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2022
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Invention
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Optical fiber guide-in device and optical fiber guide-in method. An optical fiber (4) guide-in de... |
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Invention
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Grading control method for workpiece table, system, device, and storage medium. A grading control... |
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Invention
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Six-degree-of-freedom motion mechanism capable of multi-layer heat dissipation. Embodiments of th... |
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Invention
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Temperature measurement method and apparatus based on synchronous detection. A temperature measur... |
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Invention
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Hydrophobic patterned adhesive tape and manufacturing method therefor. Hydrophobic patterned adhe... |
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Invention
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Safe parking method and apparatus for magnetic levitation platform, control device, and safe park... |
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Invention
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Motion table acceleration safety protection method, and apparatus. A motion table acceleration sa... |
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Invention
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Positioning apparatus for loading and unloading and lithography device. A positioning apparatus (... |
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Invention
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Silicon wafer bearing device in photoetching device. A silicon wafer bearing device in a photoetc... |
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Invention
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Silicon wafer bearing device in photoetching apparatus. The present application relates to the te... |
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Invention
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Laser interference lithography system. A laser interference lithography system, which relates to ... |
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Invention
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Workpiece clamping device and workpiece transfer method. A workpiece clamping device, comprising ... |
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Invention
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Friction force compensation method and compensation apparatus for linear guide rail displacement ... |
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Invention
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Apparatus for measuring heat dissipation of liquid-cooling device. An apparatus for measuring the... |
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Invention
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Method and apparatus for switching high-precision motion platform between different precision mod... |
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Invention
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Multi-stage vibration isolation system and method for precision instrument. A multi-stage vibrati... |
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Invention
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Optical fiber winding device. An optical fiber winding device, comprising an optical fiber arrang... |
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Invention
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Accelerometer. An accelerometer, relating to the technical field of inertia measurement instrumen... |
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Invention
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Exposure period adjustment device and method. An exposure period adjustment device and method, re... |
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Invention
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Photoresist cleaning solution, as well as preparation method therefor and cleaning method thereof... |
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Invention
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Lorentz motor, magnetic field optimization method and photolithography apparatus. The present inv... |
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Invention
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Displacement measurement system and photolithography device. A displacement measurement system, w... |
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Invention
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Anti-collision apparatus. An anti-collision apparatus, relating to the technical field of ultra-p... |
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2021
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Invention
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Heterodyne fiber interferometer displacement measuring system and method. A heterodyne fiber inte... |
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Invention
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Interferometer displacement measurement system and method. An interferometer displacement measure... |
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Invention
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Heterodyne grating interferometry system based on secondary diffraction. Disclosed is a heterodyn... |
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Invention
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Heterodyne grating interferometry system based on secondary diffraction. Provided is a heterodyne... |
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Invention
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Device and method for regulating and controlling incident angle of light beam in laser interferen... |
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Invention
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Notched part fatigue life prediction method and prediction device. A notched part fatigue life pr... |
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Invention
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Notched member fatigue life prediction method and prediction apparatus based on primary load mode... |
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Invention
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Fatigue life prediction method and apparatus based on weighted average maximum shear stress plane... |
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Invention
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Silicon wafer adsorption unit and silicon wafer conveying device. A silicon wafer adsorption unit... |
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2020
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Invention
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Phase measurement device for laser interference photolithography system, and method for using sam... |
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Invention
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Exposure light beam phase measurement method in laser interference photolithography, and photolit... |
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Invention
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Laser interference photolithography system. A laser interference photolithography system, compris... |
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Invention
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Scanning interference lithographic system. A scanning interference lithographic system, comprisin... |
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G/S
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Semi-conductors; integrated circuit chips, namely, semi-conductors; wafers for integrated circuit... |
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Invention
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Plane grating calibration system. Disclosed is a plane grating calibration system, comprising an ... |
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Invention
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Plane grating calibration system. A plane grating (25) calibration system, said system comprising... |
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2019
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Invention
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Five-degree-of-freedom heterodyne grating interferometry system. A five-degree-of-freedom heterod... |
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Invention
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Two-degree-of-freedom heterodyne grating interferometry measurement system. A two-degree-of-freed... |
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Invention
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Two-degree-of-freedom heterodyne grating interferometry measurement system. Disclosed is a two-de... |
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2016
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Invention
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Electrostatic chuck device. An electrostatic chuck device, relating to the technical field of sem... |
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Invention
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Magnetic-fluid momentum sphere. Disclosed is a magnetic-fluid momentum sphere, which is used for ... |
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Invention
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Magnetic levitation reaction sphere. A magnetic levitation reaction sphere includes a spherical-h... |
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Invention
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Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage.... |
