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2025
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Invention
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Manufacturing method of quartz glass crucible.
A manufacturing method of a quartz glass crucible... |
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Invention
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Dopant addition method, monocrystalline silicon manufacturing method, dopant addition control dev... |
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Invention
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Material feeding method, monocrystalline silicon manufacturing method, material feed control devi... |
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Invention
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Vapor deposition device.
A vapor deposition device is provided that can perform CVD processing w... |
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Invention
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N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon waf... |
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Invention
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Silicon wafer and epitaxial silicon wafer.
A silicon wafer is provided in which a dopant is phos... |
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Invention
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Substrate transfer system.
The provided is a substrate transfer system that can prevent the mirr... |
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Invention
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Substrate transport system.
The system has: a transport section that transports a substrate so t... |
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2024
|
Invention
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Semiconductor wafer evaluation method and semiconductor wafer production method. Provided is a se... |
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Invention
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Epitaxial silicon wafer and method for producing the same. An epitaxial silicon wafer comprises a... |
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Invention
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Single crystal manufacturing method. Proposed is a single crystal manufacturing method capable of... |
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Invention
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Notch formation position determination method, notch formation method, wafer manufacturing method... |
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Invention
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Method for manufacturing carrier plate for double-side polishing device, double-side polishing me... |
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|
Invention
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Dopant addition device, dopant addition method, and method for producing silicon single crystal. ... |
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Invention
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Silicon wafer polishing method. [Problem] To provide a silicon wafer having a small number of PID... |
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Invention
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Filter cleaning method. Provided is a filter cleaning method capable of efficiently reducing part... |
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|
Invention
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Epitaxial silicon wafer and method for manufacturing same. Provided is an epitaxial silicon wafer... |
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|
Invention
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Silicon single crystal production method and silicon single crystal production device. GAPGAPGAPG... |
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|
Invention
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Silicon wafer and production method for same. [Problem] To provide a silicon wafer that has littl... |
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Invention
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Epitaxial growth device and method for manufacturing epitaxial wafer. The present invention compr... |
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|
Invention
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Polishing device and polishing method for workpiece. A double-side polishing device for a workpie... |
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Invention
|
Low resistivity wafer.
A semiconductor wafer including a single crystal doped with a dopant, whe... |
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Invention
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Solid-liquid interface shape estimation method, solid-liquid interface shape estimation device, s... |
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|
Invention
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Chamfering device, chamfering method, and manufacturing method for single crystal silicon block. ... |
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Invention
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Method for measuring amount of change in height of silicon raw material, and silicon single cryst... |
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|
Invention
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Defect detection device, defect detection method, and program. The present invention detects, wit... |
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|
Invention
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Appearance inspection device and appearance inspection method. Provided is an appearance inspecti... |
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|
Invention
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Method for determining conditions for formation of oxide film, method for forming oxide film, and... |
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|
Invention
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Epitaxial silicon wafer and manufacturing method therefor. [Problem] To provide: an epitaxial sil... |
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|
Invention
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Method for determining semiconductor wafer-cleaning condition, and method for cleaning semiconduc... |
|
|
Invention
|
Semiconductor wafer cleaning method. Proposed is a semiconductor wafer cleaning method by which a... |
|
2023
|
Invention
|
Silicon single crystal manufacturing method, and silicon single crystal manufacturing apparatus. ... |
|
|
Invention
|
Silicon single crystal production method and silicon single crystal production apparatus. This si... |
|
|
Invention
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Method for cleaning silicon wafer, method for producing silicon wafer, and silicon wafer. In the ... |
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|
Invention
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Apparatus for measuring thickness of workpiece, method for measuring thickness of workpiece, and ... |
|
|
G/S
|
Silicon; polysilicon for use in the manufacture of semiconductor and solar batteries; chunk polys... |
|
|
Invention
|
Single crystal pulling apparatus.
There is provided a monocrystal pull-up apparatus, including: ... |
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|
Invention
|
Wafer determination method, determination program, determination apparatus, wafer production meth... |
|
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G/S
|
Semi-conductor wafer |
|
|
Invention
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Determination method of wafer polishing conditions, method of manufacturing wafer, and wafer one ... |
|
|
Invention
|
Method for growing single-crystal silicon, method for producing silicon wafer, and single-crystal... |
|
|
Invention
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Method and apparatus for producing silicon single crystal and method for producing silicon wafer.... |
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|
Invention
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Packaging unit and transportation container.
A packaging unit includes a lower cushioning materi... |
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|
Invention
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Manufacturing method of silicon single crystal.
A manufacturing method of a silicon single cryst... |
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2022
|
Invention
|
Epitaxial wafer manufacturing method and epitaxial wafer manufacturing apparatus.
A manufacturin... |
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|
Invention
|
Method for cutting silicon ingot.
A method for cutting a silicon ingot includes cutting a silico... |
|
|
Invention
|
Cushioning material, packing body, and packing method.
There is provided a cushioning material, ... |
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|
Invention
|
Magnet for single crystal production apparatus, single crystal production apparatus, and method o... |
|
|
Invention
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Method of evaluating semiconductor sample, evaluation device of semiconductor sample and method o... |
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|
Invention
|
Manufacturing method of single crystal and single crystal manufacturing device.
A manufacturing ... |
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|
G/S
|
Material treatment, namely, crystallizing of silicon; slicing of semi-conductor silicon ingots; s... |
|
|
G/S
|
Solar cells; wafers for solar cells; semiconductor wafers; semiconductor silicon wafers; single-c... |
|
|
Invention
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Method of measuring contact angle of silicon wafer and method of evaluating surface condition of ... |
|
|
Invention
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Production method for silicon monocrystal and production method for silicon wafer.
A method of m... |
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G/S
|
Semiconductor wafers |
|
2018
|
G/S
|
Quartz; silica stone Vitreous silica as a semi-finished product, namely, ingots, tubes, discs, pl... |
|
|
G/S
|
Quartz; silica stone [ Vitreous silica as a semi-finished product, namely, ingots, tubes, discs, ... |
|
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G/S
|
Quartz |
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2011
|
G/S
|
[ quartz ] non-metal, vitreous silica crucibles for melting a polycrystalline silicon material an... |
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G/S
|
[ quartz; silica stone ] non-metal, vitreous silica crucibles for melting a polycrystalline silic... |
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|
G/S
|
[ quartz; silica stone made in significant part of quartz ] non-metal, vitreous silica crucibles ... |
|
2009
|
G/S
|
Silicon wafers; silicon substrates; single crystal silicon wafers; mono-crystalline silicon wafer... |
|
|
G/S
|
Silicon wafers; silicon substrates; single crystal silicon
wafers; mono-crystalline silicon wafe... |
|
2008
|
G/S
|
Solar cells; wafers for solar cells; semiconductor wafers;
semiconductor silicon wafers; single-... |
|
|
G/S
|
Semiconductor wafers. |
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2007
|
G/S
|
Silicon; silicon plates; silicon bars; polycrystal silicon;
single crystal silicon ingots; semi-... |
|
2004
|
G/S
|
Semi-conductor wafer. |
|
2003
|
G/S
|
SEMICONDUCTOR WAFERS |
