|
2022
|
Invention
|
Apparatus, system, and method for drying semiconductor wafers.
An apparatus and method for dryin... |
|
2021
|
Invention
|
Correlation between conductivity and ph measurements for koh texturing solutions and additives.
... |
|
2019
|
G/S
|
Machinery in the nature of equipment for the treatment and processing of semiconductor substrates |
|
2018
|
Invention
|
Correlation between conductivity and ph measurements for koh texturing solutions and additives. T... |
|
|
Invention
|
System, apparatus, and method for processing substrates using acoustic energy. A system, apparatu... |
|
2016
|
Invention
|
Method for selective under-etching of porous silicon. A method for making a solar cell is disclos... |
|
2015
|
Invention
|
Composite transducer apparatus and system for processing a substrate and method of constructing t... |
|
2014
|
Invention
|
Systems and methods for drying a rotating substrate. A system for drying a surface of a substrate... |
|
2012
|
Invention
|
Method for processing flat articles. A method for processing flat articles with acoustical energy... |
|
2011
|
Invention
|
Systems and methods for drying a rotating substrate. A method of drying a surface of a substrate ... |
|
2010
|
Invention
|
Method of manufacturing a solar cell using a pre-cleaning step that contributes to homogeneous te... |
|
|
Invention
|
Acoustic energy system, method and apparatus for processing flat articles. A system, apparatus an... |
|
|
Invention
|
Systems and methods for drying a rotating substrate. A system of drying a surface of a substrate ... |
|
2009
|
G/S
|
Semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconduc... |
|
2008
|
Invention
|
Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect... |
|
2007
|
Invention
|
System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquid.... |
|
|
Invention
|
Method of cleaning substrates utilizing megasonic energy. A method of cleaning a substrate withou... |
|
|
Invention
|
System and method for processing a substrate utilizing a gas stream for particle removal. A syste... |
|
|
Invention
|
Apparatus and method of measuring acoustical energy applied to a substrate. An apparatus (100) an... |
|
|
Invention
|
Apparatus for ejecting fluid onto a substrate and system and method incorporating the same. A flu... |
|
|
Invention
|
Tranducer assembly incorporating a transmitter having through holes, and method of cleaning. An a... |
|
|
Invention
|
A splash sheild for a rotary substrate support to prevent splash back. A method and system for pr... |
|
|
Invention
|
Apparatus and method for processing a hydrophobic surface of a substrate. A method of processing ... |
|
|
Invention
|
Spray jet cleaning apparatus and method. A spray cleaning device having an atomizing unit with at... |
|
|
Invention
|
System, apparatus and methods for processing substrates using acoustic energy. A wafer cleaning s... |
|
2006
|
Invention
|
Megasonic cleaning using supersaturated solution. A method and system for the megasonic cleaning ... |
|
2005
|
Invention
|
Method and apparatus for creating ozonated process solutions having high ozone concentration. A m... |
|
|
Invention
|
Reduced pressure irradiation processing method and apparatus. A system and method for processing ... |
|
2004
|
Invention
|
System and method for selective etching of silicon nitride during substrate processing. A system ... |
|
|
Invention
|
Membrane dryer. A system, method, and apparatus for supplying a gas-liquid vapor to a process tan... |
|
|
Invention
|
Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit m... |
|
|
Invention
|
System and method for point-of-use filtration and purification of fluids used in substrate proces... |
|
|
Invention
|
Megasonic cleaning using supersaturated cleaning solution. A method and system for the megasonic ... |
|
|
Invention
|
Megasonic cleaner and dryer. An apparatus for drying a generally flat substrate that has been cle... |
|
2003
|
Invention
|
Sonic-energy cleaner system with gasified fluid. In accordance with one embodiment there is provi... |
|
|
Invention
|
Substrate process tank with acoustical source transmission and method of processing substrates. A... |
|
|
G/S
|
dryer module for use in semiconductor processing wet benches |
|
|
Invention
|
Capillary drying of substrates. An apparatus and method for drying substrates. The inventive appa... |
|
2002
|
Invention
|
Reciprocating megasonic probe. A method of cleaning a substrate comprises placing the substrate o... |
|
|
Invention
|
Apparatus for treating substrates. The aim of the invention is to attain a uniform and homogeneou... |
|
1995
|
G/S
|
apparatus for cleaning, rinsing and drying semiconductor wafers |
