for producing polycrystalline silicon using the monosilane process. The invention relates... |
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Invention
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Method and system for the production of pure silicon.
A process for producing high-purity silico... |
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Invention
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Method and system for the production of pure silicon. The invention relates to a method for the p... |
