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2026
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Invention
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Washing apparatus.
A washing apparatus includes a housing; a holding part that holds a substrate... |
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Invention
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Plating method and plating apparatus.
Provided is a technique that allows removing gas bubbles a... |
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Invention
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Substrate holder, substrate plating device equipped therewith, and electrical contact.
Provided ... |
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Invention
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Plating apparatus and substrate cleaning method.
A substrate is efficiently cleaned. A plating m... |
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Invention
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Method of training neural network model, and plating apparatus.
To provide a method of training ... |
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Invention
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Polishing apparatus and polishing method.
A polishing apparatus and a polishing method capable o... |
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Invention
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Polishing apparatus, substrate processing apparatus, polishing method, and determination device. ... |
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Invention
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Top ring. The purpose of the present invention is to improve the attracting properties of a top r... |
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Invention
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Substrate drying apparatus. Provided is a substrate drying apparatus which prevents a liquid from... |
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Invention
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Push-pull device and substrate processing module.
A push-pull device includes a free joint struc... |
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Invention
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Exhaust system.
An exhaust system for exhausting hydrogen discharged from an EUV exposure appara... |
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Invention
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Substrate processing device and substrate processing method.
A substrate processing device inclu... |
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Invention
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Separation device. The present invention relates to a separation device. Provided is a separation... |
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Invention
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Substrate processing apparatus and supply apparatus.
A substrate processing apparatus includes a... |
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Invention
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Polishing apparatus.
A polishing apparatus capable of determining a state change of a wafer more... |
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Invention
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System, method, and program for facilitating interaction between plurality of ai agents. This sys... |
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Invention
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Polishing device and polishing method. A polishing device according to the present invention comp... |
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Invention
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Substrate cleaning method and substrate cleaning device. The present invention relates to a subst... |
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Invention
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Substrate polishing device, substrate processing device, method, storage medium, and polishing pa... |
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Invention
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Polishing apparatus and polishing method.
A polishing apparatus capable of accurately determinin... |
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Invention
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System, method, and program for determining ai agent to be mounted on robot. The present inventio... |
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Invention
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Sliding bearing. The present invention pertains to a sliding bearing that is used in a rotary mac... |
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2025
|
Invention
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Method of producing reference spectral library for use in film-thickness estimation for workpiece... |
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|
Invention
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Non-contact pad cleaning apparatus.
A non-contact pad cleaning apparatus that does not cause a l... |
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Invention
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Substrate cleaning device, substrate processing device, and substrate cleaning method. Provided a... |
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Invention
|
Substrate processing system.
A substrate processing system capable of reliably setting parameter... |
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Invention
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Substrate cleaning device, substrate processing apparatus, method, and storage medium.
A substra... |
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P/S
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Exhaust gas treatment devices for machines for manufacturing semiconductors |
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P/S
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Exhaust gas treatment devices for machines for manufacturing
semiconductors. |
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Invention
|
Information processing device and information processing method. [Problem] To provide an informat... |
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Invention
|
Substrate processing apparatus.
A substrate processing apparatus capable of optimizing a measure... |
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P/S
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Exhaust gas treatment systems for detoxifying exhaust gas for semiconductor manufacturing machines |
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Invention
|
Retainer ring and substrate holder.
A retainer ring provided in a substrate holder is disclosed,... |
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2024
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P/S
|
Metalworking machines and metalworking machine tools; Chemical processing machines and apparatus,... |
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P/S
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Semiconductor manufacturing machines; electroplating machines for manufacturing semiconductors; e... |
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P/S
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Semiconductor manufacturing machines; plating apparatus for
manufacturing semiconductors; electr... |
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Invention
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Display screen with an animated graphical user interface |
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P/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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|
Invention
|
Exhaust gas treatment apparatus and exhaust gas treatment method.
The application relates to an ... |
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P/S
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Metalworking machines and metalworking machine tools; construction machines and apparatus, namely... |
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Invention
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Cooling system for semiconductor manufacturing process, and semiconductor manufacturing system.
... |
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Invention
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Controller and controlling method for exhaust gas treatment system.
The application relates to a... |
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|
Invention
|
Substrate polishing device and polishing pad.
A substrate polishing device includes a turntable ... |
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2023
|
Invention
|
Gas generation device.
A plurality of trench grooves (8) are formed on a first electrode (6) of ... |
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Invention
|
Transfer machine and substrate processing apparatus.
A transfer machine 80 has an arm 810; a hol... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a plurality of polishi... |
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Invention
|
Polishing device.
The present invention relates to a polishing apparatus. The polishing apparatu... |
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Invention
|
Safety assistance device, inference device, machine learning device, safety assistance method, in... |
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|
Invention
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Frame for chemical mechanical polishing device |
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|
Invention
|
Plating apparatus and plating solution discharging method.
An occurrence of a plating failure ca... |
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|
Invention
|
Substrate processing apparatus.
A substrate processing apparatus that can efficiently clean the ... |
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Invention
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Powder supply apparatus.
A powder supply apparatus includes: a storage member including a storag... |
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P/S
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Pump impellers |
|
|
Invention
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Substrate holding device, substrate manufacturing apparatus, and substrate manufacturing method. ... |
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|
Invention
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Pump-operation support method and pump-operation support apparatus.
The present invention relate... |
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2022
|
Invention
|
Pump.
The present invention relates to a pump for delivering liquid, and more particularly to a ... |
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|
Invention
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Liquefied-gas delivery system.
The liquefied-gas delivery system includes a reciprocating pump a... |
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Invention
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Cap for a battery unit for a pump vibration sensor |
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P/S
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Acceleration sensors; digital humidity sensors; digital liquid level sensors; distance sensors; e... |
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P/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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P/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
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P/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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P/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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P/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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P/S
|
Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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P/S
|
vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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2020
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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P/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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P/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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P/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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P/S
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Ozone water generators. |
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P/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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P/S
|
Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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P/S
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Electric pumps |
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2019
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P/S
|
Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
|
P/S
|
Chemical mechanical polishing machines used for
semiconductor wafers. |
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P/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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2017
|
P/S
|
Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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P/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
