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2012
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Invention
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Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for man... |
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2011
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Invention
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2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing... |
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Invention
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Method of manufacturing nitride semiconductor substrates having a base substrate with parallel tr... |
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Invention
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Wafer unloading system and wafer processing equipment including the same. A wafer unloading syste... |
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2010
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Invention
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Compound semiconductor substrate grown on metal layer, method of manufacturing the same, and comp... |
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Invention
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Method of manufacturing nitride semiconductor device. A method of manufacturing a nitride semicon... |
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Invention
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Image sensor and method for manufacturing the same.
Provided are a quartz crucible and a method ... |
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Invention
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Method for preparing compound semiconductor substrate. Provided is a method for preparing a compo... |
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Invention
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Epi wafer and silicon single crystal ingot for the same and fabrication method thereof. An EPI wa... |
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Invention
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Light emitting diode display and method of manufacturing the same. A method of manufacturing LED ... |
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Invention
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Cassette jig for wafer cleaning apparatus and cassette assembly having the same. A cassette jig f... |
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Invention
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Double side polishing apparatus and carrier therefor. A double side polishing apparatus comprises... |
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2009
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Invention
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Apparatus and method for wet treatment of an object and fluid diffusion plate and barrel used the... |
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Invention
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Apparatus and method for wet-processing object, and fluid diffusion plate and barrel used therein... |
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Invention
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Seed chuck for a single crystal silicon ingot growing apparatus. The present invention relates to... |
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Invention
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Single-host multi-workstation computer system, its equipment configuration method and workstation... |
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Invention
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Semiconductor device, light emitting device and method of manufacturing the same. Disclosed are a... |
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Invention
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Method and apparatus for growing high quality silicon single crystal, silicon single crystal ingo... |
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Invention
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Apparatus for manufacturing high-quality semiconductor single crystal ingot and method using the ... |
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2008
|
Invention
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Method for manufacturing gallium nitride single crystalline substrate using self-split. The prese... |
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Invention
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Silicon wafer grinding apparatus, retaining assembly used for the same and silicon wafer flatness... |
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Invention
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Semiconductor single crystal growth method having improvement in oxygen concentration characteris... |
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Invention
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Method for cleaning silicon wafer.
A method for cleaning a silicon wafer includes (S11) cleaning... |
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Invention
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Method and apparatus for manufacturing an ultra low defect semiconductor single crystalline ingot... |
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Invention
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Box cleaner for cleaning wafer shipping box. The present invention relates to a box cleaner inclu... |
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Invention
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Method for growing silicon ingot.
Provided is a method for growing a silicon ingot. According to... |
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Invention
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Method of manufacturing wafer carrier.
Provided is a method of manufacturing a wafer carrier cap... |
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Invention
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Method of manufacturing strained silicon on-insulator substrate. Provided is a method of manufact... |
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Invention
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Method for preparing substrate for growing gallium nitride and method for preparing gallium nitri... |
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|
Invention
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High quality single crystal and method of growing the same.
Disclosed is a method of growing a s... |
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Invention
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Gallium nitride semiconductor and method of manufacturing the same.
The present invention provid... |
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2007
|
Invention
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Silicon wafer with controlled distribution of embryos that become oxygen precipitates by succeedi... |
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|
Invention
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Method for cleaning solar cell substrates.
The present invention relates to a method for cleanin... |
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Invention
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Method for manufacturing high flatness silicon wafer.
The present invention relates to a method ... |
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Invention
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Wafer support pin for preventing slip dislocation during annealing of water and wafer annealing m... |
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Invention
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Wafer inspection machine and method.
The present invention relates to wafer inspection machine a... |
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Invention
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Nitride semiconductor substrate having a base substrate with parallel trenches. The present inven... |
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Invention
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Apparatus and method for mounting silicon ingot to mounter.
The present invention relates to app... |
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Invention
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Method for cleaning silicon wafer.
The present invention relates to a method for cleaning a sili... |
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Invention
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Compound semiconductor substrate grown on metal layer, method for manufacturing the same, and com... |
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Invention
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Method for manufacturing semiconductor single crystal by czochralski technology, and single cryst... |
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Invention
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Method of identifying crystal defect region in monocrystalline silicon using metal contamination ... |
