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2024
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Invention
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Optical component for a lithography apparatus.
An optical component (100, 200) for a lithography... |
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Invention
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Method for measuring an illumination angle distribution on an object field and illumination optic... |
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Invention
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Temperature-insensitive actuator and deformation mirror.
An actuator for semiconductor lithograp... |
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Invention
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Illumination optical unit for projection lithography.
An illumination optical unit for projectio... |
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Invention
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Method for measuring the illumination pupil in a scanner taking into account a measurement reticl... |
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Invention
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Arrangement, method and computer program product for calibrating facet mirrors.
An arrangement (... |
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Invention
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3d volume inspection of semiconductor wafers with increased throughput and accuracy.
A system an... |
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Invention
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Reflective optical element for a wavelength in the extreme ultraviolet wavelength range.
This di... |
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Invention
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Device and method for aligning two components.
Disclosed is a method for aligning two components... |
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Invention
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Process and device for chemical processing of a surface.
A process for chemical processing of a ... |
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Invention
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Control device, optical system, lithography installation and method.
A control device for contro... |
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Invention
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Drive device, optical system and lithography apparatus.
A drive device for driving and measuring... |
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G/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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G/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
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Invention
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Computer implemented method for the detection of anomalies in an imaging dataset of a wafer, and ... |
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Invention
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Optical device, method for measuring an actual tilt of an optical surface of an optical element, ... |
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Invention
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Computer implemented method for defect detection in an imaging dataset of an object comprising in... |
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Invention
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Computer implemented method for defect detection in an object comprising integrated circuit patte... |
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Invention
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Method for image enhancement in an imaging dataset of an object comprising integrated circuit pat... |
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Invention
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Drive device, optical system and lithography apparatus. A drive device (100) for driving at least... |
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Invention
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Drive device, optical system and lithography apparatus. A drive device (100) for driving a plural... |
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Invention
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Inferometric measuring apparatus.
A measuring apparatus (10; 110; 210; 310; 410; 510; 610; 710) ... |
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Invention
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3d tomography with reduced drift errors. A method and a dual beam device for three-dimensional vo... |
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Invention
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Mask inspection device for photomasks of euv lithography and carrier element for use in a mask in... |
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Invention
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Method for determining a location of an object surface.
Disclosed is a method for determining a ... |
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Invention
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Actuatable mirror assembly. An actuatable mirror assembly (25) has an actuator device (31) with a... |
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Invention
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Mems mirror array module. The invention relates to a MEMS mirror array module (100) for use in pr... |
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Invention
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Modular, partially-redundant converter system with dc/dc converters connected in series on the ou... |
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Invention
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Optical assembly for an euv projection exposure apparatus, euv projection exposure apparatus. Opt... |
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Invention
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Projection objective of a projection exposure system, and projection exposure system. The inventi... |
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Invention
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Optical module and projection exposure system. The invention relates to an optical module (30, 40... |
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Invention
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Method for obtaining measurements of semiconductor structures from a single wedge cut of an inspe... |
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Invention
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Method for obtaining at least one measurement of at least one semiconductor structure in a wafer ... |
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Invention
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Optical component, method for installing the optical component, projection exposure apparatus. Op... |
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Invention
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Mirror assembly, illumination optical unit having a mirror assembly, illumination system having s... |
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Invention
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Preventing esd in prt sem discharges. The present invention relates, inter alia, to a method for ... |
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Invention
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Method for reducing aberrations of an optical element, optical element and semiconductor system. ... |
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Invention
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Structure determination. The invention provides a method comprising determining a representative ... |
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Invention
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Method for incorporating temperature-regulating hollow structures into a substrate, in particular... |
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Invention
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Mirror system, method for operating a mirror system, projection lens for a microlithographic proj... |
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Invention
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Improved method and apparatus for charge compensation during 3d tomography. An improved method of... |
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Invention
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Holding device, optical assembly and optical system. The invention relates to a holding device (2... |
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Invention
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Apparatus and method for thermally treating a body to be thermally treated. The invention relates... |
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Invention
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Method for producing a mirror substrate of an optical element, optical element and projection exp... |
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Invention
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Optical system and lithography system. The invention relates to an optical system (300) having a ... |
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Invention
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Method for controlling an optical module, optical module and control circuit for an assembly of a... |
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Invention
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Mirror system, method for operating a mirror system and projection lens of a microlithographic pr... |
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Invention
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Method for incorporating temperature-control hollow structures in a substrate, in particular in a... |
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Invention
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Method for incorporating temperature-controlled hollow structures into a substrate, in particular... |
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Invention
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Assembly in a microlithographic projection exposure system. The invention relates to an assembly ... |
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Invention
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Mirror system, and microlithographic projection exposure apparatus comprising a mirror system. Th... |
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G/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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G/S
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Applications and instruments in the field of semiconductor measurement and inspection solutions |
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Invention
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Method for operating an optical system, and optical system. The invention relates to an optical s... |
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2022
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G/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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G/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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G/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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G/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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G/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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G/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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G/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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G/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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G/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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G/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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G/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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G/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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G/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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G/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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G/S
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Mask inspection systems. |
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2008
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G/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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G/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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G/S
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mask repair tools used in the semiconductor industry |
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2002
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G/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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G/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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G/S
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lens objectives for use with wafersteppers and illuminators |
