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2023
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Invention
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Silicon wafer tray and semiconductor process apparatus. Provided in the present disclosure are a ... |
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Invention
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Single crystal furnace and preparation method for monocrystalline silicon. A single crystal furna... |
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Invention
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Device and method for cleaning wafer. Disclosed in the embodiments of the present application are... |
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Invention
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Apparatus and method for calibrating position of silicon wafer relative to base, and epitaxial de... |
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Invention
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Monitoring device and method for epitaxial reaction chamber. The present disclosure relates to th... |
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Invention
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Method and apparatus for identifying wafer edge defect type, medium and wafer processing method. ... |
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Invention
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Method and apparatus for dynamically adjusting standby position of overhead crane, medium, and sy... |
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Invention
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Method and apparatus for controlling conveying of semiconductor material, and device, medium and ... |
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Invention
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Epitaxial wafer fabrication device, and epitaxial wafer fabrication method and apparatus. An epit... |
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2022
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Invention
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Crystal-bar manufacturing management method and crystal-bar manufacturing management system. Prov... |
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Invention
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Method and system for positioning center of v-type notch of wafer, and computer storage medium. A... |
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Invention
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Method and system for positioning center of v-shaped notch of wafer, and computer storage medium.... |
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Invention
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Silicon material processing apparatus, silicon ingot production equipment, and silicon material p... |
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Invention
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Silicon material processing apparatus, silicon rod production device, and silicon material proces... |
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Invention
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Apparatus and method for regulating hot zone for single crystal growth.
An apparatus for regulat... |
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Invention
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Thermal field adjusting device and method for single crystal growth. A thermal field adjusting de... |
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2021
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Invention
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Heater in hot-zone of single crystal pulling apparatus and single crystal pulling apparatus.
The... |
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Invention
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Hot zone heater of single crystal furnace, and single crystal furnace. Provided are a hot zone he... |
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Invention
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Cylinder assembly for improving region of defect-free growth of crystal ingot for single crystal ... |
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Invention
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Combined sleeve of single-crystal furnace, and single-crystal furnace. A combined sleeve of a sin... |
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Invention
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Assembly sleeve of single crystal pulling apparatus, and single crystal pulling apparatus. An ass... |
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Invention
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Combined sleeve of single crystal furnace and single crystal furnace. Disclosed are a combined sl... |
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Invention
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Single crystal pulling apparatus hot-zone structure, single crystal pulling apparatus and crystal... |
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Invention
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Thermal field structure for single crystal furnace, single crystal furnace, and crystal bar. A th... |
