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2024
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Invention
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Chemical supply apparatus and chemical supply method.
The present invention provides a chemical ... |
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Invention
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Substrate transfer equipment and substrate processing system using the same.
The present inventi... |
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Invention
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Apparatus and method of processing a substrate.
The present invention provides an apparatus of p... |
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Invention
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Apparatus of processing a substrate.
The present invention relates to an apparatus of processing... |
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Invention
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Method of treating substrate.
Disclosed is a method of treating a substrate, the method includin... |
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Invention
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Substrate processing apparatus and substrate processing method.
Disclosed is a substrate process... |
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Invention
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Apparatus for treating substrate.
The present invention provides an apparatus for treating a sub... |
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Invention
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Apparatus and method of processing substrate.
Disclosed are a substrate processing method and a ... |
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Invention
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Substrate processing apparatus and substrate processing method.
The present invention provides a... |
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Invention
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Substrate processing apparatus and method.
Disclosed is a substrate processing apparatus. In an ... |
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Invention
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Substrate treating apparatus.
The present invention provides a substrate treating apparatus. The... |
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Invention
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Shower head assembly and substrate processing apparatus.
Proposed are a shower head assembly and... |
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Invention
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Substrate processing apparatus.
Proposed is a substrate processing apparatus including a process... |
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Invention
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Substrate processing apparatus.
Disclosed is a substrate processing apparatus including chamber ... |
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Invention
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Showerhead assembly and substrate processing apparatus including the same.
Disclosed are a showe... |
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Invention
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Substrate support device and method of preventing occurrence of arcing.
Disclosed are a substrat... |
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Invention
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Substrate support unit and heat treatment device including same.
Proposed are a substrate suppor... |
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Invention
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Plasma-resistant o-ring evaluation unit and device.
Disclosed are a plasma-resistant O-ring eval... |
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Invention
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System for transporting articles.
Provided is a system for transporting articles that may transp... |
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Invention
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Heating plate and method of manufacturing heating plate.
Disclosed is a heating plate for suppor... |
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Invention
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Apparatus of processing a substrate and method of processing a substrate.
The present invention ... |
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Invention
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Substrate processing apparatus.
The present invention provides a substrate processing apparatus.... |
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Invention
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Reel take-out device and method.
A reel take-out device and method is provided, in which a reel ... |
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Invention
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Stocker device and substrate processing apparatus.
Disclosed is a stocker device provided on a f... |
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Invention
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End effector and substrate transfer apparatus.
A substrate transfer apparatus is provided. The s... |
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Invention
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Bowl unit and substrate processing apparatus.
Disclosed is an apparatus for processing a substra... |
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Invention
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Substrate processing apparatus, photographing unit and liquid processing chamber.
Disclosed is a... |
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Invention
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Apparatus for processing substrate.
Disclosed is an apparatus for treating a substrate, the appa... |
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Invention
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Substrate processing apparatus, substrate processing method, and manufacturing apparatus.
Disclo... |
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Invention
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Container transporting apparatus and logistics processing system including the same.
A container... |
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Invention
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Substrate processing apparatus.
Disclosed is an apparatus for treating a substrate, and more par... |
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Invention
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Tower lift and control method thereof.
There is provided a tower lift capable of increasing the ... |
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Invention
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Droplet discharge apparatus and droplet discharge method.
In a droplet discharge method, a plura... |
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Invention
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Substrate type sensor, wafer type sensor and substrate processing method.
Disclosed is a substra... |
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Invention
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Air conditioner and substrate treating apparatus including the same.
Disclosed is an air conditi... |
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Invention
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Substrate treatment apparatus and substrate treatment method.
The present invention provides a s... |
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Invention
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Duct structure, stocker, and photoresist bottle management facilities.
Provided are a duct struc... |
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Invention
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Shower head assembly and substrate treating apparatus including the same.
Provided are a shower ... |
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Invention
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Substrate treating apparatus and method.
A substrate treating apparatus and method is provided, ... |
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Invention
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Gas spraying apparatus and substrate treating apparatus including the same.
A gas spraying appar... |
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Invention
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Cover module and substrate treatment apparatus including cover module.
A cover module includes a... |
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Invention
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Apparatus for and method of processing substrate.
An apparatus for and a method of processing a ... |
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Invention
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Device and method of controlling plasma characteristic, and system for treating substrate.
A dev... |
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Invention
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Apparatus for and method of processing substrate.
An apparatus and method of processing a substr... |
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Invention
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Shower head unit, gas supply unit and substrate processing device having the same.
A shower head... |
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Invention
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Apparatus and method for controlling temperature.
The present disclosure provides an apparatus a... |
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Invention
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Scrubber apparatus.
A scrubber apparatus includes a chamber, an air intake unit connected to a s... |
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Invention
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Apparatus and method for detecting substrate state.
The present disclosure provides an apparatus... |
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Invention
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Edge bead removal method, substrate treatment apparatus performing edge bead removal method, and ... |
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Invention
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Container transport apparatus and logistics handling system including the same.
A container tran... |
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2021
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P/S
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apparatus for processing substrate; deposition apparatus for processing substrate; cleaning appar... |
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2013
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P/S
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Machines for automatically cutting and sorting semiconductor elements; machines for automatically... |
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2012
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P/S
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Machines for processing substrate, machines for manufacturing substrates, machines for etching su... |
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P/S
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Machines for processing substrate; machines for manufacturing substrates; machines for developing... |
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P/S
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Machines for processing substrate, [ machines for manufacturing substrates, machines for depositi... |
