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2025
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P/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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Invention
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Polishing apparatus and polishing method.
A polishing apparatus capable of monitoring a distribu... |
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Invention
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Transfer apparatus, cleaning module, and substrate processing apparatus.
To achieve a cleaning m... |
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Invention
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Substrate drying device and substrate drying method.
A substrate drying device is provided that ... |
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Invention
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Rubber membrane having first and second hardness for use in a polishing head.
An elastic membran... |
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P/S
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Exhaust gas treatment devices for machines for manufacturing
semiconductors. |
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P/S
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Exhaust gas treatment devices for machines for manufacturing semiconductors |
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Invention
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Metal-supporting nonwoven fabric and production method thereof, catalyst, unsaturated compound hy... |
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Invention
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Substrate polishing apparatus and substrate processing apparatus.
To mitigate the influence of t... |
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Invention
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Retainer ring, substrate polishing device, substrate processing device, and method for cleaning r... |
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Invention
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Substrate processing apparatus and recording media.
To appropriately control the supply amount o... |
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Invention
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Substrate cleaning method, substrate cleaning device, substrate cleaning program, and substrate p... |
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Invention
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Substrate polishing device and thickness calculation method. The present invention accurately mea... |
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Invention
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Pad surface determination method and pad surface determination system. The present invention rela... |
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Invention
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Superconducting motor and motor system. This invention relates to a superconducting motor provide... |
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Invention
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Substrate polishing apparatus and film thickness calculating method.
An object is to accurately ... |
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Invention
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Method of producing reference-spectrum library for use in estimation of film thickness of workpie... |
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Invention
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Permanent magnet motor, motor system, and pump system. Provided is an electrical motor capable of... |
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Invention
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Reciprocating pump. A reciprocating pump (2) comprises: a cylinder (16) having a pressurizing cha... |
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Invention
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Seal ring and reciprocating pump. A seal ring (22) is provided with a first seal ring (31) having... |
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Invention
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Polishing method and polishing system. The present invention relates to technology for removing a... |
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Invention
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Dresser cleaning device and substrate polishing device.
A dresser cleaning device includes a cle... |
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Invention
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Substrate processing method and substrate processing device. The present invention relates to a s... |
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Invention
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Polishing method and polishing apparatus.
A polishing method that can stabilize an intensity of ... |
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Invention
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Information processing device, substrate polishing device, inference device, machine learning dev... |
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Invention
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Polishing device. The present invention relates to a polishing device for polishing a peripheral ... |
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Invention
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Processing head, substrate processing device, and substrate processing method. The present invent... |
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Invention
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Polishing method and polishing device. The present invention relates to a technique for polishing... |
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Invention
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Evaluation method and evaluation substrate for evaluating liquid substitution state near substrat... |
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Invention
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Motor pump. A motor pump comprises: an impeller (1); a motor rotor (2) that is fixed to the impel... |
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Invention
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Exhaust gas treatment apparatus and exhaust gas treatment method.
An exhaust gas treatment appar... |
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Invention
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Motor pump. Provided is a motor pump capable of sufficiently eliminating an air pocket at the bac... |
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Invention
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Pump device. A pump device (7) comprises: a baffle structure (50) disposed in a suction container... |
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Invention
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Movable device, polishing device, and substrate processing device. This movable device includes a... |
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2024
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P/S
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Metalworking machines and metalworking machine tools; Chemical processing machines and apparatus,... |
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Invention
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Heat medium supply device. The present invention relates to a heat medium supply device which sup... |
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P/S
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Semiconductor manufacturing machines; electroplating machines for manufacturing semiconductors; e... |
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P/S
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Semiconductor manufacturing machines; plating apparatus for
manufacturing semiconductors; electr... |
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Invention
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Substrate bonding method and substrate bonding system. The present invention suppresses adhesion ... |
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Invention
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Plating device and plating method. The present invention corrects variability in the plating film... |
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Invention
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Plating device and plating method. The purpose of the present invention is to supply metal ions w... |
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Invention
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Plating device and substrate processing method. The present invention enhances the detection accu... |
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Invention
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Detection device and detection method. Provided is a technology that makes it possible to detect ... |
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P/S
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Metalworking machines and metalworking machine tools; construction machines and apparatus, namely... |
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2023
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Invention
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Seal for chemical mechanical polishing device |
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P/S
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Pump impellers |
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Invention
|
Pump apparatus.
The present invention relates to a pump apparatus for pressurizing liquid hydrog... |
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Invention
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Water detecting device, water detecting system, and water detecting method.
A water detecting de... |
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Invention
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Drying-up method, cooling-down method, and hot-up method for a pump apparatus.
The drying-up met... |
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Invention
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Method of starting and stopping pump apparatuses coupled in series.
The present invention relate... |
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Invention
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Substrate polishing method, program, and substrate polishing apparatus.
A substrate polishing me... |
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Invention
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Machine-learning method and machine-learning apparatus.
A machine-learning method includes: a da... |
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Invention
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Substrate cleaning device, substrate processing device, substrate cleaning method, and substrate ... |
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Invention
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Polishing apparatus.
The present application relates to a polishing apparatus. The polishing app... |
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Invention
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Initialization device for elastic membrane, polishing apparatus, initialization method for elasti... |
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2022
|
Invention
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Substrate holder and substrate processing apparatus.
The present disclosure provides a substrate... |
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Invention
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Plating apparatus and plating method.
To improve in-plane uniformity of a film to be plated on a... |
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P/S
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Acceleration sensors; digital humidity sensors; digital liquid level sensors; distance sensors; e... |
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P/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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P/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
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P/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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P/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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Invention
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Motor pump.
The invention is applicable to a motor pump. The motor pump (MP) includes an impelle... |
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P/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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P/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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P/S
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vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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2020
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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P/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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P/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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P/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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P/S
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Ozone water generators. |
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P/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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P/S
|
Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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P/S
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Electric pumps |
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2019
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
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P/S
|
Chemical mechanical polishing machines used for
semiconductor wafers. |
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P/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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2017
|
P/S
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Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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P/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
