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2025
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G/S
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Instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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G/S
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instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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G/S
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3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
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Invention
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Mirror device, projection objective and method for measuring the temperature of a mirror.
A mirr... |
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Invention
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Mirror device, for example for a microlithographic projection exposure system, and method for mea... |
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Invention
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Computer implemented method for defect detection in an imaging dataset of a wafer, corresponding ... |
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Invention
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Optical element for a projection exposure system, optical system comprising same and projection e... |
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Invention
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Method for operating a projection exposure system.
In a method for operating a microlithographic... |
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Invention
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Facet mirror, illumination optical unit, arrangement of a facet mirror, projection exposure appar... |
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Invention
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Computer implemented method for defect recognition in an imaging dataset of a wafer, correspondin... |
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Invention
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Apparatus for stress-reduced mounting of mems-based micromirrors.
An apparatus for stress-reduce... |
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Invention
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Assembly of an optical system.
An assembly of an optical system, comprising at least one mirror ... |
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Invention
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Holding device for an optical component having an optical surface with a polygonal border and hav... |
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Invention
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Arrangement, method and computer program product for calibrating facet mirrors.
The techniques d... |
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Invention
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Bipod, optical system and projection exposure apparatus.
A bipod for adjusting an optical elemen... |
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Invention
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Method to adjust an illumination beam path within an illumination optics and illumination optics ... |
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Invention
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Microelectromechanical device.
Microelectromechanical device with a carrier substrate having a s... |
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Invention
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Method for operating an optical component, and optical component.
A method of operating an optic... |
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Invention
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Illumination system, radiation source apparatus, method for illuminating a reticle, and lithograp... |
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Invention
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Individual mirror of a pupil facet mirror and pupil facet mirror for an illumination optical unit... |
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Invention
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Intermediate product for producing an optical element for a projection exposure apparatus, optica... |
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Invention
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Micro-optical element.
An actuator device for a tiltable micro-optical element comprises a plura... |
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Invention
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Drive device, optical system and lithography apparatus.
A drive device for driving at least one ... |
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Invention
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Method of characterizing a fault in a scanning electron microscope.
A method of characterizing a... |
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Invention
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Method and device for correcting image errors when scanning a charged particle beam over a sample... |
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Invention
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Method for distortion measurement and parameter setting for charged particle beam imaging devices... |
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Invention
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Residual gas analyser, projection exposure apparatus comprising a residual gas analyser and metho... |
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Invention
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Method, lithography mask, use of a lithography mask, and processing arrangement.
A method for ch... |
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Invention
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Lens element for a microlithographic projection exposure apparatus designed for operation in the ... |
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Invention
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Apparatus and method for providing sensor data of an optical system, optical system and lithograp... |
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2024
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Invention
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Optical system for a metrology system and metrology system with such an optical system.
An optic... |
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Invention
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Magnifying imaging optical unit for a metrology system for examining objects.
A magnifying imagi... |
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Invention
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Laser light source, in particular for use in a microlithography projection exposure system. The i... |
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Invention
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Device for sampling for determining a corrosion state of a module for semiconductor lithography, ... |
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Invention
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Method for crosstalk modelling in a multi-mirror array having movable individual mirrors. The inv... |
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Invention
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Computer implemented method for generating an aerial image of a photolithography mask using a mac... |
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Invention
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Connecting a holding element to an optical element by means of a connecting material. The inventi... |
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Invention
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Method for adjusting at least one sensor for a projection exposure apparatus and projection expos... |
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Invention
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Apparatus for measuring a telecentricity of an optical imaging system. A measuring apparatus (10)... |
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Invention
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Method for protecting an adhesive layer from stray radiation, optical component and semiconductor... |
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Invention
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Euv mirror system, method for operating an euv mirror system, projection lens for a microlit... |
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Invention
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Method and device for producing an element, element, in particular optical element, and lithograp... |
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Invention
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Test system for a camera, mask inspections system and method for testing a camera.
A test system... |
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Invention
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Method and computing device for compensating for liquid-transmitted acoustic disturbance excitati... |
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Invention
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Imaging optical unit for imaging an object field into an image field, and projection exposure app... |
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Invention
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Method for placing and securing at least one micromirror matrix. The invention relates to a metho... |
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Invention
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Method for manufacturing an euv mirror component, and intermediate product of an euv mirror compo... |
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Invention
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Method for smoothing a surface of a substrate. The invention relates to a method for smoothing a ... |
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Invention
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Heating head, heating device, and optical system, in particular euv lithography system. The inven... |
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G/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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G/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
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Invention
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Lithography system comprising a coupling for separating line portions, and method for leak testin... |
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G/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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G/S
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Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
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G/S
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Downloadable computer application software for use in semiconductor measurement and semiconductor... |
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2023
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Invention
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Method for producing a cooling element, cooling element for optical arrangements and optical arra... |
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Invention
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Methods, systems, computer programs and computer-readable media for automatically designing a wor... |
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2022
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G/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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G/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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G/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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G/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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G/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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G/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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G/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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G/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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G/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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G/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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G/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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G/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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G/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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G/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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G/S
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Mask inspection systems. |
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2008
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G/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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G/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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G/S
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mask repair tools used in the semiconductor industry |
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2002
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G/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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G/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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G/S
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lens objectives for use with wafersteppers and illuminators |
