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2025
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Invention
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3d volume inspection method and method of configuring of a 3d volume inspection method.
A method... |
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Invention
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Device and method for operating a bending beam in a closed control loop.
The present invention r... |
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Invention
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Method and systems for balancing charges on a surface of an object comprising integrated circuit ... |
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Invention
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Optical element having a polishing layer, lithography apparatus comprising the optical element, a... |
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P/S
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3D X-ray inspection and metrology tool in the field of
semiconductor measurement and control sol... |
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Invention
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Test system with a vacuumisable test chamber.
A test system (1) having a test chamber (2) for a ... |
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Invention
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Method for producing a mirror assembly, and coating system.
A method for producing a mirror asse... |
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Invention
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Methods and devices for the contactless setting of an electrostatic charge of a sample.
The pres... |
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Invention
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Methods of cross-section imaging of an inspection volume in a wafer.
The present disclosure rela... |
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Invention
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Chromatically corrected imaging illumination optical unit for use in a lithographic projection ex... |
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Invention
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Computer implemented method for the detection of defects in an object comprising integrated circu... |
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Invention
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Module for a projection exposure apparatus, method, and projection exposure apparatus.
A module ... |
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Invention
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Method for characterizing a measurement apparatus for semiconductor lithography and measurement a... |
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Invention
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Optical assembly, method for integrating optical assembly, and projection exposure apparatus. The... |
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Invention
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Method for operating a solid-state actuator in a microlithographic projection exposure system, ad... |
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Invention
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Architecture of charged particle beam system for inline-semiconductor applications. An improved a... |
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Invention
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Calibration method for a particle imaging apparatus, and method for operating a calibrated partic... |
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Invention
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Arrangement comprising a microlithographic projection system and a wall element for thermal shiel... |
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Invention
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Arrangement and method for calibrating a mems with micromirrors. The invention relates to an arra... |
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Invention
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Holding system for a charged particle microscope. The invention relates to A holding system confi... |
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P/S
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Instruments and applications for the correction of wafer forms, namely, semiconductor wafer proce... |
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P/S
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instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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Invention
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Optical system, lithography installation and method for producing an optical system. xyy) seen in... |
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Invention
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Insert for a chamber wall of a source chamber of an euv radiation source. An insert (8) for a cha... |
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Invention
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Insert for a source chamber of an euv radiation source. An insert (8) for a source chamber (2) of... |
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Invention
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Method for simulating illumination and imaging properties of an optical production system when an... |
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Invention
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Beam guiding insert for a source chamber of an euv radiation source. A beam guiding insert (25) f... |
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Invention
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Method for highly accurately determining the location of a structure, apparatus for carrying out ... |
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Invention
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Insert for an outer insert for an euv radiation source. An insert (bore) for an outer insert (8) ... |
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Invention
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Semiconductor sample with reduced preparation time. The invention relates to a semiconductor samp... |
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Invention
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Measurement apparatus for determining the position of a component. A measurement apparatus (10) f... |
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Invention
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Method for calibrating illumination optics. A method for calibrating illumination optics is discl... |
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Invention
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Device and method for beam machining an optical component. The invention relates to a device for ... |
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Invention
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Improvements to lithographic methods and apparatus. A method for determining one or more paramete... |
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Invention
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Device for capturing images of micro- and/or nanostructures. The invention relates to a device (1... |
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Invention
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Method for correcting a reflective optical element for grazing incidence and method for correctin... |
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Invention
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Collector device, wafer inspection apparatus having a collector device. Collector device for coll... |
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Invention
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Device and method for analysing and/or processing a sample with a particle beam. Device (100) for... |
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Invention
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Method and apparatus for generating a photonic element by simultaneously using two laser direct w... |
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Invention
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Inspection apparatus for 3d tomography with improved stand-still performance. A dual beam device ... |
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Invention
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Control device, optical system and lithography apparatus. The invention relates to a control devi... |
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Invention
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Securing device for a lithography system, and lithography system comprising such a securing devic... |
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Invention
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Measuring device for the frequency-based determination of the position of a movable component. Th... |
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Invention
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Optical element, optical system, and method for manufacturing an optical element. MinBBBMaxMinMax... |
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Invention
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Method for qualifying a defect structure on an object utilizable in projection lithography.
To q... |
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Invention
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Imaging optical unit for projection lithography. An imaging optical unit (10) for projection lith... |
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Invention
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Method for operating a mask inspection device, euv camera, mask inspection device and computer pr... |
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P/S
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3D X-ray inspection and metrology tool in the nature of an industrial x-ray apparatus in the fiel... |
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Invention
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Method for analysing and/or processing a lithography mask and repair system. Method for analysing... |
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P/S
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3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
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Invention
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Energy detection assembly for an illumination system of a mask inspection system for use with euv... |
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Invention
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Microlithographic projection exposure method and projection exposure apparatus. 000). The project... |
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Invention
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Projection exposure method, projection lens and microlithographic projection exposure apparatus. ... |
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2024
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
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P/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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P/S
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Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
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P/S
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Downloadable computer application software for use in semiconductor measurement and semiconductor... |
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2022
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P/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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P/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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P/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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P/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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P/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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P/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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P/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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P/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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P/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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P/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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P/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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P/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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P/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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P/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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P/S
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Mask inspection systems. |
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2008
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P/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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P/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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P/S
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mask repair tools used in the semiconductor industry |
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2002
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P/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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P/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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P/S
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lens objectives for use with wafersteppers and illuminators |
