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2024
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Invention
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Substrate delivery apparatus and substrate delivery method.
A substrate delivery apparatus and a... |
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Invention
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Film forming device. Provided is a film forming device that can make a boundary between electrode... |
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Invention
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Buffer device, mounting device, and mounting method. Provided are a buffer device, a mounting dev... |
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Invention
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Film forming apparatus. The present invention provides a film forming apparatus which is capable ... |
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Invention
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Cleaning device and mounting device. Provided are a cleaning device and a mounting device capable... |
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Invention
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Mounting device and mounting method. Provided are a mounting device and a mounting method with wh... |
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Invention
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Substrate separation device, substrate processing device, and substrate separation method. Provid... |
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Invention
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Substrate separation apparatus, substrate processing apparatus, and substrate separation method. ... |
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Invention
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Mounting tool and mounting apparatus.
According to one embodiment, a mounting tool and a mountin... |
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Invention
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Drying apparatus, dry condition confirmation method, and wafer storage container cleaning apparat... |
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Invention
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Film forming apparatus.
A film forming apparatus includes: a rotary table provided in a chamber;... |
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Invention
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Substrate processing apparatus and substrate processing method.
According to one embodiment of t... |
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Invention
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Wafer storage container drying apparatus and cleaning system.
According to one embodiment of the... |
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2023
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Invention
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Vibrating body and substrate processing apparatus. A vibrating body according to an embodiment is... |
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Invention
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Cleaning apparatus.
According to one embodiment of the present disclosure, a cleaning apparatus ... |
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Invention
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Substrate processing device. Provided is a substrate processing device that makes it possible to ... |
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Invention
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Substrate treatment apparatus and method for treating substrate.
According to one embodiment a s... |
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Invention
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Cleaning apparatus for wafer storage container.
According to an embodiment of the present disclo... |
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Invention
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Substrate processing apparatus.
According to one embodiment, a substrate processing apparatus in... |
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Invention
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Film formation apparatus.
A film formation apparatus includes: a chamber which an interior there... |
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Invention
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Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation ... |
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Invention
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Processing liquid supply device, substrate processing apparatus, and method for inspecting proces... |
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Invention
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Substrate processing apparatus and substrate processing method.
According to one embodiment, a s... |
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Invention
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Processing liquid supply device, substrate processing apparatus, and processing liquid supply met... |
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Invention
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Substrate processing apparatus and substrate processing method.
The substrate processing apparat... |
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2022
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Invention
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Substrate transfer device and substrate transfer method. Provided are a substrate transfer device... |
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Invention
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Substrate transport carriage. Provided is a substrate transport carriage capable of transporting ... |
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Invention
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Substrate processing apparatus and substrate processing method. The present invention provides a ... |
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Invention
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Maintenance method and heat treatment apparatus.
Provided is a maintenance method of a heat trea... |
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Invention
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Supply tank, supply device and supply system.
According to one embodiment, provided is a supply ... |
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Invention
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Supply device and supply system.
A supply device includes a collect tank which collects a proces... |
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Invention
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Film formation apparatus.
According to one embodiment, a film formation apparatus that suppresse... |
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Invention
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Substrate treatment device.
A substrate treatment device includes a placement platform rotating ... |
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Invention
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Substrate drying apparatus and substrate processing apparatus.
A substrate drying apparatus and ... |
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Invention
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Substrate treatment device. A substrate treatment device according to an embodiment includes a pl... |
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Invention
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Heat treatment device.
According to an embodiment of the present disclosure, a heat treatment de... |
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2021
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Invention
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Film formation apparatus and film formation method.
According to an embodiment, a film formation... |
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Invention
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Film deposition device and film deposition method. Provided are a film deposition device and a fi... |
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Invention
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Substrate carrying apparatus. A substrate carrying apparatus that can reduce attachment of dust t... |
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Invention
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Film formation apparatus. A film deposition apparatus reduces hillock formation while yielding un... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus according to an embodiment of th... |
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Invention
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Substrate processing apparatus and substrate processing method. A substrate processing apparatus ... |
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Invention
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Substrate treatment method and substrate treatment apparatus.
According to one embodiment, a sub... |
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Invention
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Cooling device, substrate treatment device, cooling method, and substrate treatment method. Accor... |
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Invention
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Substrate treatment device. According to one embodiment, a substrate treatment device includes a ... |
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Invention
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Substrate treatment device. According to one embodiment, q substrate treatment device includes a ... |
