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2025
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Invention
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Method of plating and apparatus for plating.
One object of the present disclosure is to provide ... |
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G/S
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Exhaust gas treatment devices for machines for manufacturing semiconductors |
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G/S
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Exhaust gas treatment devices for machines for manufacturing
semiconductors. |
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Invention
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Information processing apparatus.
An information processing apparatus (3) executes, on substrate... |
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Invention
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Flow path switching device and pump system. The present invention relates to technology for preve... |
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Invention
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Polishing device and polishing method. The present invention suitably removes, in water polishing... |
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Invention
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Polishing apparatus and polishing method.
A polishing apparatus capable of obtaining a desired f... |
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Invention
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Pump.
A pump casing capable of preventing clogging of a pump caused by foreign matter is disclos... |
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Invention
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Polishing device and method for evaluating work-affected layer in polishing device. A new evaluat... |
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Invention
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Polishing apparatus and polishing method.
The present invention relates to a polishing apparatus... |
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Invention
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Substrate detection device, substrate processing device, substrate delivery device, substrate cle... |
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Invention
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Monitoring system, method, program, storage medium, and vacuum pump device. A monitoring system a... |
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Invention
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Abnormality detection apparatus and abnormality detection method for substrate support device.
P... |
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Invention
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Gas solution production device, method, and program. A gas solution production device (8) is prov... |
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Invention
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Electron beam inspection device.
An electron beam inspection device includes an objective lens t... |
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Invention
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Vacuum pump with abatement function. The present invention more safely performs abatement. Provid... |
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Invention
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Vacuum pump with abatement function and control method therefor. The present invention reduces th... |
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Invention
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Metal ion feeding system for electrolytic plating apparatus and metal ion feeding method to elect... |
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Invention
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Superheated-steam generating method and superheated-steam generating apparatus.
A superheated-st... |
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Invention
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Substrate processing apparatus, substrate processing method, transport device, transport method, ... |
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Invention
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Substrate processing module and substrate processing method.
A substrate processing module inclu... |
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Invention
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Method and program for evaluating state of semiconductor manufacturing device. The present invent... |
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Invention
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Plating apparatus control method and plating apparatus.
In a plating apparatus comprising multip... |
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Invention
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Substrate transfer unit, substrate processing apparatus, and transfer device.
A substrate transf... |
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Invention
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Gas generation apparatus. This gas generation apparatus (1) comprises: a first electrode (7); a s... |
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Invention
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Pump. The present invention relates to a pump for transferring a liquid. This pump (1) comprises ... |
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Invention
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Plasma processing system and exhaust system.
A plasma processing system including a filter devic... |
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Invention
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Substrate cleaning device, substrate processing device, and support structure of cleaning tool. T... |
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G/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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Invention
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Polishing apparatus and method for controlling polishing apparatus.
A polishing apparatus is con... |
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Invention
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Additive manufacturing system. Provided is a technique enabling suppression of dust attached to a... |
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Invention
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Polishing method and polishing device. According to this polishing method, a first image of a fir... |
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Invention
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Display device, and semiconductor manufacturing system. A display device according to the present... |
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Invention
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Method for manufacturing laminated board in which a plurality of substrates are bonded. The prese... |
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Invention
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Reciprocating pump device for liquefied gas. The present invention relates to a reciprocating pum... |
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Invention
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Work assistance system and work assistance method. [Problem] To provide a work assistance system ... |
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Invention
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Eddy current damper device and rotary machine. An eddy current damper device (1) comprises: beari... |
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G/S
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Exhaust gas treatment systems for detoxifying exhaust gas for semiconductor manufacturing machines |
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Invention
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Substrate treatment method and substrate treatment device. The present invention performs an appr... |
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Invention
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Substrate processing method. An objective of the present invention is to suppress substrate chipp... |
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2024
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G/S
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Metalworking machines and metalworking machine tools; Chemical processing machines and apparatus,... |
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G/S
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Semiconductor manufacturing machines; electroplating machines for manufacturing semiconductors; e... |
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G/S
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Semiconductor manufacturing machines; plating apparatus for
manufacturing semiconductors; electr... |
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Invention
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Plating device and plating device diagnosis method. In the present invention, the operation statu... |
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Invention
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Cooling-down method for pump apparatus |
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Invention
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Conveyance device and plating device. To simplify the overall configuration of a plating device. ... |
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Invention
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Pump. The present invention relates to a pump. This pump includes a vortex suppression structure ... |
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Invention
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Plain bearing and pump apparatus |
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Invention
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Liquid transfer apparatus |
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Invention
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Container and pump system |
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G/S
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Metalworking machines and metalworking machine tools; construction machines and apparatus, namely... |
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2023
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Invention
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Pump apparatus for liquefied gas.
The present invention relates to a pump apparatus for deliveri... |
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Invention
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Seal for chemical mechanical polishing device |
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Invention
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Information processing device, machine learning device, information processing method, and machin... |
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Invention
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Filler-application apparatus.
The present application relates to a filler-application apparatus ... |
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G/S
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Pump impellers |
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2022
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Invention
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Buffer gate, pump carrying-in method, and pump pulling-up method.
The present application relate... |
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Invention
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Polishing apparatus.
The present invention relates to a polishing apparatus. The polishing appar... |
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Invention
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Motor pump.
The present invention relates to a motor pump. The motor pump (MP) includes a rotor ... |
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G/S
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Acceleration sensors; digital humidity sensors; digital liquid level sensors; distance sensors; e... |
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G/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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G/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
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G/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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G/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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G/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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G/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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G/S
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vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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2020
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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G/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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G/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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G/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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G/S
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Ozone water generators. |
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G/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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G/S
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Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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G/S
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Electric pumps |
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2019
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
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G/S
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Chemical mechanical polishing machines used for
semiconductor wafers. |
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G/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
