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2024
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Invention
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Method for implanting doping atoms into a substrate. Ion implantation in which an ion beam (10) c... |
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Invention
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Energy filter element for ion implantation systems for the use in the production of wafers.
A me... |
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2023
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Invention
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Energy filter element for ion implantation systems for the use in the production of wafers. A met... |
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Invention
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Semiconductor wafer. A semiconductor wafer includes a first surface and an implantation area adja... |
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2022
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Invention
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Method for producing an electronic semiconductor component.
A method for producing an electronic... |
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Invention
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Method for producing an electronic semiconductor component. The invention relates to a method for... |
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Invention
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A method for the simulation of an energy-filtered ion implantation (efii).
A computer-implemente... |
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Invention
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A computer-implemented method for the simulation of an energy-filtered ion implantation (efii). vv). |
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Invention
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A computer-implemented method for the simulation of an energy-filtered ion implantation (efii) us... |
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2021
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Invention
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Method for producing a pretreated composite substrate, and pretreated composite substrate.
A met... |
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Invention
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Electronic semiconductor component, and method for manufacturing a pretreated composite substrate... |
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Invention
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Method for producing a pretreated composite substrate, and pretreated composite substrate. The me... |
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Invention
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Electronic semiconductor component, and process for manufacturing a pretreated composite substrat... |
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Invention
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Energy filter assembly for ion implantation system with at least one coupling element.
An energy... |
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Invention
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Ion implantation device with an energy filter and a support element for overlapping at least part... |
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Invention
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Energy filter assembly for ion implantation system with at least one coupling element. An energy ... |
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Invention
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Method and device for implanting ions in wafers. A method comprising the irradiation of a wafer b... |
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Invention
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Ion implantation device comprising energy filter and additional heating element.
An ion implanta... |
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Invention
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Ion implantation device comprising energy filter and additional heating element. An ion implantat... |
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Invention
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Ion implantation device with energy filter having additional thermal energy dissipation surface a... |
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2020
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Invention
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Energy filter element for ion implantation systems for the use in the production of wafers. The i... |
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Invention
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Energy filter for use in the implantation of ions into a substrate. The energy filter for use in ... |
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Invention
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Energy filter for use in the implantation of ions into a substrate. The invention relates to an e... |
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Invention
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Method for producing semiconductor components, and semiconductor component. A method for the prod... |
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Invention
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Device and method for implanting particles into a substrate. A device for implanting particles in... |
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Invention
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Method for producing semiconductor components, and semiconductor component. The method for produc... |
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Invention
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Device and method for implanting particles into a substrate. The device for implanting particles ... |
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2017
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Invention
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Method and device for implanting ions in wafers. Disclosed is a method comprising the irradiation... |
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Invention
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Energy filter element for ion implantation systems for the use in the production of wafers. An im... |
