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2018
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Invention
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Method for depositing an insulating material into a via. A method for depositing a layer of a mat... |
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Invention
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Method for depositing an insulating material into a via. A method for depositing a layer (4, 5, 6... |
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Invention
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Chemical vapor deposition device.
A reactor device for chemical vapor deposition includes a reac... |
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Invention
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Reactor device and method for producing thin layers, implementing a series of deposition steps, a... |
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Invention
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Treatment chamber for a chemical vapour deposition (cvd) reactor and thermalization process carri... |
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Invention
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Treatment chamber for a chemical vapor deposition (cvd) reactor and thermalization process carrie... |
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2017
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Invention
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Device for conveying a gas into a chemical vapour deposition reactor.
The present invention conc... |
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Invention
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Device for conveying a gas into a chemical vapour deposition reactor. The present invention conce... |
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Invention
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Method for injecting chemical species in the gas phase in plasma-pulsed form. The present inventi... |
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Invention
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Method for producing an interconnection comprising a via extending through a substrate. The inven... |
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Invention
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Method for removing a metal deposit arranged on a surface in a chamber. The invention relates to ... |
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2016
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Invention
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Method for producing aluminuim oxide and/or nitride.
The present invention relates to a method f... |
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Invention
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Method for producing aluminum oxide and/or aluminum nitride. The present invention relates to a m... |
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2015
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Invention
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Method for removing a metal deposit placed on a surface in a chamber. in step b), the chemical sp... |
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Invention
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Method for removing a metal deposit placed on a surface in a chamber. The invention relates to a ... |
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Invention
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Gas-phase deposition process.
The disclosure relates to a layer-deposition process that includes... |
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2014
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Invention
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Chemical vapor deposition device. A reactor device for chemical vapor deposition comprises a reac... |
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2009
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Invention
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Device and process for chemical vapor phase treatment. Device for treating substrates, comprising... |
