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2024
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Invention
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Filter cleaning method. Provided is a filter cleaning method capable of efficiently reducing part... |
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Invention
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Silicon single crystal production method and silicon single crystal production device. GAPGAPGAPG... |
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Invention
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Silicon wafer and production method for same. [Problem] To provide a silicon wafer that has littl... |
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Invention
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Low resistivity wafer.
A semiconductor wafer including a single crystal doped with a dopant, whe... |
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Invention
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Method for measuring amount of change in height of silicon raw material, and silicon single cryst... |
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Invention
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Defect detection device, defect detection method, and program. The present invention detects, wit... |
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Invention
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Appearance inspection device and appearance inspection method. Provided is an appearance inspecti... |
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Invention
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Method for determining conditions for formation of oxide film, method for forming oxide film, and... |
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Invention
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Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of p... |
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Invention
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Epitaxial silicon wafer and manufacturing method therefor. [Problem] To provide: an epitaxial sil... |
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Invention
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Method for determining semiconductor wafer-cleaning condition, and method for cleaning semiconduc... |
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Invention
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Infrared transmissivity measurement method of quartz glass crucible.
An infrared transmissivity ... |
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Invention
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Epitaxial silicon wafer, method for producing same, and method for producing semiconductor device... |
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Invention
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Semiconductor wafer cleaning method. Proposed is a semiconductor wafer cleaning method by which a... |
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2023
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Invention
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Silicon single crystal manufacturing method, and silicon single crystal manufacturing apparatus. ... |
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Invention
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Silicon single crystal production method and silicon single crystal production apparatus. This si... |
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Invention
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Wafer separation apparatus and method, and method for manufacturing silicon wafer.
It would be h... |
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Invention
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Method for cleaning silicon wafer, method for producing silicon wafer, and silicon wafer. In the ... |
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Invention
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Polishing head, polishing device and method of manufacturing semiconductor wafer.
The polishing ... |
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Invention
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Method for cleaning semiconductor wafer, method for producing semiconductor wafer, and semiconduc... |
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Invention
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Quartz glass crucible and method for producing silicon single crystal using same. [Problem] To pr... |
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Invention
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Semiconductor wafer processing device. Provided is a semiconductor wafer processing device capabl... |
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Invention
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Semiconductor production apparatus, semiconductor production plant, and semiconductor production ... |
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Invention
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Quartz glass crucible for silicon single-crystal pulling, and silicon single-crystal manufacturin... |
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Invention
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Silicon wafer with laser mark and method for producing same. In order to have uniform dot holes e... |
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Invention
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Pulling-up apparatus control method, control program, control apparatus, singly crystal silicon i... |
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Invention
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Method for cleaning silicon wafer, method for producing silicon wafer, and silicon wafer. A metho... |
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Invention
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Method for modeling wafer shape, and method for manufacturing wafer. Provided is a method for mod... |
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Invention
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One-side polishing apparatus for workpiece, method for one-side polishing of workpiece, and metho... |
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G/S
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Silicon; polysilicon for use in the manufacture of semiconductor and solar batteries; chunk polys... |
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G/S
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Semi-conductor wafer |
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Invention
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Semiconductor sample evaluation method, semiconductor sample evaluation device, and semiconductor... |
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2022
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Invention
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Epitaxial wafer manufacturing method and epitaxial wafer manufacturing apparatus.
A manufacturin... |
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Invention
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Method for cutting silicon ingot.
A method for cutting a silicon ingot includes cutting a silico... |
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Invention
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Cushioning material, packing body, and packing method.
There is provided a cushioning material, ... |
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Invention
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Magnet for single crystal production apparatus, single crystal production apparatus, and method o... |
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Invention
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Manufacturing method of single crystal and single crystal manufacturing device.
A manufacturing ... |
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G/S
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Material treatment, namely, crystallizing of silicon; slicing of semi-conductor silicon ingots; s... |
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G/S
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Solar cells; wafers for solar cells; semiconductor wafers; semiconductor silicon wafers; single-c... |
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Invention
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Method of measuring contact angle of silicon wafer and method of evaluating surface condition of ... |
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Invention
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Method of cleaning semiconductor wafer and method of manufacturing semiconductor wafer.
This met... |
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Invention
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Production method for silicon monocrystal and production method for silicon wafer.
A method of m... |
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Invention
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Double-side polishing method for work and double-side polishing apparatus for work.
Based on the... |
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Invention
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Wafer visual inspection apparatus and wafer visual inspection method.
The visual inspection appa... |
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Invention
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Polishing head, polishing device, and method of manufacturing semiconductor wafer.
A polishing h... |
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G/S
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Semiconductor wafers |
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Invention
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Double-side polishing apparatus and double-side polishing method for workpieces.
Provided is a d... |
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Invention
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Semiconductor wafer cleaning device, semiconductor wafer cleaning method, and method for manufact... |
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Invention
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Method of creating correlation relational formula for determining polishing condition, method of ... |
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Invention
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Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single c... |
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Invention
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Processing condition setting apparatus, processing condition setting method, and wafer production... |
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Invention
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Method of evaluating silicon single-crystal ingot, method of evaluating silicon epitaxial wafer, ... |
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2021
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Invention
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Wafer storage container cleaning apparatus, and wafer storage container cleaning method.
A wafer... |
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2018
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G/S
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Quartz; silica stone Vitreous silica as a semi-finished product, namely, ingots, tubes, discs, pl... |
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G/S
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Quartz |
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2011
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G/S
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[ quartz ] non-metal, vitreous silica crucibles for melting a polycrystalline silicon material an... |
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G/S
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[ quartz; silica stone ] non-metal, vitreous silica crucibles for melting a polycrystalline silic... |
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G/S
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[ quartz; silica stone made in significant part of quartz ] non-metal, vitreous silica crucibles ... |
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2009
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G/S
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Silicon wafers; silicon substrates; single crystal silicon wafers; mono-crystalline silicon wafer... |
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G/S
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Silicon wafers; silicon substrates; single crystal silicon
wafers; mono-crystalline silicon wafe... |
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2008
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G/S
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Solar cells; wafers for solar cells; semiconductor wafers;
semiconductor silicon wafers; single-... |
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G/S
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Semiconductor wafers. |
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2007
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G/S
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Silicon; silicon plates; silicon bars; polycrystal silicon;
single crystal silicon ingots; semi-... |
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2004
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G/S
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Semi-conductor wafer. |
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2003
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G/S
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SEMICONDUCTOR WAFERS |
