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2025
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P/S
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Instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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P/S
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instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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P/S
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3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
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Invention
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Intermediate product for producing an optical element for a projection exposure apparatus, optica... |
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Invention
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Micro-optical element.
An actuator device for a tiltable micro-optical element comprises a plura... |
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Invention
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Drive device, optical system and lithography apparatus.
A drive device for driving at least one ... |
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Invention
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Method of characterizing a fault in a scanning electron microscope.
A method of characterizing a... |
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Invention
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Method and device for correcting image errors when scanning a charged particle beam over a sample... |
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Invention
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Method for distortion measurement and parameter setting for charged particle beam imaging devices... |
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Invention
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Residual gas analyser, projection exposure apparatus comprising a residual gas analyser and metho... |
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Invention
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Lens element for a microlithographic projection exposure apparatus designed for operation in the ... |
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Invention
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Facet mirror assembly.
A facet mirror assembly has a carrier body for a plurality of individual ... |
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Invention
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Projection exposure apparatus for semiconductor lithography.
A projection exposure apparatus has... |
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Invention
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Mirror for a projection exposure apparatus.
A mirror for a projection exposure apparatus has a s... |
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Invention
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Method for producing a main body of an optical element for semiconductor lithography, main body, ... |
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Invention
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Apparatus and method for providing sensor data of an optical system, optical system and lithograp... |
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2024
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Invention
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Optical assembly, projection exposure system for semiconductor lithography, and method.
An optic... |
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Invention
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Measuring assembly for detecting a distance between two elements, distance measuring device, opti... |
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Invention
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Computer implemented method for generating an aerial image of a photolithography mask using a mac... |
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Invention
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Connecting a holding element to an optical element by means of a connecting material. The inventi... |
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Invention
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Method for adjusting at least one sensor for a projection exposure apparatus and projection expos... |
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Invention
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Apparatus for measuring a telecentricity of an optical imaging system. A measuring apparatus (10)... |
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Invention
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Method and device for producing an element, element, in particular optical element, and lithograp... |
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Invention
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Test system for a camera, mask inspections system and method for testing a camera.
A test system... |
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Invention
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Method and computing device for compensating for liquid-transmitted acoustic disturbance excitati... |
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Invention
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Imaging optical unit for imaging an object field into an image field, and projection exposure app... |
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Invention
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Device for setting an optical transmission.
A device for setting an optical transmission compris... |
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Invention
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Method for manufacturing an euv mirror component, and intermediate product of an euv mirror compo... |
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Invention
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Method for determining at least one manipulator degree of freedom, method for defining at least o... |
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Invention
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Computer implemented method for defect detection in an imaging dataset of an object comprising in... |
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Invention
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Optical inspection device.
Disclosed is an optical inspection device for elements pertaining to ... |
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Invention
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Method for producing a surface coating which reflects euv radiation. The invention relates to a m... |
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Invention
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Method for adjustment of an illumination system of a projection exposure apparatus, and illuminat... |
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Invention
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Method for examining a blank of a microlithographic photomask.
A method for examining a blank of... |
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Invention
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X-ray inspection system for inspection of an object.
An X-ray inspection system serves for inspe... |
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Invention
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Method and device for controlling the temperature of a sensor frame in a microlithographic projec... |
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Invention
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Compensation of operationally induced thermal deformations in the manufacturing process of an opt... |
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Invention
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Optical imaging system with predefinable wavelength bandwidth of the imaging light. An optical sy... |
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Invention
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Optical rod for mixing illumination light in an illumination optical unit of a lithographic proje... |
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Invention
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Computer-implemented method and apparatus for processing a sample with a nanomanipulator. Compute... |
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Invention
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Method for controlling the temperature of mems micromirrors. 0HHT00 (60) during the operation of ... |
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Invention
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Method for processing a defect of a microlithographic photomask.
A method for processing a defec... |
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Invention
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Modular metrology apparatus for interchangeable process modules. A modular metrology apparatus co... |
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Invention
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Adaptive optical module for a microlithographic projection exposure system. The invention relates... |
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Invention
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Heating head, heating device, and optical system, in particular euv lithography system. The inven... |
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Invention
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Projection system with minimised thermally induced, oscillating aberrations. The present inventio... |
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Invention
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Optical element and euv lithography system. The invention relates to an optical element (25) for ... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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Invention
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Transport and test system for a camera, method for testing a camera. The invention relates to a t... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
|
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Invention
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Euv mirror system, method for operating an euv mirror system, projection lens for a microlithogra... |
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Invention
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Lithography system comprising a coupling for separating line portions, and method for leak testin... |
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P/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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P/S
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Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
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P/S
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Downloadable computer application software for use in semiconductor measurement and semiconductor... |
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2023
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Invention
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Methods, systems, computer programs and computer-readable media for automatically designing a wor... |
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Invention
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X-ray inspection system for inspection of an object. iiiii), respectively. An inspection system r... |
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2022
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P/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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P/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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P/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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P/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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P/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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P/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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P/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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P/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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P/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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P/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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P/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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P/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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P/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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P/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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P/S
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Mask inspection systems. |
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2008
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P/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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P/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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P/S
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mask repair tools used in the semiconductor industry |
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2002
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P/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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P/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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P/S
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lens objectives for use with wafersteppers and illuminators |
