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2024
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Invention
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Inspection device and inspection method. The present invention inhibits position aberration betwe... |
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Invention
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Defect classification device. The present invention accurately classifies patterns of defects occ... |
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Invention
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Substrate holding device. Provided is a substrate holding device with which substrates of various... |
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Invention
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Appearance inspection device and appearance inspection method. Provided are an appearance inspect... |
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Invention
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Appearance inspection device and appearance inspection method. The present invention provides an ... |
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G/S
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Optical inspection apparatus for visually inspecting semiconductor wafers; Optical inspection app... |
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Invention
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Chip position measuring device. Provided is a chip position measuring device capable of accuratel... |
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Invention
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Substrate holding device. The present invention provides a substrate holding device capable of re... |
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Invention
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Image processing method. Provided is an image processing method for detecting, when performing im... |
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Invention
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Observation device, detection device, and observation method. There has been a case where, even i... |
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Invention
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Visual inspection method and visual inspection device. tiiii in neighboring fields of view. An im... |
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Invention
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Defect classification device and defect classification method. The present invention addresses th... |
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2023
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Invention
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Ring-type illumination device and inspection device. The present invention relates to a ring-type... |
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Invention
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Defect image processing device. The present invention uses a virtual defect to realistically repr... |
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Invention
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Defect image processing device. According to the present invention, an actual defect occurring in... |
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G/S
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Semiconductor manufacturing machines and systems. Measuring equipment; electric or magnetic meter... |
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G/S
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Semiconductor manufacturing machines and systems.
Measuring equipment; electric or magnetic meter... |
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G/S
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Optical inspection apparatus for analyzing defects on surfaces of wafers and printed circuits; op... |
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Invention
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Pattern matching method. This pattern matching method determines the pattern density of each of a... |
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Invention
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Image noise reduction method. The present invention relates to an image noise reduction method fo... |
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Invention
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Defect inspection device and defect inspection method. Provided is a defect inspection device mak... |
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Invention
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Automatic defect classification device. Provided is an automatic defect classification device tha... |
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Invention
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Defect classification device. The present invention accurately classifies defect patterns generat... |
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Invention
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Fluorescent inspection device. The objective of the present invention is to perform inspections w... |
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Invention
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Wafer inspection device. The present invention maintains the inspection accuracy of comparing an ... |
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2022
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Invention
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Wafer inspection device. The present invention provides a wafer inspection device that makes it p... |
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Invention
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Wafer external appearance inspecting device. The objective of the present invention is to reliabl... |
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Invention
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Automatic defect classifier. Provided is an automatic defect classifier that facilitates the corr... |
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Invention
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Autofocusing method for scanning electron microscope and image generating device. The present inv... |
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Invention
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Method of generating an image of a pattern on a workpiece.
The method includes: determining a re... |
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Invention
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Method for generating image of pattern on workpiece. The present method: determines a reference a... |
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2021
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Invention
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Substrate holding device. Provided is a substrate holding device with which the deflection of a s... |
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Invention
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Wafer holding device. The present invention provides a wafer holding device that, when holding a ... |
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Invention
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Visual inspection device. Provided is a visual inspection device capable of quickly performing a ... |
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Invention
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Chip tray, chip holding device, and visual inspection device. Provided are: a chip tray that enab... |
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Invention
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Appearance inspection device and method. Provided are an appearance inspection device and method ... |
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Invention
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Image generating method. The present invention relates to a method for generating an image of a w... |
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Invention
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Pattern measuring method.
The present invention relates to a method of automatically determining... |
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Invention
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Pattern measurement method. The present invention relates to a method for automatically determini... |
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Invention
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Pattern defect detection method.
This method includes: generating a backscattered-electron image... |
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Invention
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Pattern defect detection method. This method comprises: generating, by means of a scanning electr... |
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Invention
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Pattern matching method. The method includes: determine a first integrated value by integrating m... |
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Invention
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Pattern matching method. This method involves integrating measured values for the width of a refe... |
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Invention
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Scanning electron microscope. The present invention relates to a scanning electron microscope con... |
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Invention
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Scanning electron microscope. The present invention relates to a scanning electron microscope for... |
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2020
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Invention
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Pattern-edge detection method, pattern-edge detection apparatus, and storage medium storing progr... |
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Invention
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Pattern edge detecting method, pattern edge detecting device, and recording medium having program... |
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Invention
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Image generation method.
The image generation method includes: selecting a clip area (C1) in whi... |
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Invention
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Pattern matching method. The present invention relates to a method for matching a pattern formed ... |
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2019
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G/S
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Semiconductor manufacturing machines and systems Measuring instruments, namely, machine that meas... |
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Invention
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Image matching method and arithmetic system for performing image matching process.
The present i... |
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Invention
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Method and apparatus for generating a correction line indicating relationship between deviation o... |
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Invention
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Pattern edge detection method. The present invention relates to a pattern edge detection method a... |
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Invention
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Apparatus and method for measuring energy spectrum of backscattered electrons. The present invent... |
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Invention
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Autofocus method for a scanning electron microscope. The present invention relates to an autofocu... |
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2002
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G/S
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SEMICONDUCTOR TESTERS; ELECTRIC METERS FOR INSPECTING SEMICONDUCTOR AND FOR TESTING INTEGRATED CI... |
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G/S
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SEMICONDUCTOR TESTERS; ELECTRIC METERS FOR INSPECTING SEMICONDUCTORS AND FOR TESTING INTEGRATED C... |
