2024
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Invention
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Device and method for treating wafers using separating elements. The invention relates to a devic... |
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Invention
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Device and method for treating wafers using guide elements. The invention relates to a device for... |
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Invention
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Carrier for edge passivation. The present invention relates in general to a carrier for the edge ... |
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Invention
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Removal handling. The invention relates to removal handling with a first row and a second row eac... |
2023
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Invention
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Detent pawl. A detent pawl with a detent and a bellows-type suction element, the detent having a ... |
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G/S
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Coating machine for thin film application; Sputtering machine; Machine tools, namely, process mod... |
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Invention
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Installation and method for the handling of trays. The invention relates to an installation with ... |
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Invention
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Continuous through-flow plant. A continuous through-flow plant with a loading unit, at least one ... |
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G/S
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Coating machine for thin film application; Sputtering machine; Machine tools, namely process modu... |
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Invention
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Coating plant and method for target replacement. The present invention relates to a coating plant... |
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Invention
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Coating module with improved cathode arrangement. The present invention relates to a coating modu... |
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Invention
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Producing textured surfaces, manufacturing tandem solar cells, and tandem solar cells. In a metho... |
2022
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Invention
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Coating chamber with distance detection for the substrates. The present invention relates to a co... |
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Invention
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Method and wet bench for the in-line processing of solar-cell substrates.
A method and a wet ben... |
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Invention
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Method and wet bench for the in-line processing of solar-cell substrates. A method and a wet benc... |
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Invention
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Coating source having a refill device. The present invention relates to a coating source for a co... |
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Invention
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Coating source, coating installation and method for coating substrates. The present invention rel... |
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Invention
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Spacer device for a heating system for heating large-area substrates, heating system, and heating... |
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Invention
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Process for manufacturing a starting material for a silicon solar cell having passivated contacts... |
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Invention
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Substrate carrier with centering function.
The present invention relates to a substrate carrier ... |
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Invention
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Substrate carrier.
The present invention relates to a substrate carrier for receiving and transp... |
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Invention
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Substrate carrier. The present invention relates to a substrate carrier for receiving and for tra... |
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Invention
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Substrate support. The present invention relates to a substrate support for receiving and transpo... |
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Invention
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Monitoring a flame treatment device.
The present invention relates very generally to the monitor... |
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Invention
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Monitoring a flame treatment device. The present invention relates very generally to the monitori... |
2021
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Invention
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Slit diaphragm.
The present invention relates to a slit diaphragm, a slit diaphragm system compr... |
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Invention
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Slit diaphragm. The present invention relates to a slit diaphragm, to a slit diaphragm system com... |
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Invention
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Heating system and method for heating large-surface substrates.
The present invention relates to... |
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Invention
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Heating system and method for heating large-surface substrates. The present invention relates to ... |
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Invention
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Method and system for the production of a starting material for a silicon solar cell with passiva... |
2020
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G/S
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Vacuum coating machines; automated handling apparatus;
moving and handling equipment; industrial... |
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G/S
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Machines for surface treatment; machines for cleaning;
machines for etching; industrial robots; ... |
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Invention
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Treatment machine, drive unit for a treatment machine and use of the treatment machine.
A treatm... |
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Invention
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Method and wet bench for selectively removing an emitter layer on a single side of a silicon subs... |
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G/S
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Machines for plasma surface treatment; machines for chemical surface treatment; machines for larg... |
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G/S
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Machines for plasma surface treatment; machines for chemical
surface treatment; sputter coating ... |
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Invention
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Plasma treatment system and plasma treatment method.
A treatment system (100) comprises a proces... |
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Invention
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Plasma treatment system and plasma treatment method. A treatment system (100) has a process chamb... |
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G/S
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Machines for plasma surface treatment; machines for chemical surface treatment; sputter coating m... |
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G/S
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Vacuum coating machines; automated handling apparatus; moving and handling equipment; industrial ... |
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G/S
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Machines for surface treatment; machines for cleaning; machines for etching; industrial Robots; m... |
2019
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Invention
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Method of coating substrates. The disclosure relates to a method of determining a velocity profil... |
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Invention
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Continuous flow system and method for coating substrates.
A continuous machine (100) for coating... |
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Invention
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Continuous flow system and method for coating substrates. The invention relates to a continuous f... |
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Invention
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Process and device for providing vapor. The present invention is directed to a method and an appa... |
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Invention
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Process and device for providing vapor. The present invention relates to a process and a device f... |
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Invention
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Method and device for cleaning etched surfaces of a semiconductor substrate. The invention relate... |
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Invention
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Method and device for treating etched surfaces of a semiconductor substrate using a ozone-contain... |
2018
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Invention
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Device and method for treating substrates using a support roller having a porous material. A devi... |
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Invention
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Vacuum lock and method for transferring a substrate carrier. A vacuum lock for a vacuum coating p... |
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Invention
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Vacuum lock and method for transferring a substrate carrier via a lock. The invention relates to ... |
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Invention
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Method and device for texturing a surface of a multicrystalline diamond wire-sawn silicon substra... |
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Invention
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Illuminant. An illuminant comprising a transparent substrate layer with a first index of refracti... |
2017
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Invention
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A non-contact substrate carrier for simultaneous rotation and levitation of a substrate.
A syst... |
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Invention
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System and method for gas phase deposition.
A system for gas phase deposition comprises a gas in... |
2016
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G/S
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Coating compositions [chemicals for vacuum coating], other
than paint; chemical coatings for man... |
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G/S
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Coating compositions other than paint for vacuum coating, namely, chemical compounds for coating ... |
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Invention
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System and method for gas phase deposition.
System and method for gas phase deposition of at lea... |
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G/S
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Coating compositions [chemicals for vacuum coating], other than paint; chemical coatings for manu... |
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G/S
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Machines for vacuum coating, in particular by means of physical or chemical vapour deposition of ... |
2004
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G/S
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Machines; machines and apparatus for manufacturing products of plastic, including injection mould... |
1997
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G/S
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Machines for making disc-shaped storage media, machines for coating disc-shaped plastic substrate... |
1996
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G/S
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sputtering machines, machines for use in the manufacture of optical storage media |
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G/S
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Vacuum coating installations for coating discoid plastic substrates by sputtering or metal vacuum... |