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2025
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Invention
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Soft x-ray monochromator. A soft X-ray monochromator that includes a substrate that comprises a p... |
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2024
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Invention
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X-ray focusing with wavelength selection systems for semiconductor metrology. An x-ray illuminati... |
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Invention
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Radiation source for metrology. A metrology related radiation source that includes (a) a gas supp... |
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Invention
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Electon beam source for x-ray generation for sample evaluation. An electron beam source for use i... |
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Invention
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Method and system for non-destructive metrology of thin layers.
Determining a property of a laye... |
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Invention
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X-ray focusing and wavelength selection. A system having local x-ray induced charge compensation ... |
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Invention
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Characterizing and measuring in small boxes using xps with multiple measurements. A system to cha... |
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Invention
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X-ray focusing and wavelength selection. X-ray optics that include (i) achromatic collimating opt... |
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Invention
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Optics for use in generating an x-ray beam. 2 222O, and is configured to convert the light beam t... |
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Invention
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System and method for measuring a sample by x-ray reflectance scatterometry. A system and method ... |
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2023
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Invention
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Method and system for monitoring deposition process.
Quantification of the passivation and the s... |
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Invention
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A high brightness primary x-ray source for in-line xps and xrf metrology. A method for evaluating... |
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Invention
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Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass ... |
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Invention
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Feed-forward of multi-layer and multi-process information using xps and xrf technologies.
Method... |
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Invention
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Xps metrology for process control in selective deposition. XPS spectra are used to analyze and mo... |
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Invention
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Method and system for non-destructive metrology of thin layers. Determining a property of a layer... |
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Invention
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High brightness x-ray source. A method for generating an x-ray beam, the method includes (a) dire... |
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2022
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Invention
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Production solutions for high-throughput/precision xps metrology using unsupervised machine learn... |
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Invention
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Secondary ion mass spectroscopy adaptive count rate modulation. A method for adaptive secondary i... |
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Invention
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Evaluating a structure having a microscopic dimension with a low energy x-ray beam. A system for ... |
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G/S
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X-Ray monitoring, measurement and inspection equipment for characterizing dimensional and/or mate... |
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2021
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Invention
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Mass spectrometer detector and system and method using the same. An ion detector for secondary io... |
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Invention
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Feed-forward of multi-layer and multi-process information using xps and xrf technologies. Methods... |
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2020
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Invention
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Patterned x-ray emitting target. The present invention is intended to provide improved patterned ... |
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Invention
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Method and system for monitoring deposition process. Quantification of the passivation and the se... |
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2019
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Invention
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Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatter... |
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G/S
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Metrology systems comprised of computer hardware and ion beam equipment for measuring physical co... |
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2017
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Invention
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Silicon germanium thickness and composition determination using combined xps and xrf technologies... |
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2006
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G/S
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Metrology systems comprised of computer hardware and x-ray
equipment for measuring physical comp... |
