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2025
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P/S
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3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
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2024
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Invention
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Imaging euv optical unit for imaging an object field into an image field.
An imaging EUV optical... |
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Invention
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Method for compensating actuator effects of actuators.
A method for driving an actuator for a co... |
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Invention
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Method for heating an optical element, and optical system.
A method for heating an optical eleme... |
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Invention
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Illumination optical unit for a mask inspection system.
An illumination optical unit is part of ... |
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Invention
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Method for operating a projection exposure system, and projection exposure system.
A method of o... |
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Invention
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Method for producing a substrate for an optical element, and reflective optical element.
A refle... |
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Invention
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Catadioptric projection objective, projection illumination system and projection illumination met... |
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Invention
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Dual beam systems and methods for decoupling the working distance of a charged particle beam devi... |
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Invention
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Mirror, in particular for a microlithographic projection exposure system.
A mirror, in particula... |
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Invention
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Illumination system, projection illumination facility and projection illumination method.
An ill... |
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Invention
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Optical element, and assembly and optical system therewith.
An optical element for incorporation... |
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Invention
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Optical system, lithography apparatus having an optical system, and method for producing an optic... |
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Invention
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Component for a system of semiconductor technology and method for producing a component for a sys... |
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Invention
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Method for operating a microlithographic projection exposure apparatus, microlithographic mask an... |
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Invention
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Micro-electromechanical system with fixation. The invention relates to a micro-electromechanical ... |
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Invention
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Beam angle rotation and sample rotation.
A method for operating an ion beam device comprises det... |
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Invention
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Device and method for releasably connecting at least one mobile clean room to at least one second... |
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Invention
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Measurement device and method for operating the measurement device. The invention relates to a me... |
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Invention
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High-resolution low-distortion imaging using charged-particle scanning microscope. Techniques are... |
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Invention
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Method for operating a control device, control device, optical system and lithography apparatus. ... |
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Invention
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Method and device for mask repair. The present invention relates to a method for repairing a defe... |
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Invention
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Method for producing an optical system for a lithography apparatus, substrate for an optical comp... |
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Invention
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Readout circuit for a capacitive sensor. S1S2S1S2out1out2excdetdet) from the interference detecti... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
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Invention
|
Measurement system, measurement method with the aid of such a measurement system, and projection ... |
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Invention
|
Optical system for a projection exposure apparatus, and method for specifying an illumination pup... |
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Invention
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Illumination optical unit, and method for measuring the dependence of an intensity of illuminatio... |
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Invention
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Facet mirror for an illumination optical unit for projection lithography suitable for use as firs... |
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Invention
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Illumination optical unit for projection lithography, and method for monitoring such an illuminat... |
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Invention
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Projection exposure apparatus for semiconductor lithography comprising a connecting element. The ... |
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Invention
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Projection exposure apparatus comprising an element comprising an elastic material. The invention... |
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Invention
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Stabilization of a repaired region of an object for lithography. The present invention relates in... |
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Invention
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Computer implemented method for simulating an aerial image of a model of a photolithography mask ... |
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Invention
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Method and device for correcting an imaging error of a particle beam during sample processing. Th... |
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Invention
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Method for securing a mems micromirror unit and mems micromirror unit. The invention relates to a... |
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Invention
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Method of operating a microlithographic projection exposure apparatus. A method of operating a mi... |
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Invention
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Vibration-correction unit, method for operating a vibration-correction unit, sensor and lithograp... |
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Invention
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Measurement arrangement for determining the position of a movable component. A measurement arrang... |
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Invention
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Handling system for microlithographic photomasks, inspection system and processing system having ... |
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Invention
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Securing device. The invention relates to a securing device (24) for securing a functional compon... |
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Invention
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Mems micromirror unit and production thereof. The invention relates to a method for producing a M... |
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Invention
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Optical system comprising an euv mirror and method for operating an optical system.
An optical s... |
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Invention
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Method for reducing the effects of parasitic forces and/or moments on the imaging quality of a pr... |
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Invention
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Method for reworking an optical element, optical element and optical system. The invention relate... |
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Invention
|
Method and device for determining a position of a leak on a component. The invention relates to a... |
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Invention
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Support structure for an illumination optical unit of a projection exposure apparatus. A support ... |
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Invention
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Processing an optical element for a projection printing plant. 122. The invention also relates to... |
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Invention
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Lithography system comprising a measurement device. The invention relates to a lithography system... |
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Invention
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Optical system for microlithography and sensor adapter. The invention relates to an optical syste... |
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P/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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P/S
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Applications and instruments in the field of semiconductor measurement and inspection solutions |
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P/S
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Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
|
2023
|
Invention
|
Ion beam inspection and repair with increased secondary electron yield.
An ion beam system capab... |
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2022
|
P/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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P/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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P/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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P/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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P/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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P/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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P/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
|
P/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
|
P/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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P/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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P/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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P/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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P/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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P/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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P/S
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Mask inspection systems. |
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2008
|
P/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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P/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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P/S
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mask repair tools used in the semiconductor industry |
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2002
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P/S
|
Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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P/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
|
P/S
|
lens objectives for use with wafersteppers and illuminators |
