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2024
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Invention
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Apparatus for polishing, processing system, and method of polishing.
There is provided an appara... |
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Invention
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Method of adjusting plating module.
There is provided a method of adjusting a plating module, wh... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method ca... |
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Invention
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Passage system for exhaust gas to abatement apparatus.
A passage system that can prevent leakage... |
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Invention
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Film thickness signal processing apparatus, polishing apparatus, and film thickness signal proces... |
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Invention
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Information processing apparatus, substrate processing apparatus, and information processing meth... |
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Invention
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Substrate processing apparatus, and abnormality determination method.
Abnormality is determined ... |
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Invention
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Free joint structure, push-pull device, and substrate processing module.
A free joint structure ... |
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Invention
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Substrate supporting apparatus and method of controlling substrate supporting apparatus.
Exempla... |
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Invention
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Cleaning method and apparatus for washing tool, substrate washing apparatus and manufacturing met... |
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G/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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Invention
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Polishing device. The present invention pertains to a polishing device for polishing the surface ... |
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Invention
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Polishing apparatus.
A polishing apparatus includes: a polishing table configured to support a p... |
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Invention
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Polishing apparatus.
A polishing apparatus capable of preventing abrasive grains in a polishing ... |
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Invention
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Slide bearing and pump device. The present invention pertains to a slide bearing used for a rotar... |
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Invention
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Substrate holding device, substrate processing apparatus, substrate processing method, and storag... |
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Invention
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Polishing apparatus and transparent-liquid filling method.
A polishing apparatus is disclosed. T... |
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Invention
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Substrate processing system and decompression structure.
A substrate processing system capable o... |
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Invention
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Polishing method, polishing apparatus, and non-transitory computer-readable recording medium.
A ... |
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Invention
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Substrate processing apparatus.
The present disclosure provides a substrate processing apparatus... |
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Invention
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Liquid-transporting apparatus. The present invention pertains to a liquid-transporting apparatus.... |
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Invention
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Container and pump system. Hollow containers (3, 4) are provided above a hollow column (2) provid... |
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Invention
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Substrate cleaning device and substrate polishing device.
A substrate cleaning device for cleani... |
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Invention
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Polishing apparatus and polishing method.
The disclosure provides a polishing apparatus capable ... |
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Invention
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Substrate holding device and method for detecting wear in substrate holding device.
A substrate ... |
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Invention
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Method for forming protective film on outer peripheral part including bevel part of substrate. Th... |
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Invention
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Shaping nozzle. Provided is a technique capable of easily controlling the shape of a three-dimens... |
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Invention
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Metal joined body and method for manufacturing metal joined body. This metal joined body comprise... |
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G/S
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Metalworking machines and tools; construction machines and apparatus; loading-unloading machines ... |
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2023
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Invention
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Substrate processing device. In the present invention, a plating apparatus includes: a substrate ... |
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G/S
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Pump impellers |
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2022
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Invention
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Container, pump system, and maintenance method.
A hollow container is provided above a hollow co... |
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Invention
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Information processing apparatus, inference apparatus, machine-learning apparatus, information pr... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Substrate polishing method, substrate polishing apparatus, and computer-readable storage medium s... |
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Invention
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Load adjusting system and load adjusting method.
A load adjusting system includes: a bevel grind... |
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Invention
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Substrate processing method and substrate processing apparatus.
The present invention relates to... |
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Invention
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Substrate suction member, elastic seal assembly, top ring, and substrate processing apparatus.
A... |
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Invention
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Fluid machine system, information processing device, and information processing method.
There ar... |
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Invention
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Polishing apparatus and polishing method.
The present invention relates to a polishing apparatus... |
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Invention
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Water-discharge pump apparatus, water-discharge pump management system, water-discharge pump supp... |
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Invention
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Battery unit case for vibration sensor |
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Invention
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Member of battery unit for vibration sensor |
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Invention
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Motor |
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Invention
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Plating apparatus and plating method.
A plating apparatus includes a plating tank configured to ... |
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Invention
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Pre-wet module.
To achieve a small-sized pre-wet module that can perform different pre-processes... |
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Invention
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Plating method and plating apparatus.
A plating method is a plating method for performing a plat... |
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Invention
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Resistor for plating apparatus, and plating apparatus.
A resistor and the like capable of enhanc... |
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G/S
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Sensors [measurement apparatus], other than for medical use; measuring or testing machines and in... |
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G/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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G/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
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Invention
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Plating apparatus and substrate cleaning method.
A substrate is efficiently cleaned.
A substra... |
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Invention
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Method of plating and apparatus for plating.
One object of the present disclosure is to provide ... |
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G/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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G/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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Invention
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Apparatus for plating and method of plating.
There is provided an apparatus for plating a substr... |
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G/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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G/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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G/S
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vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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2020
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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G/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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G/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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G/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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G/S
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Ozone water generators. |
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G/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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G/S
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Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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G/S
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Electric pumps |
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2019
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
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G/S
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Chemical mechanical polishing machines used for
semiconductor wafers. |
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G/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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2017
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G/S
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Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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G/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
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2016
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G/S
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[ General building construction services; Construction consultancy; Operation and maintenance of ... |
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G/S
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Metalworking machines and tools; construction machines and
apparatus; loading-unloading machines... |
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2015
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G/S
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Pump impellers. |
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G/S
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pump impellers. |
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2013
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G/S
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Chemical-mechanical polishing machines used for semiconductor wafers |
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G/S
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Chemical-mechanical polishing machines used for
semiconductor wafers. |
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2006
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G/S
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Chemicals, namely, chemical agents, namely, synthetic organic polymer coagulants, adsorbents, nam... |
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G/S
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[ Chemicals for use in industry and science; plant growth regulating preparations; fertilizers; c... |
