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2025
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Invention
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Silicon substrate and heat treatment method for silicon substrate. The present invention provides... |
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Invention
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Method for measuring resistivity of silicon single crystal.
The present invention is a method fo... |
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2024
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Invention
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Method for determining defect region of silicon single-crystal substrate. The present invention i... |
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Invention
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Method for manufacturing heteroepitaxial wafer. The present invention is a method for manufacturi... |
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Invention
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Manufacturing method for nitride semiconductor epitaxial substrate, nitride semiconductor epitaxi... |
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Invention
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Method for evaluating crystallinity of 3c-sic film. The present invention provides a method for e... |
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Invention
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Pinhole and deaeration failure inspection method for bag body in which sealed storage container i... |
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Invention
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Epitaxial wafer and production method therefor. The present invention is an epitaxial wafer compr... |
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Invention
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Soi wafer and method for manufacturing same. The present invention is a SOI wafer comprising, in ... |
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Invention
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Method for manufacturing epitaxial wafer. The present invention is a method for manufacturing an ... |
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Invention
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Method for manufacturing epitaxial wafer. Provided is a method for manufacturing an epitaxial waf... |
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Invention
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Single-crystal silicon substrate and method for producing single-crystal silicon substrate. The p... |
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Invention
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Nitride semiconductor epitaxial wafer and method for manufacturing nitride semiconductor epitaxia... |
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Invention
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Cleaning process device. The present invention is a cleaning process device 1 comprising a horn-t... |
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Invention
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Diamond substrate and method for manufacturing diamond substrate. The present invention is a diam... |
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Invention
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Spin etching device, spin etching method, and wafer holding method. The present invention is a sp... |
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Invention
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Heteroepitaxial wafer and method for manufacturing same. The present invention provides a heteroe... |
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Invention
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Production method for gan epitaxial film and production method for semiconductor device. The pres... |
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Invention
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Silicon single crystal manufacturing device. The present invention is a device for manufacturing ... |
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Invention
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Method for manufacturing sic substrate, method for manufacturing semiconductor device, sic substr... |
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Invention
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Method for manufacturing nitride semiconductor substrate, method for manufacturing hybrid ic, and... |
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Invention
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Method for applying resin to wafer and method for manufacturing wafer. The present invention pert... |
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Invention
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Cylindrical grinding machine and cylindrical grinding method. The present invention provides a cy... |
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Invention
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Method for producing joined substrate and method for producing semiconductor device. The present ... |
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Invention
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High mobility substrate having δ-doped layer and method for manufacturing high mobility substrate... |
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Invention
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Polishing cloth cleaning method. The present invention is a polishing cloth cleaning method in wh... |
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2023
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G/S
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Semiconductor silicon wafers; Semiconductor silicon ingots sold as an integral component of semic... |
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Invention
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Substrate for electronic device and method for producing the same.
The present invention is a su... |
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Invention
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Method for growing diamond on silicon substrate and method for selectively growing diamond on sil... |
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2022
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Invention
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Substrate for high-frequency device, and method for producing same.
A substrate for a high-frequ... |
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Invention
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Nitride semiconductor substrate and method for producing same.
A nitride semiconductor substrate... |
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Invention
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Wafer having micro-led structure, method for manufacturing wafer having micro-led structure, and ... |
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Invention
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Nitride semiconductor substrate and method for producing same.
The present invention is a nitrid... |
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Invention
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Method for manufacturing bonded semiconductor wafer.
A method for manufacturing a bonded semicon... |
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Invention
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Nitride semiconductor substrate and method for producing nitride semiconductor substrate.
The pr... |
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Invention
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Substrate for electronic device and method for producing the same.
A substrate for an electronic... |
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Invention
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Nitride semiconductor substrate and manufacturing method therefor.
A nitride semiconductor subst... |
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Invention
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Nitride semiconductor substrate and method for manufacturing nitride semiconductor substrate.
Th... |
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Invention
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Method for manufacturing bonded semiconductor wafer.
The present invention provides a method for... |
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Invention
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Method for separating a bonded wafer.
The present disclosure provides a method for separating a ... |
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Invention
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Epitaxial wafer and production method therefor.
An epitaxial wafer production method, including ... |
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Invention
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Method for manufacturing nitride semiconductor wafer, and nitride semiconductor wafer.
A method ... |
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Invention
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Method for producing heteroepitaxial film.
A method for efficiently producing a heteroepitaxial ... |
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Invention
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Nitride semiconductor substrate and method for manufacturing same.
A nitride semiconductor subst... |
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Invention
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Method for manufacturing nitride semiconductor substrate.
A method for manufacturing a nitride s... |
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Invention
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Nitride semiconductor substrate and method for manufacturing the same.
A nitride semiconductor s... |
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Invention
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Temporarily bonded wafer and method for manufacturing the wafer.
A temporarily bonded wafer in w... |
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Invention
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Method for producing silicon single crystal.
The present invention provides a method for produci... |
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Invention
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Method for producing heteroepitaxial wafer.
The present invention provides a method for producin... |
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Invention
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Bonded wafer and method for producing bonded wafer.
A bonded wafer, wherein an epitaxial wafer h... |
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Invention
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Method of manufacturing compound semiconductor bonded substrate and compound semiconductor bonded... |
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2000
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G/S
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Semiconductor silicon wafers, semiconductor silicon ingots. |
