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2024
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Invention
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Surface treatment device. A surface treatment device (1) comprises: a vacuum container (11); a tr... |
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2022
|
Invention
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Sputtering apparatus.
A sputtering apparatus includes: target holders holding targets facing eac... |
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Invention
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Sputtering device. A sputtering device (10) is provided with: a first target holder (111) and a s... |
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2021
|
Invention
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Led light irradiation device. An LED light irradiation device (10) comprises: an LED module (11) ... |
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Invention
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Plasma generator. A plasma generator includes an AC power supply, a power supply electrode and a ... |
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Invention
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Plasma generating device. Provided is a dielectric barrier discharge-type plasma generating devic... |
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Invention
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Radio-frequency antenna and plasma processing device.
A radio-frequency antenna through which a... |
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2020
|
Invention
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Plasma source.
An inductively coupled plasma source with a simple configuration, has an antenna ... |
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2017
|
Invention
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Plasma source and plasma processing apparatus.
A plasma source which is capable of supplying a p... |
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Invention
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Plasma source and plasma processing device. The present invention addresses the problem of provid... |
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2011
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Invention
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Plasma processing device.
A plasma processing device has: a metallic vacuum chamber; an antenna-... |
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Invention
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Plasma processing apparatus. Provided is a plasma processing apparatus, which can generate plasma... |
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Invention
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Thin-film formation sputtering device.
A thin-film formation sputtering device capable of formin... |
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Invention
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Antenna for plasma processing device, and plasma processing device using the same.
A radio-frequ... |
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Invention
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Sputtering thin film forming apparatus. Provided is a sputtering thin film forming apparatus, whi... |
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Invention
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Antenna for plasma processing apparatus, and plasma processing apparatus using antenna. Provided ... |
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Invention
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Plasma processing device.
A plasma processing device according to the present invention includes... |
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Invention
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Plasma treatment device. The problem addressed by the present invention is the provision of a pla... |
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Invention
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Thin-film solar cell and semiconductor device. Provided is a thin-film solar cell using a semicon... |
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Invention
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Sputtering system.
The present invention aims at providing a sputtering system capable of effici... |
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Invention
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Sputtering device. Provided is a sputtering device which can efficiently generate high density pl... |
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2010
|
Invention
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Plasma processing device.
The present invention provides an internal antenna type plasma process... |
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Invention
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Plasma processing apparatus. The purpose of the present invention is to provide, at low cost, an ... |
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Invention
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Plasma processing device.
An inductively coupled plasma processing device using a radio-frequenc... |
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Invention
|
Plasma processing apparatus.
The present invention provides a plasma processing device capable o... |
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Invention
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Plasma processing apparatus. Provided is a plasma processing apparatus in which a strong inductio... |
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Invention
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Plasma processing apparatus. Provided is a plasma processing apparatus in which a strong high fre... |
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2009
|
Invention
|
Thin-film forming sputtering system. A thin-film forming sputtering system capable of a sputterin... |
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|
Invention
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Thin film-forming sputtering device. Disclosed is a thin film-forming sputtering device capable o... |
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|
Invention
|
Plasma generation device and plasma processing device. A flange, which forms a portion of a vacuu... |
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Invention
|
Plasma generating apparatus and plasma processing apparatus. A flat-board-like high frequency ant... |
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|
Invention
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Radio-frequency antenna unit and plasma processing apparatus. The present invention aims at provi... |
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|
Invention
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High frequency antenna unit and plasma processing apparatus. Provided is a high frequency antenna... |
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2008
|
Invention
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Plasma processing apparatus. The present invention aims at providing a plasma processing apparatu... |
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|
Invention
|
Plasma processing apparatus. Disclosed is an apparatus for performing a plasma process on a plana... |
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Invention
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Plasma treatment device. Disclosed is a plasma treatment device that can efficiently use the plas... |
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2006
|
Invention
|
Plasma producing method and apparatus as well as plasma processing apparatus.
Plasma producing m... |
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Invention
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Plasma producing method and apparatus as well as plasma processing apparatus. Plasma producing me... |
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|
Invention
|
Silicon film forming apparatus.
A silicon film forming apparatus includes a deposition chamber (... |
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|
Invention
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Silicon dot forming method and silicon dot forming apparatus. There are provided a method and an ... |
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|
Invention
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Method and apparatus for forming a crystalline silicon thin film.
A hydrogen gas is supplied int... |
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2005
|
Invention
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Surface modification method for solid sample, impurity activation method, and method for manufact... |
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Invention
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Solid sample surface quality modification method, impurities activation method, and semiconductor... |
