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2026
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Invention
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Monocrystalline silicon wafer and forming method therefor.
The present invention provides a mono... |
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Invention
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Silicon crystal, silicon crystal defect treatment method, and defect characterization method.
A ... |
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2025
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Invention
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Crystal growing apparatus and rf-soi substrate.
The present invention provides a crystal growing... |
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Invention
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Monocrystalline silicon ingot product, monocrystalline growth device and monocrystalline growth m... |
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Invention
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Method for determining whether crystal orientation of <111> ingot is in optimal rotation an... |
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Invention
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Method for measuring bmds in heavily doped p-type silicon wafers, method and system for acquiring... |
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Invention
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Grinding carrier assembly, grinding apparatus, and grinding method. A grinding carrier assembly, ... |
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Invention
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Heater for single crystal furnace and single crystal furnace. A heater for a single crystal furna... |
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Invention
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Crystal bar cutting machine and support device therefor. A support device for a crystal bar cutti... |
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Invention
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Standard sheet and manufacturing method therefor, semiconductor material defect correction method... |
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Invention
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Characterization and evaluation methods for wafer warpage topography, and characterization and ev... |
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Invention
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Quartz support member, semiconductor process chamber and semiconductor process method. Provided i... |
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2024
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Invention
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Monocrystalline silicon wafer and forming method therefor. The present invention provides a monoc... |
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Invention
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Silicon crystal, silicon crystal defect treatment method, and defect characterization method. A s... |
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Invention
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Method and apparatus for diameter measurement of czochralski monocrystalline silicon, and device ... |
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Invention
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Magnetic control apparatus. Provided in the present invention is a magnetic control apparatus, co... |
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Invention
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Structure of high-resistivity silicon-on-insulator embedded with charge capture layer and manufac... |
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2023
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Invention
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Method, apparatus, system and computer storage medium of controlling crystal growth.
The present... |
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Invention
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Crystal growing method, apparatus and rf-soi substrate.
The present invention provides a crystal... |
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Invention
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Epitaxy susceptor, epitaxy growth apparatus and manufacturing method of semiconductor device.
Th... |
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Invention
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Method for determining types of defects in monocrystalline silicon wafer. The present invention p... |
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Invention
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Soi wafer.
A SOI wafer is disclosed. The SOI wafer may be characterized by surface roughness of ... |
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Invention
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Method for detecting temperature of thermal chamber. The present application provides a method fo... |
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2022
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Invention
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Method of growing a single-crystal silicon.
The present invention provides a method of growing a... |
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Invention
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Standard wafers, method of making the same and calibration method.
The present invention provide... |
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Invention
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Semiconductor substrate and manufacture thereof.
The present application provides a semiconducto... |
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Invention
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Method of detecting crystallographic defects and method of growing an ingot. The invention provid... |
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Invention
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Method for characterizing defects in silicon crystal. The present application provides a method f... |
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Invention
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Soi wafer and method of final processing the same.
A SOI wafer and a method of final processing ... |
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Invention
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Surface treatment of soi wafer.
The present application provides a method of surface treatment o... |
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Invention
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Process of surface treatment of soi wafer.
The present application provides a process of surface... |
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Invention
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Soi structured semiconductor silicon wafer and method of making the same.
A SOI structured semic... |
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2021
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Invention
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Measuring method of resistivity of a wafer. The invention provides a measuring method of resistiv... |
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Invention
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Method for verification of conductivity type of silicon wafer. −cm to rapidly and accurately dete... |
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Invention
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Detection method of metal impurity in wafer. The present application provides a detection method ... |
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Invention
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Crystal growth method and crystal growth apparatus.
A crystal growth method and a crystal growth... |
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Invention
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Silicon on insulator structure and method of making the same. The present invention provides a me... |
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Invention
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Method for calculating liquid-solid interface morphology during growth of ingot. The present inve... |
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Invention
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Method and apparatus of monocrystal growth. The present invention provides a method and an appara... |
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Invention
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Silicon on insulator structure and method of making the same. A method of making a silicon on ins... |
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Invention
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Seeding method for crystal growth. A seeding method for crystal growth comprising: a first seedin... |
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Invention
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Method and device of chemical mechanical polishing.
The present application provides a method an... |
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2020
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Invention
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Heat shield device and smelting furnace.
Disclosed are a heat shield device and a smelting furna... |
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Invention
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Polishing pad, polishing apparatus and a method for polishing silicon wafer. The present inventio... |
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Invention
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Process for preparing epitaxy wafer and epitaxy wafer therefrom.
The present application provide... |
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Invention
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Apparatus and method for ingot growth. The present application provides an apparatus and a method... |
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Invention
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Semiconductor crystal growth method and device. A semiconductor crystal growth method and device ... |
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Invention
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Semiconductor crystal growth device.
The present invention provides a semiconductor crystal grow... |
