|
2025
|
G/S
|
3D X-ray inspection and metrology tool in the field of
semiconductor measurement and control sol... |
|
|
Invention
|
Optical system and lithography system.
An optical system for a lithography system comprises: a n... |
|
|
Invention
|
Optical system and projection exposure apparatus.
An optical system for a projection exposure ap... |
|
|
Invention
|
Euv collector.
An EUV collector is used to collect EUV used light eminating from a source area. ... |
|
|
Invention
|
Method and device for mask inspection.
A method and a device for mask inspection, wherein the ma... |
|
|
Invention
|
Mirror socket, optical system and projection exposure apparatus.
A mirror socket for an optical ... |
|
|
Invention
|
Mirror arrangement for absorbing radiation, and lithography system.
A mirror arrangement, such a... |
|
|
Invention
|
Mirror arrangement with cooled mirror elements and lithography system.
A mirror arrangement, for... |
|
|
Invention
|
Optical system, lithography apparatus comprising an optical system, and arrangement comprising an... |
|
|
Invention
|
Euv optics module for an euv projection exposure apparatus.
An EUV optics module (35) for an EUV... |
|
|
Invention
|
Projection exposure apparatus with manipulators.
A microlithographic projection exposure apparat... |
|
|
Invention
|
Assembly for an optical system.
An assembly for an optical system having a mirror array having a... |
|
|
Invention
|
Editing of deep, multi-layered structures.
An improved system and method for circuit edit or rep... |
|
|
Invention
|
Production control method for a projection exposure apparatus, projection exposure apparatus, and... |
|
|
Invention
|
Sensor fusion for thin film segmentation.
Certain examples provide methods of performing semicon... |
|
|
Invention
|
Mirror element, lithography system, and method for providing a mirror element.
A mirror element ... |
|
|
Invention
|
Optical system and lithography apparatus having an optical system.
An optical system for a litho... |
|
|
Invention
|
Adaptive mirror with mechanical mediator layer and microlithographic projection exposure apparatu... |
|
|
G/S
|
Instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
|
|
G/S
|
instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
|
|
Invention
|
Method for coating a substrate.
Disclosed is a method for coating a substrate with at least one ... |
|
|
Invention
|
Method for qualifying a defect structure on an object utilizable in projection lithography.
To q... |
|
|
Invention
|
Computer implemented method, computer-readable medium, computer program product and corresponding... |
|
|
Invention
|
Method of wavefront correction in a semiconductor technology apparatus. The invention relates to ... |
|
|
G/S
|
3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
|
|
Invention
|
Apparatus, holding device, arrangement, system and method for holding an optical element; lithogr... |
|
|
Invention
|
Method for detecting optical properties of a microscope, method for restoring the imaging quality... |
|
|
Invention
|
Image generation with improved scanning lines for smart charge distribution.
A method of generat... |
|
|
Invention
|
Highly flexible conduit element and method for producing a flexible conduit element. The inventio... |
|
|
Invention
|
Method for improving an imaging quality of an arrangement of optical elements, and corresponding ... |
|
|
Invention
|
Method for reducing acoustic vibrations, connection element, and projection exposure system. The ... |
|
|
Invention
|
Assembly for semiconductor apparatuses to suppress acoustic wave propagation within a semiconduct... |
|
|
Invention
|
Method for regulating the temperature of an optical module for microlithography. A method for reg... |
|
|
Invention
|
Method for operating an optical system, and optical system.
A method for operating an optical sy... |
|
|
Invention
|
Contamination handling in metrology systems. The present disclosure relates to a metrology system... |
|
|
Invention
|
Method and apparatus for determining an optical reflectivity of a curved surface of an optical te... |
|
|
Invention
|
Reference image for distortion correction. The application relates to a method for generating dis... |
|
|
Invention
|
Method for operating an euv mirror system, euv mirror system, and microlithographic projection ex... |
|
|
Invention
|
Measuring assembly for determining the position of a component. The invention relates to a measur... |
|
|
Invention
|
Method, device and computer program for determining and correcting a concentricity error when rot... |
|
|
Invention
|
Organohalogen precursors for particle beam-induced mask repair. The present invention relates, in... |
|
|
Invention
|
Mirror, in particular for a microlithographic projection exposure system. The invention relates t... |
|
|
Invention
|
Measurement arrangement for determining the position of a movable component. A measurement arrang... |
|
|
Invention
|
Method for producing a substrate, an optical system, and a light source arrangement for a lithogr... |
|
|
Invention
|
Method for spatially limiting material removal, optical element and semiconductor technology syst... |
|
|
Invention
|
Method and device for determining a topography contrast and/or a material contrast of a sample.
... |
|
|
Invention
|
Method and apparatus for atomic layer deposition of a fluoride layer, optical element and optical... |
|
|
Invention
|
Assembly of a microlithographic projection system, a vacuum chamber and a wall element arranged i... |
|
|
Invention
|
Apparatus and method for coating a substrate of an optical element. The invention relates to an a... |
|
|
Invention
|
Method for producing an optical imaging system for a microlithography system. In a method for pro... |
|
|
Invention
|
Method and system for producing a lithography apparatus or one of its components and/or for adjus... |
|
2024
|
Invention
|
Residual gas analysis method and residual gas analysis system. auxiliary gasiii) for the residual... |
|
|
G/S
|
Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
|
|
G/S
|
Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
|
|
G/S
|
applications and instruments in the field of semiconductor measurement and inspection solutions. |
|
|
G/S
|
Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
|
|
G/S
|
Downloadable computer application software for use in semiconductor measurement and semiconductor... |
|
2022
|
G/S
|
Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
|
2020
|
G/S
|
Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
|
|
G/S
|
Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
|
|
G/S
|
Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
|
|
G/S
|
Software platform for the visualization and analysis of
semiconductor image data. |
|
|
G/S
|
Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
|
2019
|
G/S
|
Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
|
2018
|
G/S
|
Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
|
2014
|
G/S
|
Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
|
|
G/S
|
Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
|
|
G/S
|
Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
|
|
G/S
|
Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
|
2011
|
G/S
|
Laser apparatus for correcting the precision in the position
of photomask structures. |
|
2009
|
G/S
|
Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
|
|
G/S
|
Mask inspection systems. |
|
2008
|
G/S
|
measuring instruments to measure positions of structures on photomasks; computer software for use... |
|
2005
|
G/S
|
Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
|
|
G/S
|
mask repair tools used in the semiconductor industry |
|
2002
|
G/S
|
Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
|
1998
|
G/S
|
Optical apparatus and instruments; objectives. Lighting devices. |
|
1997
|
G/S
|
lens objectives for use with wafersteppers and illuminators |
