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2007
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Invention
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Apparatus and method for manufacturing semiconductor single crystal.
A semiconductor single crys... |
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|
Invention
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Method for melting semiconductor wafer raw material and crystal growing method for semiconductor ... |
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2006
|
Invention
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Single crystal semiconductor manufacturing apparatus and manufacturing method. An upper side heat... |
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|
Invention
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Method and apparatus for manufacturing semiconductor wafer. A method and an apparatus for manufac... |
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Invention
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Method for producing silicon wafer. 3. |
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2005
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Invention
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Semiconductor single crystal production device and producing method therefor. b)) provided at a b... |
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2003
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Invention
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Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judgin... |
