The Institute of Optics and Electronics, The Chinese Academy of Sciences

China

 
Total IP 98
Total IP Rank # 13,435
IP Activity Score 2.9/5.0    121
IP Activity Rank # 5,683

Patents

Trademarks

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Last Patent 2025 - High-resolution contact hole pat...
First Patent 2008 - Cavity ring-down apparatus and m...

Latest Inventions, Goods, Services

2024 Invention Optical monitoring device and method for controlling coating thicknesses. The disclosure relates...
Invention Photoresist composition, pattern forming method using near-field surface layer imaging, and depos...
2023 Invention High-resolution contact hole pattern structure having improved feature size, and preparation meth...
Invention Multi-point flatness detection and leveling method and apparatus. The present disclosure provides...
Invention Resolution enhancement method in super-resolution lithography based on transient illumination. Th...
Invention Polymer material-based method for removing metal film layer from surface of substrate and photoli...
Invention Metasurface-based imaging system, design method, and detector. A metasurface-based imaging system...
2022 Invention White light interference focus detection system and demodulation method. The present disclosure p...
Invention Mark-based alignment method. The present disclosure provides a template and substrate alignment m...
Invention Thermal control method for pattern forming apparatus. C1×C2D1×D2E1×E2C1×C2D1×D2E1×E2C1×C2C1×C2 of...
Invention Coaxial and off-axis compatible illumination device and illumination method. A coaxial and off-ax...
Invention Pixelization compensation method and apparatus for illumination uniformity. A pixelization compen...
Invention Dynamic carrier table and surface shape adjustment method. Provided in the present disclosure are...
Invention Piezoelectric ceramic driving array and surface shape adjusting method. Provided are a piezoelect...
Invention Illumination compensation method. An illumination compensation method, comprising: acquiring work...
Invention Template mark detection method and template position correction method based on single camera. Pr...
Invention Gap detection system and method, and focal plane correction method. A gap detection system, which...
Invention Single camera-based template mark detection method and single camera-based template position corr...
Invention Mask having function of improving proximity effect in electron beam lithography and preparation m...
Invention Metal nanostructure and ion beam etching processing therefor. 122; S4, repeating S2 and S3 until ...
Invention Illumination field non-uniformity detection system, detection method, correction method, and devi...
Invention Illumination field non-uniformity detection system and detection method, correction method, and d...
Invention Detection apparatus, detection method, machining device, and machining method. A detection appara...
Invention F-p sensor probe, absolute distance measurement device, and absolute distance measurement method....
Invention F-p sensor probe, and absolute distance measuring device and method. An F-P sensor probe, and an ...
Invention Ultra-wide angle broadband polarization imaging system based on metasurface, and detection appara...
Invention Photolithography method. A photolithography method includes: sequentially preparing a functional ...
Invention Photoetching method. A photoetching method, comprising: sequentially preparing, on the surface of...
Invention Method and apparatus for quickly removing particles by using organic thin film. A method and appa...
Invention Photoresist composition and use thereof. A photoresist composition is provided, including a chem...
Invention Alignment mark structure and forming method therefor. The present disclosure provides an alignmen...
Invention Super-resolution photoetching structure, manufacturing method, and pattern transfer method. Provi...
Invention Pixelation optical proximity correction method and system applied to super-resolution photolithog...
Invention Photoresist composition and use thereof. The present disclosure provides a photoresist compositio...
Invention Near-field lithography immersion system, immersion unit and interface module thereof. Provided is...
Invention Near-field photolithography immersion system, and immersion unit and interface modules thereof. A...
Invention High-order rotational symmetry unit-based nonlinear geometric phase metasurface. The present disc...
2021 Invention Method for inverse optical proximity correction of super-resolution lithography based on level se...
Invention Level set algorithm based reverse optical proximity effect correction method for super-resolution...
Invention Method for preparing super-resolution lens based on metal-dielectric strip array, and using metho...
Invention Method for preparing super-resolution lens based on metal-dielectric strip array, and application...
Invention Raman spectrum-based particle detection and analysis system and method. A Raman spectrum-based pa...
Invention Mask topology optimization method and system for surface plasmon near-field photolithography. A m...
Invention Mask topology optimization method and system for surface plasmon near-field photolithography. The...
Invention Method for etching curved substrate. A method for etching a curved substrate is provided, includi...
Invention Method of fabricating micro-nano structure. Provided is a method of fabricating a micro-nano stru...
Invention Intelligent correction device control system for super-resolution lithography precision mask. Pro...
Invention Multifunctional lithography device. Provided is a multifunctional lithography device, including: ...