|
2025
|
Invention
|
Plating apparatus and substrate cleaning method.
A plating module includes: a plating tank confi... |
|
|
Invention
|
Substrate cleaning apparatus and substrate cleaning method.
There is provided a substrate cleani... |
|
|
Invention
|
Substrate holding apparatus, substrate suction determination method, substrate polishing apparatu... |
|
2024
|
P/S
|
Metalworking machines and tools; chemical processing machines and apparatus; semiconductor manufa... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
|
|
Invention
|
Method for releasing substrate, method for polishing substrate, substrate polishing apparatus, su... |
|
|
Invention
|
Exahust gas treatment apparatus.
An exhaust gas treatment apparatus capable of eliminating an ad... |
|
|
Invention
|
Substrate gripping apparatus.
A substrate gripping apparatus includes: a support member having a... |
|
|
Invention
|
Fluid supply device.
Provided is a fluid supply device. The fluid supply device includes: a firs... |
|
|
Invention
|
Substrate polishing method and substrate polishing apparatus.
A first dressing of dressing a pol... |
|
|
P/S
|
Semiconductor manufacturing machines; plating apparatus for manufacturing semiconductors; electri... |
|
|
P/S
|
Semiconductor manufacturing machines; plating apparatus for
manufacturing semiconductors; electr... |
|
|
Invention
|
Heat source system. This heat source system comprises: a plurality of heat source machines (1, 2)... |
|
|
Invention
|
Top ring and substrate polishing device. Provided is a top ring or a substrate polishing device c... |
|
|
Invention
|
Method for determining health index of substrate processing apparatus and substrate processing ap... |
|
|
Invention
|
Apparatus for processing substrate, method of controlling apparatus for processing substrate, and... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method. A substrate processing apparatus ... |
|
|
Invention
|
Metallic joined structure, impeller, pump, and method for producing metallic joined structure. Th... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method. The present invention relates to ... |
|
|
Invention
|
Substrate processing device and substrate processing method. The present invention relates to a s... |
|
|
Invention
|
Polishing apparatus.
A technology that can clean a bottom surface of a dresser while inhibiting ... |
|
|
Invention
|
Heat medium supply device. This heat medium supply device (1) is provided with: a precooling heat... |
|
|
Invention
|
Heat medium supply device. This heat medium supply device (1) comprises: a cooling-side outlet pi... |
|
|
Invention
|
Information processing program, terminal device, information processing method, server, rotary ma... |
|
|
Invention
|
Data processing system, data processing device, data processing method, operation state evaluatio... |
|
|
Invention
|
Method for setting forward/backward movement recipe for shielding body, and plating apparatus.
T... |
|
|
Invention
|
Absorption water cooler/heater with cover. This absorption water cooler/heater with a cover compr... |
|
|
P/S
|
Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
|
|
Invention
|
Magnetic bearing apparatus. This magnetic bearing apparatus is provided with a stator core (15) t... |
|
|
Invention
|
Absorption water cooling/heating machine and method for controlling operation of absorption water... |
|
|
Invention
|
Combustion device, absorption cold/hot water machine, and combustion amount control method. This ... |
|
|
P/S
|
Metalworking machines and tools; construction machines and apparatus; loading-unloading machines ... |
|
2023
|
Invention
|
Plating apparatus. The present invention provides a technology with which it is possible to suppr... |
|
|
Invention
|
Plating device. The present invention detects disturbance of an electric field formed between an ... |
|
|
P/S
|
Pump impellers |
|
|
Invention
|
Plating apparatus and plating method.
Provided is a technique capable of improving the stirring ... |
|
|
Invention
|
Substrate polishing method.
The present invention relates to a substrate polishing method of pol... |
|
|
Invention
|
Information processing apparatus, inference apparatus, machine-learning apparatus, information pr... |
|
|
Invention
|
Polishing head and polishing apparatus.
The present invention relates to a polishing head for pr... |
|
|
Invention
|
Substrate polishing apparatus.
The present invention relates to a substrate polishing apparatus ... |
|
|
Invention
|
Polishing device and method for detecting polishing end point in polishing device.
The present i... |
|
2022
|
Invention
|
Plating apparatus and operation method of plating apparatus.
To efficiently remove gas bubbles f... |
|
|
Invention
|
Plating apparatus.
Proposed is a plating apparatus capable of detecting a film thickness of a pl... |
|
|
Invention
|
Pump unit.
The present invention relates to a pump unit. The pump unit (PU) includes a connector... |
|
|
Invention
|
Plating apparatus.
To suppress a central portion of a paddle from hanging down in a cup type pla... |
|
|
Invention
|
Am apparatus.
The present invention provides a technique for evenly supplying powder used as a m... |
|
|
Invention
|
Machine-learning apparatus, pump-performance prediction apparatus, inference apparatus, pump-shap... |
|
|
Invention
|
Substrate state measurement device, plating apparatus, and substrate state measurement method.
A... |
|
|
Invention
|
Substrate processing method and substrate processing apparatus.
The present application relates ... |
|
|
Invention
|
Substrate processing method.
The present application relates to a substrate processing method of... |
|
|
Invention
|
Substrate support device, cleaning device, device and method for calculating rotation speed of su... |
|
|
Invention
|
Apparatus for plating and method of plating.
There is provided an apparatus for plating, compris... |
|
|
P/S
|
Sensors [measurement apparatus], other than for medical use; measuring or testing machines and in... |
|
|
P/S
|
Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
|
|
P/S
|
Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
|
2021
|
P/S
|
Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
|
|
P/S
|
Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
|
|
P/S
|
Recorded computer programs for use in database management, use as a spread sheet, word processing... |
|
|
P/S
|
Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
|
|
P/S
|
vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
|
2020
|
P/S
|
Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
|
|
P/S
|
Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
|
|
P/S
|
Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
|
|
P/S
|
Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
|
|
P/S
|
Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
|
|
P/S
|
Ozone water generators. |
|
|
P/S
|
Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
|
|
P/S
|
Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
|
|
P/S
|
Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
|
|
P/S
|
Electric pumps |
|
2019
|
P/S
|
Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
|
2018
|
P/S
|
Chemical mechanical polishing machines used for
semiconductor wafers. |
|
|
P/S
|
Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
|
2017
|
P/S
|
Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
|
|
P/S
|
Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
|
2016
|
P/S
|
[ General building construction services; Construction consultancy; Operation and maintenance of ... |
|
|
P/S
|
Metalworking machines and tools; construction machines and
apparatus; loading-unloading machines... |
|
2015
|
P/S
|
Pump impellers. |
