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2023
|
Invention
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Etching gas and etching method using the same.
An etching gas and an etching method, the etching... |
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Invention
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Method for purifying 6fda with high purity. The present invention relates to a method for purifyi... |
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|
Invention
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Composition for surface treatment and surface treatment method using the same.
A composition for... |
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|
Invention
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Surface treatment composition and surface treatment method using same. 266) and hydrofluoric acid... |
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Invention
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Method for preparing bis(methylcyclopentadienyl)nickel, and nickel oxide thin film using same. A ... |
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2022
|
Invention
|
Silicon nitride film etching composition and preparation method therefor. The present invention r... |
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2021
|
Invention
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Surface treatment method for container for storing high-purity hydrogen fluoride for semiconducto... |
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2020
|
Invention
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Electrolyte additive for secondary battery, preparation method therefor, and electrolyte composit... |
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2019
|
Invention
|
Method for producing alkali metal hexafluorophosphate, alkali metal hexafluorophosphate, method f... |
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2018
|
Invention
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Method of simultaneously preparing 1,1,1-trifluoro-2-chloropropene and 1,1,1,2-tetrafluoropropene... |
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2014
|
Invention
|
Method and apparatus for continuously producing 1,1,1,2,3-pentafluoropropane with high yield.
A ... |
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2013
|
Invention
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Method and apparatus for continuously producing 1,1,1,2,3-pentafluoropropane with high yield. 3) ... |
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2009
|
Invention
|
Process for preparing octafluorocyclohexadiene.
Disclosed herein is a process of preparing octaf... |
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|
Invention
|
Process for preparing decafluorocyclohexene.
Disclosed herein is a process of preparing decafluo... |
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|
Invention
|
Method and apparatus for preparing tungsten hexafluoride using a fluidized bed reactor.
Disclose... |
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2008
|
Invention
|
Dry-etching gas for semiconductor process.
The invention is a method for continuously preparing ... |
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2007
|
Invention
|
Method of preparing perfluoroalkadiene. Disclosed herein is a method of preparing a perfluoroalka... |
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2006
|
Invention
|
Dry-etching gas for semiconductor process and preparation method thereof. 8 in an amount of 99.99... |
|
|
Invention
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Method of charging low temperature liquified gas.
Disclosed is a method of charging a low temper... |
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2005
|
Invention
|
Catalyst for preparation of pentafluoroethane and preparation method thereof. 2 and HF, and then ... |
|
|
Invention
|
Method and apparatus for manufacturing nitrogen trifluoride. 3 by gas-liquid phase reaction of fl... |
|
|
Invention
|
Manufacturing method and apparatus of 4-fluoroethylene carbonate. 2 mixture gas to produce FEC, t... |
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2003
|
Invention
|
Method of producing difluoromethane. A method of producing difluoromethane (HFC-32), which includ... |
|
2000
|
Invention
|
Manufacturing method for perfluoroethane. A method for producing a high purity of perfluoroethane... |
|
1999
|
Invention
|
Manufacturing method for lithium hexafluoro phosphate. A method of preparing lithium hexafluoro p... |
|
1996
|
Invention
|
Method for concurrently producing 1,1,1,2-tetrafluoroethane and pentafluoroethane. There is a met... |
|
1995
|
Invention
|
Method for the preparation of difluoromethane. Applicable to industrial scale, the method is oper... |
