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2026
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Invention
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Multi-row carrier cassette for semiconductor wafers.
A carrier cassette for wafers comprises two... |
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Invention
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Energy-efficient vacuum lock with preheating function as part of a high-temperature process plant... |
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Invention
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System for treating a metal foil. The present invention relates to a system for treating a metal ... |
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2025
|
Invention
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Apparatus and method for treating wafers using guiding elements.
An apparatus for treating wafer... |
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Invention
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Apparatus and method for treating wafers using separating elements.
An apparatus for treating wa... |
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Invention
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Lock valve. The invention relates to a lock valve with a lock valve opening, a lock valve cover (... |
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Invention
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Coating source for targeted doping of a coating, and method for doping said coating. The inventio... |
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2024
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Invention
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Container for holding bulk material while it is being introduced into a fluid, and method for pro... |
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Invention
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Multi-row carrier cassette for semiconductor wafers. A carrier cassette for wafers comprises: two... |
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|
Invention
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Generation of textured surfaces, manufacturing of tandem solar cells, and tandem solar cell. In a... |
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Invention
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Plant module for collection and removal of rejects. The invention relates to a system comprising ... |
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|
Invention
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Process for the formation of a perovskite layer in particular for a photovoltaic cell. Described ... |
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Invention
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Lock chamber. The invention relates to a lock chamber for a substrate treatment system with a inl... |
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Invention
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System and method for handling trays. A system comprising a feeder zone (2), at least a first and... |
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Invention
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Device and method for treating wafers using separating elements. The invention relates to a devic... |
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Invention
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Device and method for treating wafers using guide elements. The invention relates to a device for... |
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|
Invention
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Carrier for edge passivation. The present invention relates in general to a carrier for the edge ... |
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Invention
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Removal handling. The invention relates to removal handling with a first row and a second row eac... |
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2023
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Invention
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Detent pawl. A detent pawl with a detent and a bellows-type suction element, the detent having a ... |
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G/S
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Coating machine for thin film application; Sputtering machine; Machine tools, namely, process mod... |
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Invention
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Installation and method for the handling of trays.
System comprising a supply zone, a first and ... |
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Invention
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Installation and method for the handling of trays. The invention relates to an installation with ... |
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Invention
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Continuous through-flow plant. A continuous through-flow plant with a loading unit, at least one ... |
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G/S
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Coating machine for thin film application; Sputtering machine; Machine tools, namely process modu... |
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|
Invention
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Coating plant and method for target replacement.
The present invention relates to a coating plan... |
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|
Invention
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Coating plant and method for target replacement. The present invention relates to a coating plant... |
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|
Invention
|
Coating module with improved cathode arrangement.
The present invention relates to a coating mod... |
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|
Invention
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Coating module with improved cathode arrangement. The present invention relates to a coating modu... |
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Invention
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Producing textured surfaces, manufacturing tandem solar cells, and tandem solar cells. In a metho... |
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2022
|
Invention
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Coating chamber with distance detection for the substrates. The present invention relates to a co... |
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|
Invention
|
Method and wet bench for the in-line processing of solar-cell substrates.
A method and a wet ben... |
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|
Invention
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Method and wet bench for the in-line processing of solar-cell substrates. A method and a wet benc... |
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|
Invention
|
Coating source having a refill device.
The present invention relates to a coating source for a c... |
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Invention
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Coating source having a refill device. The present invention relates to a coating source for a co... |
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Invention
|
Coating source, coating installation and method for coating substrates.
The present invention re... |
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Invention
|
Coating source, coating installation and method for coating substrates. The present invention rel... |
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|
Invention
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Spacer device for a heating system for heating large-area substrates, heating system, and heating... |
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|
Invention
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Process for manufacturing a starting material for a silicon solar cell having passivated contacts... |
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|
Invention
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Substrate carrier with centering function.
The present invention relates to a substrate carrier ... |
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Invention
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Substrate support.
The present invention relates to a substrate carrier for receiving and transp... |
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Invention
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Substrate carrier.
The present invention relates to a substrate carrier for receiving and transp... |
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Invention
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Substrate carrier. The present invention relates to a substrate carrier for receiving and for tra... |
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|
Invention
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Substrate support. The present invention relates to a substrate support for receiving and transpo... |
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|
Invention
|
Monitoring a flame treatment device.
The present invention relates very generally to the monitor... |
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|
Invention
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Monitoring a flame treatment device. The present invention relates very generally to the monitori... |
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2021
|
Invention
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Slit diaphragm. The present invention relates to a slit diaphragm, a slit diaphragm system compri... |
|
|
Invention
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Heating system and method for heating large-surface substrates.
The present invention relates to... |
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Invention
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Method and system for the production of a starting material for a silicon solar cell with passiva... |
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2020
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G/S
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Vacuum coating machines; automated handling apparatus;
moving and handling equipment; industrial... |
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G/S
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Machines for surface treatment; machines for cleaning;
machines for etching; industrial robots; ... |
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G/S
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Machines for plasma surface treatment; machines for chemical surface treatment; machines for larg... |
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G/S
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Machines for plasma surface treatment; machines for chemical
surface treatment; sputter coating ... |
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G/S
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Machines for plasma surface treatment; machines for chemical surface treatment; sputter coating m... |
|
|
G/S
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Vacuum coating machines; automated handling apparatus; moving and handling equipment; industrial ... |
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G/S
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Machines for surface treatment; machines for cleaning; machines for etching; industrial Robots; m... |
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2016
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G/S
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Coating compositions [chemicals for vacuum coating], other
than paint; chemical coatings for man... |
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G/S
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Coating compositions other than paint for vacuum coating, namely, chemical compounds for coating ... |
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G/S
|
Coating compositions [chemicals for vacuum coating], other than paint; chemical coatings for manu... |
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G/S
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Machines for vacuum coating, in particular by means of physical or chemical vapour deposition of ... |
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1997
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G/S
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Machines for making disc-shaped storage media, machines for coating disc-shaped plastic substrate... |
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1996
|
G/S
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sputtering machines, machines for use in the manufacture of optical storage media |
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|
G/S
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Vacuum coating installations for coating discoid plastic substrates by sputtering or metal vacuum... |
