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2015
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Invention
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Epitaxial silicon wafer having reduced stacking faults. An epitaxial silicon wafer includes a sil... |
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2014
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Invention
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Manufacturing method of silicon single crystal having low-resistivity electrical characteristics.... |
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Invention
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Method and device for polishing semiconductor wafer. A method includes: polishing a semiconductor... |
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Invention
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Method and device for polishing semiconductor wafer. The present invention is provided with a po... |
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Invention
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Scattering plate, grinding wheel, and grinding device. A diffusion plate includes a plate member ... |
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Invention
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Scattering plate, grinding wheel, and grinding device. A scattering plate (4) for scattering a su... |
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Invention
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Method for producing single crystal, and method for producing silicon wafer. 2 or less. |
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Invention
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Method for producing single crystal, and method for producing silicon wafer. A method for produci... |
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Invention
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Method for slicing semiconductor single crystal ingot. An amount of warp of a wafer is not only r... |
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2013
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Invention
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Method for manufacturing single crystal. In consideration of influence of segregation, an evapora... |
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Invention
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Process for production of silicon single crystal, and highly doped n-type semiconductor substrate... |
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Invention
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Method for growing an epitaxial film on a phosphorous-doped silicon wafer. A method includes: a b... |
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Invention
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Method of manufacturing epitaxial silicon wafer and epitaxial silicon wafer manufactured by the m... |
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Invention
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Semiconductor wafer manufacturing method. A method of manufacturing a semiconductor wafer include... |
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Invention
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Semiconductor wafer manufacturing method. This semiconductor wafer manufacturing method involves ... |
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Invention
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Method for manufacturing semiconductor wafer. A method of manufacturing a silicon wafer, an oxyge... |
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2012
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Invention
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Etching method and etching apparatus of semiconductor wafer. A method and an apparatus of etching... |
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Invention
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Single crystal silicon pulling device, method for preventing contamination of silicon melt, and d... |
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2011
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Invention
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Method of manufacturing epitaxial silicon wafer and apparatus therefor. A method of forming an ep... |
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2010
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Invention
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Method of manufacturing silicon single crystal. The present invention provides a method of produc... |
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Invention
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Method of producing single crystal silicon. The present invention provides a technique which enab... |
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Invention
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Film formation reactive apparatus and method for producing film-formed substrate.
A plurality of... |
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Invention
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Manufacturing method for silicon single crystal. To provide a manufacturing method for a silicon ... |
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2009
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Invention
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Method and apparatus for manufacturing epitaxial silicon wafer. A method of manufacturing an epit... |
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Invention
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Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxi... |
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Invention
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Double-side grinding apparatus for wafer and double-side grinding method. A double-side grinding ... |
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Invention
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Polishing pad seasoning method, seasoning plate, and semiconductor polishing device. A seasoning ... |
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Invention
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Method of cleaning semiconductor wafer and semiconductor wafer. A silicon wafer surface other tha... |
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Invention
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Semiconductor wafer inspection method. A semiconductor wafer inspection method includes: an imagi... |
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Invention
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Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot. ... |
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Invention
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Silicon single crystal pull-up apparatus having a sliding sample tube. A silicon single crystal p... |
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Invention
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Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt. A... |
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Invention
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Position measuring method. This invention provides a position measuring method for measuring a su... |
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Invention
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Silicon single crystal pulling apparatus and manufacturing method of silicon single crystal.
Dis... |
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2008
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Invention
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Semiconductor wafer manufacturing method. In a method of manufacturing semiconductor wafers, fron... |
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Invention
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Position measuring device and position measuring method in semiconductor single crystal manufactu... |
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Invention
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Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up devi... |
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Invention
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Method for measuring liquid level in single crystal pulling apparatus employing cz method. Provid... |
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Invention
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Semiconductor single crystal production apparatus.
An apparatus designed to increase the quality... |
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Invention
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Clamp.
A clamp with which ends of two tubular members can be connected by simple work. The clamp... |
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Invention
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Dopant implanting method and doping apparatus. A dopant device includes: a dopant holder that hol... |
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Invention
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Process for production of silicon single crystal. 3); an average temperature gradient of the grow... |
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Invention
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Method for manufacturing single crystal. Using a pulling-up apparatus, an oxygen concentration of... |
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Invention
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Producing method and apparatus of silicon single crystal, and silicon single crystal ingot. The s... |
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Invention
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Silicon crystalline material and method for manufacturing the same. Provided is a silicon crystal... |
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2007
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Invention
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Silicon wafer heat treatment method. A silicon wafer preferable to a semiconductor device is prod... |
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2006
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Invention
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Control system and method for controlled object in time variant system with dead time, such as si... |
