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2024
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Invention
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Apparatus of storing carriers and method of storing carriers.
An apparatus of storing container ... |
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Invention
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Apparatus for treating substrate and method for treating a substrate.
The inventive concept prov... |
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Invention
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Substrate treating apparatus and substrate treating method.
Disclosed is a substrate treating ap... |
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Invention
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Apparatus for treating a substrate and method for treating a substrate.
Disclosed is an apparatu... |
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Invention
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Filler member and substrate treating apparatus.
Disclosed is a substrate treating apparatus incl... |
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Invention
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Substrate processing method, manufacturing method, and substrate processing apparatus.
Disclosed... |
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Invention
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Substrate processing apparatus and substrate processing method.
Disclosed is an apparatus for pr... |
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Invention
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Container and substrate treating apparatus.
Disclosed is a container. The container includes a h... |
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Invention
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Substrate processing apparatus including nozzle unit and substrate processing method.
Proposed a... |
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Invention
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Manufacturing method, substrate processing method, and substrate processing apparatus.
Disclosed... |
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Invention
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Heating plate and method of manufacturing heating plate.
Disclosed is a heating plate for suppor... |
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Invention
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Substrate processing apparatus and method.
Disclosed is a substrate processing apparatus includi... |
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Invention
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Gripping device and transport apparatus including the same.
A gripping device connected to a veh... |
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Invention
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Transport apparatus.
A transport apparatus includes: a vehicle; a housing connected to the vehic... |
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Invention
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Substrate treating apparatus and substrate treating method.
A method of treating a substrate tre... |
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Invention
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Substrate support unit and substrate treating apparatus including the same.
A substrate support ... |
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Invention
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Substrate processing apparatus and substrate processing method.
Disclosed are a substrate proces... |
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Invention
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Substrate processing apparatus including substrate support unit.
Disclosed is a substrate proces... |
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Invention
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Semiconductor package cutting system and method.
Provided is a semiconductor package cutting sys... |
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Invention
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Substrate treating apparatus and substrate treating method.
Disclosed are an apparatus for treat... |
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Invention
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Substrate treating apparatus and heating unit.
Disclosed is a substrate treating apparatus inclu... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Substrate processing apparatus and manufacturing method thereof.
Provided is a substrate process... |
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Invention
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Substrate support device and method of controlling prevention of leakage of temperature control f... |
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Invention
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Ring assembly and substrate processing apparatus comprising the same.
The ring assembly for a su... |
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Invention
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Substrate processing device and defect detection method for substrate processing device.
Disclos... |
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Invention
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Ozone water supplying unit and substrate treating apparatus including the same.
Disclosed is an ... |
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Invention
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Substrate processing apparatus and treatment solution supply unit.
Disclosed is an apparatus for... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a support unit configu... |
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Invention
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Method of processing substrate.
In a method of processing a substrate, a test film having a firs... |
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Invention
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Logistics handling apparatus and installation method thereof.
A logistics handling apparatus and... |
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Invention
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Control device and substrate processing apparatus including the same.
A substrate processing app... |
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Invention
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Substrate processing device and substrate processing method.
Disclosed is a substrate processing... |
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Invention
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Control device and substrate processing apparatus including the same.
Provided is a control devi... |
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Invention
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Control device and substrate processing apparatus including the same.
A control device and a sub... |
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Invention
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Transfer unit and transfer robot system including transfer robot.
A transfer robot, which is con... |
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Invention
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Apparatus and method of cleaning component.
Disclosed is an apparatus for cleaning a component, ... |
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Invention
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Apparatus and method of treating substrate.
Disclosed is an apparatus for processing a substrate... |
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Invention
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Substrate treatment apparatus and substrate treatment method.
Provided is a substrate treatment ... |
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Invention
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Ring carrier and container comprising the same.
The container of the present invention accommoda... |
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Invention
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Apparatus for testing ring assembly of substrate processing apparatus.
A ring assembly test appa... |
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Invention
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Substrate treating method, substrate manufacturing method, and substrate treating apparatus.
Dis... |
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Invention
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Treatment liquid supply apparatus, substrate processing apparatus including the same and method f... |
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Invention
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Electrostatic chuck, plasma processing method, and plasma processing apparatus.
Proposed are an ... |
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Invention
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Substrate processing system and process gas supply control verification method.
Proposed are a s... |
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2023
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Invention
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Driving device.
The present disclosure provides a driving device including a driving member incl... |
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2021
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G/S
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apparatus for processing substrate; deposition apparatus for processing substrate; cleaning appar... |
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2013
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G/S
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Machines for automatically cutting and sorting semiconductor elements; machines for automatically... |
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2012
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G/S
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Machines for processing substrate, machines for manufacturing substrates, machines for etching su... |
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G/S
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Machines for processing substrate; machines for manufacturing substrates; machines for developing... |
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G/S
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Machines for processing substrate, [ machines for manufacturing substrates, machines for depositi... |
