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2025
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G/S
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Semiconductor manufacturing machines; semiconductor manufacturing systems comprised of semiconduc... |
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2024
|
Invention
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Method for monitoring neutron ray and ion implanter.
A method includes: recording time-series da... |
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Invention
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Ion implantation method and ion implanter.
An ion implantation method includes: acquiring a meas... |
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Invention
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Substrate processing apparatus, substrate processing method, and method for manufacturing semicon... |
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Invention
|
Ion implanter and ion implantation method.
An ion implanter includes a high energy multi-stage l... |
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|
Invention
|
Ion generation device and ion implanter.
An ion generation device includes an arc chamber includ... |
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2023
|
Invention
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Ion implantation device and ion implantation method. This ion implantation device executes the fo... |
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Invention
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Wafer processing device, wafer processing method, and ion injection device. This ion injection de... |
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Invention
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Ion generator and ion implanter.
An ion generator includes an arc chamber defining a plasma gene... |
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Invention
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Ion injecting device, and ion injecting method. In the present invention, an ion injecting device... |
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Invention
|
Ion implantation device and ion implantation method. An ion implantation device (10) comprises: a... |
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Invention
|
Ion implantation method and ion implanter.
An ion implantation method includes irradiating a waf... |
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Invention
|
Ion implantation method, and ion implantation apparatus. This ion implantation method comprises: ... |
|
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Invention
|
Method for monitoring neutron beam and ion injection device. A method of the present disclosure c... |
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|
Invention
|
Substrate processing device, substrate processing method, and manufacturing method for semiconduc... |
|
|
Invention
|
Ion implanter and ion implantation method.
Provided is an ion implanter or the like capable of s... |
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|
Invention
|
Ion implanter and ion implantation method.
The ion implantation method includes (a) moving a waf... |
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2022
|
Invention
|
Ion implanter and ion implantation method. An ion implanter includes: a plurality of devices whic... |
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|
Invention
|
Ion implantation method, ion implanter, and method for manufacturing semiconductor device.
An io... |
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Invention
|
Ion implanter and model generation method. An ion implanter including a beam generation device th... |
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Invention
|
Ion generation apparatus and ion implantation apparatus. An ion generation apparatus 10 comprises... |
|
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Invention
|
Ion generator and ion implanter. An ion generator includes an arc chamber defining a plasma gener... |
|
|
Invention
|
Ion implanter and ion implantation method.
Provided is an ion implanter including an ion source ... |
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|
Invention
|
Ion implanter and electrostatic quadrupole lens device. An ion implanter includes a high energy m... |
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Invention
|
Wafer temperature adjusting device, wafer processing apparatus, and wafer temperature adjusting m... |
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|
Invention
|
Ion implanter and ion implantation method. An ion implanter includes a beam generation device tha... |
|
|
Invention
|
Ion implanter and ion implantation method. An ion implantation method includes acquiring a first ... |
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2021
|
Invention
|
Insulating structure, method for manufacturing insulating structure, ion generation device, and i... |
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Invention
|
Ion implanter and particle detection method. There is provided an ion implanter including a beaml... |
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Invention
|
Ion generation device and ion generation method. There is provided an ion generation device inclu... |
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|
Invention
|
Ion implanter and model generation method. There is provided an ion implanter including a beam ge... |
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2020
|
Invention
|
Ion implanter and beam profiler. An ion implanter includes a beam scanner that performs a scannin... |
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|
Invention
|
Ion implanter and ion implantation method. An ion implanter includes a beam generator that genera... |
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Invention
|
Ion implanter irradiating ion mean onto wafer and ion implantation method using the same. An ion ... |
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Invention
|
Ion implanter and ion implantation method. An ion implanter includes an implantation processing c... |
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Invention
|
Ion generator and ion implanter. There is provided an ion generator including a vapor generating ... |
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Invention
|
Ion implanter. An ion implanter includes: a main body which includes a plurality of units which a... |
|
|
Invention
|
Ion generator and ion implanter. An ion generator includes: an arc chamber which defines a plasma... |
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2019
|
Invention
|
Ion implanter and measuring device.
An ion implanter includes a measuring device that measures a... |
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Invention
|
Ion implanter and beam park device. An ion implanter having a beam park device on the way of a be... |
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Invention
|
Ion implantation method and ion implanter. An ion implantation method includes irradiating a wafe... |
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Invention
|
Ion implantation apparatus and measurement device. An ion implantation apparatus includes a first... |
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|
Invention
|
Ion implantation apparatus and ion implantation method. A beamline device includes a deflection d... |
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|
Invention
|
Ion implantation apparatus and measurement device. A measurement device includes a plurality of s... |
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2018
|
Invention
|
Ion implanter and method of controlling ion implanter. A mass analyzer includes a mass analyzing ... |
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|
Invention
|
Ion implanter and ion implantation method. An ion implanter includes an ion source configured to ... |
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|
Invention
|
Ion implanter, ion beam irradiated target, and ion implantation method. An ion implanter includes... |
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|
Invention
|
Ion implanter and ion implantation method. An ion implanter includes a plasma shower device confi... |
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Invention
|
Wafer holding device and wafer chucking and dechucking method. A wafer holding device includes a ... |
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|
Invention
|
Ion implantation apparatus. An ion implantation apparatus includes an ion source that is capable ... |
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2015
|
G/S
|
Machines for manufacturing semiconductor devices; machines for ion implantation |
|
2013
|
G/S
|
Machines for manufacturing semiconductor devices, including ion implantation machines |
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2005
|
G/S
|
MACHINES FOR MANUFACTURING SEMICONDUCTOR DEVICES; MACHINES FOR ION IMPLANTATION |
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2004
|
G/S
|
Industrial machines, namely, processing machines for metal-surface treatment; semiconductor manuf... |
