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2024
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Invention
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Optical monitoring device and method for controlling coating thicknesses.
The disclosure relates... |
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Invention
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Photoresist composition, pattern forming method using near-field surface layer imaging, and depos... |
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2023
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Invention
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Off-axis illumination grating and preparation method therefor, and separable off-axis illuminatio... |
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Invention
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Thermal correction wafer bearing table, photolithography device, and high-order overlay error cor... |
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Invention
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Deformation correction device. A deformation correction device, comprising: a double-layer hinge ... |
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Invention
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Pre-alignment method for wafer having edge-damaged notch. Provided in the present disclosure is a... |
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Invention
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Detection method for shielded mask mark and correction method for mask position. The present disc... |
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Invention
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High-resolution contact hole pattern structure having improved feature size, and preparation meth... |
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Invention
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Multi-point flatness detection and leveling method and apparatus. The present disclosure provides... |
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Invention
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Transverse deformation regulation system. A transverse deformation regulation system, which can b... |
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Invention
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Resolution enhancement method in super-resolution lithography based on transient illumination. Th... |
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Invention
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Polymer material-based method for removing metal film layer from surface of substrate and photoli... |
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Invention
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Metasurface-based imaging system, design method, and detector. A metasurface-based imaging system... |
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2022
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Invention
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White light interference focus detection system and demodulation method. The present disclosure p... |
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Invention
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Mark-based alignment method. The present disclosure provides a template and substrate alignment m... |
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Invention
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Thermal control method for pattern forming apparatus. C1×C2D1×D2E1×E2C1×C2D1×D2E1×E2C1×C2C1×C2 of... |
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Invention
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Coaxial and off-axis compatible illumination device and illumination method. A coaxial and off-ax... |
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Invention
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Pixelization compensation method and apparatus for illumination uniformity. A pixelization compen... |
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Invention
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Dynamic carrier table and surface shape adjustment method. Provided in the present disclosure are... |
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Invention
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Piezoelectric ceramic driving array and surface shape adjusting method. Provided are a piezoelect... |
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Invention
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Illumination compensation method. An illumination compensation method, comprising: acquiring work... |
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Invention
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Template mark detection method and template position correction method based on single camera. Pr... |
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Invention
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Gap detection system and method, and focal plane correction method. A gap detection system, which... |
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Invention
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Single camera-based template mark detection method and single camera-based template position corr... |
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Invention
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Mask having function of improving proximity effect in electron beam lithography and preparation m... |
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Invention
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Metal nanostructure and ion beam etching processing therefor. 122; S4, repeating S2 and S3 until ... |
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Invention
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Illumination field non-uniformity detection system, detection method, correction method, and devi... |
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Invention
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Illumination field non-uniformity detection system and detection method, correction method, and d... |
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Invention
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Detection apparatus, detection method, machining device, and machining method. A detection appara... |
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Invention
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F-p sensor probe, absolute distance measurement device, and absolute distance measurement method.... |
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Invention
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F-p sensor probe, and absolute distance measuring device and method. An F-P sensor probe, and an ... |
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Invention
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Ultra-wide angle broadband polarization imaging system based on metasurface, and detection appara... |
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Invention
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Photolithography method. A photolithography method includes: sequentially preparing a functional ... |
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Invention
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Photoetching method. A photoetching method, comprising: sequentially preparing, on the surface of... |
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Invention
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Method and apparatus for quickly removing particles by using organic thin film. A method and appa... |
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Invention
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Photoresist composition and use thereof.
A photoresist composition is provided, including a chem... |
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Invention
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Alignment mark structure and forming method therefor. The present disclosure provides an alignmen... |
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Invention
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Super-resolution photoetching structure, manufacturing method, and pattern transfer method. Provi... |
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Invention
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Pixelation optical proximity correction method and system applied to super-resolution photolithog... |
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Invention
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Photoresist composition and use thereof. The present disclosure provides a photoresist compositio... |
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Invention
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Near-field lithography immersion system, immersion unit and interface module thereof. Provided is... |
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Invention
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High-order rotational symmetry unit-based nonlinear geometric phase metasurface.
The present dis... |
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Invention
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High-order rotational symmetry unit-based nonlinear geometric phase metasurface. The present disc... |
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2021
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Invention
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Method for inverse optical proximity correction of super-resolution lithography based on level se... |
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Invention
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Level set algorithm based reverse optical proximity effect correction method for super-resolution... |
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Invention
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Method for preparing super-resolution lens based on metal-dielectric strip array, and using metho... |
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Invention
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Method for preparing super-resolution lens based on metal-dielectric strip array, and application... |
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Invention
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Mask topology optimization method and system for surface plasmon near-field photolithography. A m... |
