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2024
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Invention
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Cleaning process device. The present invention is a cleaning process device 1 comprising a horn-t... |
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Invention
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Spin etching device, spin etching method, and wafer holding method. The present invention is a sp... |
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Invention
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Heteroepitaxial wafer and method for manufacturing same. The present invention provides a heteroe... |
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Invention
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Production method for gan epitaxial film and production method for semiconductor device. The pres... |
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Invention
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Silicon single crystal manufacturing device. The present invention is a device for manufacturing ... |
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Invention
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Method for manufacturing sic substrate, method for manufacturing semiconductor device, sic substr... |
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Invention
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Method for manufacturing nitride semiconductor substrate, method for manufacturing hybrid ic, and... |
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Invention
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Method for applying resin to wafer and method for manufacturing wafer. The present invention pert... |
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Invention
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Cylindrical grinding machine and cylindrical grinding method. The present invention provides a cy... |
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Invention
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Method for producing joined substrate and method for producing semiconductor device. The present ... |
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Invention
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High mobility substrate having δ-doped layer and method for manufacturing high mobility substrate... |
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Invention
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Polishing cloth cleaning method. The present invention is a polishing cloth cleaning method in wh... |
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Invention
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Method for manufacturing semiconductor substrate, semiconductor substrate, and semiconductor devi... |
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Invention
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Epitaxial wafer, soi wafer, and method for manufacturing same. The present invention pertains to ... |
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Invention
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Defect evaluation method for semiconductor substrate. The present invention provides a defect eva... |
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Invention
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Semiconductor substrate production method, semiconductor substrate, and semiconductor device. The... |
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2023
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Invention
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Method for producing epitaxial substrate, and epitaxial substrate. The present invention provides... |
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Invention
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Method for manufacturing 3c-sic single-crystal epitaxial substrate, method for manufacturing 3c-s... |
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Invention
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Heteroepitaxial single-crystal-silicon substrate, epitaxial substrate, semiconductor device, and ... |
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Invention
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Method for producing heteroepitaxial substrate. This method for producing a heteroepitaxial subst... |
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P/S
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Semiconductor silicon wafers; Semiconductor silicon ingots sold as an integral component of semic... |
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2022
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Invention
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Method for manufacturing bonded semiconductor wafer.
A method for manufacturing a bonded semicon... |
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Invention
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Substrate for electronic device and method for producing the same.
A substrate for an electronic... |
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Invention
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Nitride semiconductor substrate and manufacturing method therefor.
A nitride semiconductor subst... |
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Invention
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Nitride semiconductor substrate and method for manufacturing nitride semiconductor substrate.
Th... |
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Invention
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Method for separating a bonded wafer.
The present disclosure provides a method for separating a ... |
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Invention
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Epitaxial wafer and production method therefor.
An epitaxial wafer production method, including ... |
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Invention
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Method for manufacturing nitride semiconductor wafer, and nitride semiconductor wafer.
A method ... |
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Invention
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Nitride semiconductor substrate and method for manufacturing same.
A nitride semiconductor subst... |
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Invention
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Method for manufacturing nitride semiconductor substrate.
A method for manufacturing a nitride s... |
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Invention
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Nitride semiconductor substrate and method for manufacturing the same.
A nitride semiconductor s... |
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Invention
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Temporarily bonded wafer and method for manufacturing the wafer.
A temporarily bonded wafer in w... |
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Invention
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Method for producing silicon single crystal.
The present invention provides a method for produci... |
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Invention
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Method for producing heteroepitaxial wafer.
The present invention provides a method for producin... |
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Invention
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Substrate for semiconductor device and method for manufacturing the same.
The present invention ... |
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Invention
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Epitaxial wafer for ultraviolet ray emission device and method for manufacturing the same.
An ep... |
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Invention
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Method for carrying wafer and wafer-carrying apparatus.
The present invention is a method for ca... |
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Invention
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Bonded wafer and method for producing bonded wafer.
A bonded wafer, wherein an epitaxial wafer h... |
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Invention
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Clean room.
The present invention is a clean room including a stocker area in which an article m... |
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Invention
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Debris determination method.
A debris determination method of determining, using an image obtain... |
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Invention
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Debris determination method.
A debris determination method of determining, from an image obtaine... |
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Invention
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Method for forming thermal oxide film on semiconductor substrate and method for producing semicon... |
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Invention
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Wafer marking method, method of producing nitride semiconductor device and nitride semiconductor ... |
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Invention
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Packaging member for packaging object to be transported between clean rooms, packaging method, an... |
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Invention
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Method of manufacturing compound semiconductor bonded substrate and compound semiconductor bonded... |
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Invention
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Silicon wafer manufacturing method.
The present invention is a silicon wafer manufacturing metho... |
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Invention
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Apparatus for manufacturing single crystal.
The present invention is an apparatus for manufactur... |
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Invention
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Method for manufacturing epitaxial wafer for ultraviolet ray emission device, method for manufact... |
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2021
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Invention
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Method for manufacturing bonded wafer, and bonded wafer.
A method for manufacturing a bonded waf... |
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2000
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P/S
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Semiconductor silicon wafers, semiconductor silicon ingots. |
