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2024
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Invention
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Testing device. This testing device comprises an electro-optical sensor, a test signal applicatio... |
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Invention
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Laser annealing apparatus and laser annealing method. Disclosed is a laser annealing apparatus wh... |
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Invention
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Probe device and manufacturing method therefor. This probe device is brought into contact with an... |
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2023
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Invention
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Laser annealing device. A laser annealing device includes a light source that emits a laser beam,... |
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Invention
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Placement device. The purpose of the present invention is for objects and the like to be less sus... |
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Invention
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Transport device. The present invention can prevent the occurrence of dust. The present invention... |
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Invention
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Examination circuit and semiconductor examination device. This examination circuit has: a counter... |
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Invention
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Manufacturing method for reflective mask blank, reflective mask blank, and focused ion beam proce... |
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Invention
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Laser annealing apparatus and laser annealing method. The present invention provides a laser anne... |
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2022
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Invention
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Focused ion beam system.
A focused ion beam system includes a beam emitter and an aperture. The ... |
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Invention
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Focused ion beam device. This focused ion beam device is provided with a beam emission part provi... |
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Invention
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Repair tape, and manufacturing device and manufacturing method for said repair tape. The present ... |
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Invention
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Correction device. Provided is a correction device that can perform positioning with high precisi... |
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Invention
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Focused ion beam system.
A condenser lens works to process an ion beam into a collimated form. A... |
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Invention
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Focused ion beam device. In the present invention, a condenser lens processes an ion beam so as t... |
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Invention
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Method for controlling lighting device, and exposure device. Provided is a method for controlling... |
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2021
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Invention
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Transfer apparatus and transfer method. The present invention is a transfer apparatus for transfe... |
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Invention
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Laser annealing device and laser annealing method. Provided is a laser annealing device with whic... |
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Invention
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Photomask correction device and method for correcting photomask. A purpose of the present inventi... |
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Invention
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Pellicle frame grasping device. With the present invention, a pellicle frame can be correctly gra... |
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Invention
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Production method for conductive part, production method for electronic component including condu... |
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Invention
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Focused energy beam device. [Problem] To provide a focused energy beam device having high inspect... |
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Invention
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Projection exposure device and projection exposure method.
A projection exposure apparatus (10) ... |
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Invention
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Projection exposure device and production exposure method. A projection exposure device (10) that... |
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Invention
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Metal pattern inspection method and focused ion beam apparatus.
A metal pattern inspection metho... |
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Invention
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Metal pattern inspection method and focused ion beam device. A pulse-form voltage is applied to a... |
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Invention
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Laser processing device and laser processing method. The present invention makes it possible to o... |
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Invention
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Laser processing device and laser processing method. In the present invention, the intensity dist... |
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Invention
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Focused charged particle beam apparatus.
A focused energy beam apparatus includes a substrate su... |
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Invention
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Focused energy beam device. A focused energy beam device equipped with a support part for support... |
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Invention
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Bonding device, repairing device and repairing method. This bonding device 1 holds an end surface... |
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Invention
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Focused ion beam system.
A focused ion beam system has a differentially-pumped vacuum unit and a... |
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Invention
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Focused ion beam device. [Solution] Provided is a focused ion beam device comprising: a different... |
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Invention
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Processing apparatus. A processing apparatus comprising a substrate support stage on which a subs... |
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Invention
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Process apparatus.
A process apparatus includes a differential pumping device and a focused ion ... |
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Invention
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Differential pumping apparatus and focused energy beam system.
A differential pumping apparatus ... |
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Invention
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Processing device. The present invention comprises: a differential exhaust device in which a plur... |
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Invention
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Fired metal ink wiring manufacturing method and product manufactured by fired metal ink wiring ma... |
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Invention
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Contact structure and method for manufacturing contact structure. The present invention addresses... |
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2020
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Invention
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Polycrystalline film, method for forming polycrystalline film, laser crystallization device and s... |
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Invention
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Surface analysis method and surface analysis device.
The present invention enables highly accura... |
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Invention
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Alignment device.
Following a determination that the distance along the Z-direction between the ... |
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Invention
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Defective part recognition device and defective part recognition method. A defective part recogni... |
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Invention
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Microscope image measuring device and microscope image measuring method. In a measurement of a mi... |
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Invention
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Laser repair method and laser repair device.
Even in the case where an underlayer differs or a f... |
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Invention
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Laser repair method and laser repair device.
A laser repair method includes a repair process of ... |
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Invention
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Laser repair method and laser repair device.
The present invention enables a layer to be worked ... |
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Invention
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Laser annealing method and laser annealing apparatus.
With providing a workpiece that has a seed... |
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Invention
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Laser annealing method, laser annealing device, and crystallized silicon film substrate. A first ... |
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2019
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Invention
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Carrier film and apparatus and method for repairing led display panel.
The present invention com... |
