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2017
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Invention
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Short inorganic trisilylamine-based polysilazanes for thin film deposition. Disclosed are Si-C fr... |
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Invention
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N-h free and si-rich perhydridopolysilzane compositions, their synthesis, and applications. 3x2yy... |
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Invention
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Short inorganic trisilylamine-based polysilazanes for thin film deposition. 6 hydrocarbyl group.
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2016
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Invention
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Vapor deposition processes for forming silicon- and oxygen-containing thin films. ALD processes f... |
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Invention
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Vapor deposition processes for forming silicon- and nitrogen-containing thin films. ALD processes... |
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|
Invention
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Si-containing film forming compositions and methods of using the same. Mono-substituted TSA precu... |
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Invention
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Catalyst dehydrogenative coupling of carbosilanes with ammonia, amnines and amidines. Si-containi... |
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2004
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G/S
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Chemicals used in the manufacture of semiconductors and photovoltaic devices |
