|
2024
|
Invention
|
Magnetic control apparatus. Provided in the present invention is a magnetic control apparatus, co... |
|
|
Invention
|
Structure of high-resistivity silicon-on-insulator embedded with charge capture layer and manufac... |
|
2023
|
Invention
|
Method, apparatus, system and computer storage medium of controlling crystal growth.
The present... |
|
|
Invention
|
Crystal growing method, apparatus and rf-soi substrate.
The present invention provides a crystal... |
|
|
Invention
|
Epitaxy susceptor, epitaxy growth apparatus and manufacturing method of semiconductor device.
Th... |
|
|
Invention
|
Method for determining types of defects in monocrystalline silicon wafer.
The present invention ... |
|
|
Invention
|
Soi wafer.
A SOI wafer is disclosed. The SOI wafer may be characterized by surface roughness of ... |
|
|
Invention
|
Method for detecting temperature of thermal chamber. The present application provides a method fo... |
|
2022
|
Invention
|
Method of growing a single-crystal silicon.
The present invention provides a method of growing a... |
|
|
Invention
|
Standard wafers, method of making the same and calibration method.
The present invention provide... |
|
|
Invention
|
Semiconductor substrate and manufacture thereof.
The present application provides a semiconducto... |
|
|
Invention
|
Method of detecting crystallographic defects and method of growing an ingot.
The invention provi... |
|
|
Invention
|
Method for characterizing defects in silicon crystal. The present application provides a method f... |
|
|
Invention
|
Soi wafer and method of final processing the same.
A SOI wafer and a method of final processing ... |
|
|
Invention
|
Surface treatment of soi wafer.
The present application provides a method of surface treatment o... |
|
|
Invention
|
Process of surface treatment of soi wafer.
The present application provides a process of surface... |
|
|
Invention
|
Soi structured semiconductor silicon wafer and method of making the same.
A SOI structured semic... |
|
2021
|
Invention
|
Measuring method of resistivity of a wafer.
The invention provides a measuring method of resisti... |
|
|
Invention
|
Method for verification of conductivity type of silicon wafer.
The present application provides ... |
|
|
Invention
|
Detection method of metal impurity in wafer. The present application provides a detection method ... |
|
|
Invention
|
Crystal growth method and crystal growth apparatus.
A crystal growth method and a crystal growth... |
|
|
Invention
|
Silicon on insulator structure and method of making the same. The present invention provides a me... |
|
|
Invention
|
Method for calculating liquid-solid interface morphology during growth of ingot. The present inve... |
|
|
Invention
|
Method and apparatus of monocrystal growth. The present invention provides a method and an appara... |
|
|
Invention
|
Silicon on insulator structure and method of making the same. A method of making a silicon on ins... |
|
|
Invention
|
Seeding method for crystal growth. A seeding method for crystal growth comprising: a first seedin... |
|
|
Invention
|
Method and device of chemical mechanical polishing.
The present application provides a method an... |
|
2020
|
Invention
|
Heat shield device and smelting furnace.
Disclosed are a heat shield device and a smelting furna... |
|
|
Invention
|
Heat shield device for insulating heat and smelting furnace.
Disclosed are a heat shield device ... |
|
|
Invention
|
Heat shield structure for single crystal production furnace and single crystal production furnace... |
|
|
Invention
|
Heat shield device for single crystal production furnace, control method thereof and single cryst... |
|
|
Invention
|
Thin-film heat insulation sheet for monocrystalline silicon growth furnace and monocrystalline si... |
|
|
Invention
|
Composite heat insulation structure for monocrystalline silicon growth furnace and monocrystallin... |
|
|
Invention
|
Polishing pad, polishing apparatus and a method for polishing silicon wafer. The present inventio... |
|
|
Invention
|
Heat shield for monocrystalline silicon growth furnace and monocrystalline silicon growth furnace... |
|
|
Invention
|
Wafer positioning method and a semiconductor manufacturing apparatus. The invention provides a me... |
|
|
Invention
|
Process for preparing epitaxy wafer and epitaxy wafer therefrom.
The present application provide... |
|
|
Invention
|
Apparatus and method for ingot growth. The present application provides an apparatus and a method... |
|
|
Invention
|
Semiconductor crystal growth apparatus.
The invention provides a semiconductor crystal growth de... |
|
|
Invention
|
Crystal growth apparatus.
The present invention provides a crystal growth apparatus, which compr... |
|
|
Invention
|
Crystal growth apparatus.
The present invention provides a semiconductor crystal growth apparatu... |
|
|
Invention
|
Semiconductor crystal growth apparatus.
The present invention provides a crystal growth apparatu... |
|
|
Invention
|
Method for improving flatness of semiconductor thin film.
The present invention provides a metho... |
|
|
Invention
|
Semiconductor crystal growth apparatus.
The present invention provides a semiconductor crystal g... |
|
|
Invention
|
Semiconductor crystal growth method and device. A semiconductor crystal growth method and device ... |
|
|
Invention
|
Semiconductor crystal growth device.
The present invention provides a semiconductor crystal grow... |
