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2023
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Invention
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Inner pod holding device conducive to reducing dust contamination and optical inspection apparatu... |
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Invention
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Optical inspection device for surface of reticle pod and optical inspection method for surface of... |
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Invention
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Inspection device for sub-element of reticle pod.
An inspection device for a sub-element of a re... |
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Invention
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High-speed surface inspection system for reticle pod and high-speed surface inspection method for... |
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2022
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Invention
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Jig for measuring temperature and humidity of reticle carrier.
A jig for measuring temperature a... |
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Invention
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Jig for automatically measuring flow rate of reticle carrier.
A jig for automatically measuring ... |
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Invention
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Clamping appliance of reticle inner pod. A clamping appliance of a reticle inner pod comprises: t... |
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Invention
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Gripping mechanism for inspection of reticle inner pod.
A gripping mechanism for inspection of a... |
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Invention
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Drawer-replaced cleaning apparatus.
A drawer-replaced cleaning apparatus comprises: a box, at le... |
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2015
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Invention
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Operating methods of purge devices for containers. Operating methods of purge devices for contain... |
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Invention
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Purge devices having micronozzles and operating methods thereof. The present invention provides p... |
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2014
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Invention
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Wafer transport system and method for operating the same. The present invention relates to a wafe... |
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2013
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Invention
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Air-blown cleaning system for photomasks and method thereof. An air-blown cleaning system for cle... |
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Invention
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Method and system for cleaning photomasks. A method for cleaning photomasks includes the followin... |
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Invention
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Photomask cleaning device. A photomask cleaning device includes a stage, a fluid dispenser, a scr... |
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2012
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Invention
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Wafer box conveyor. The wafer box conveyer includes a chassis, a transverse moving mechanism, a l... |
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2010
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Invention
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Temperature and humidity measuring device deployed on substrate. The present invention provides a... |
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2008
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Invention
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Gas filling apparatus. A gas filling apparatus for filling a gas into a storage apparatus for sto... |
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Invention
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Gas filling apparatus and gas filling port thereof. The present invention provides a gas filling ... |
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Invention
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Thin substrate pitch measurement equipment. The present invention provides an equipment for measu... |
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Invention
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Gas filling apparatus. This invention is about a gas filling apparatus for filling a gas into a s... |
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2007
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Invention
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Photomask cleaner. A photomask cleaner includes a clamp assembly using clamping plates with an el... |
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2006
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Invention
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Gas filling apparatus for photomask box. A gas filling apparatus used to fill a photomask box wit... |
