|
2024
|
Invention
|
Optical monitoring device and method for controlling coating thicknesses.
The disclosure relates... |
|
|
Invention
|
Photoresist composition, pattern forming method using near-field surface layer imaging, and depos... |
|
2023
|
Invention
|
High-resolution contact hole pattern structure having improved feature size, and preparation meth... |
|
|
Invention
|
Multi-point flatness detection and leveling method and apparatus. The present disclosure provides... |
|
|
Invention
|
Resolution enhancement method in super-resolution lithography based on transient illumination. Th... |
|
|
Invention
|
Polymer material-based method for removing metal film layer from surface of substrate and photoli... |
|
|
Invention
|
Metasurface-based imaging system, design method, and detector. A metasurface-based imaging system... |
|
2022
|
Invention
|
White light interference focus detection system and demodulation method. The present disclosure p... |
|
|
Invention
|
Mark-based alignment method. The present disclosure provides a template and substrate alignment m... |
|
|
Invention
|
Thermal control method for pattern forming apparatus. C1×C2D1×D2E1×E2C1×C2D1×D2E1×E2C1×C2C1×C2 of... |
|
|
Invention
|
Coaxial and off-axis compatible illumination device and illumination method. A coaxial and off-ax... |
|
|
Invention
|
Pixelization compensation method and apparatus for illumination uniformity. A pixelization compen... |
|
|
Invention
|
Dynamic carrier table and surface shape adjustment method. Provided in the present disclosure are... |
|
|
Invention
|
Piezoelectric ceramic driving array and surface shape adjusting method. Provided are a piezoelect... |
|
|
Invention
|
Illumination compensation method. An illumination compensation method, comprising: acquiring work... |
|
|
Invention
|
Template mark detection method and template position correction method based on single camera. Pr... |
|
|
Invention
|
Gap detection system and method, and focal plane correction method. A gap detection system, which... |
|
|
Invention
|
Single camera-based template mark detection method and single camera-based template position corr... |
|
|
Invention
|
Mask having function of improving proximity effect in electron beam lithography and preparation m... |
|
|
Invention
|
Metal nanostructure and ion beam etching processing therefor. 122; S4, repeating S2 and S3 until ... |
|
|
Invention
|
Illumination field non-uniformity detection system, detection method, correction method, and devi... |
|
|
Invention
|
Illumination field non-uniformity detection system and detection method, correction method, and d... |
|
|
Invention
|
Detection apparatus, detection method, machining device, and machining method. A detection appara... |
|
|
Invention
|
F-p sensor probe, absolute distance measurement device, and absolute distance measurement method.... |
|
|
Invention
|
F-p sensor probe, and absolute distance measuring device and method. An F-P sensor probe, and an ... |
|
|
Invention
|
Ultra-wide angle broadband polarization imaging system based on metasurface, and detection appara... |
|
|
Invention
|
Photolithography method. A photolithography method includes: sequentially preparing a functional ... |
|
|
Invention
|
Photoetching method. A photoetching method, comprising: sequentially preparing, on the surface of... |
|
|
Invention
|
Method and apparatus for quickly removing particles by using organic thin film. A method and appa... |
|
|
Invention
|
Photoresist composition and use thereof.
A photoresist composition is provided, including a chem... |
|
|
Invention
|
Alignment mark structure and forming method therefor. The present disclosure provides an alignmen... |
|
|
Invention
|
Super-resolution photoetching structure, manufacturing method, and pattern transfer method. Provi... |
|
|
Invention
|
Pixelation optical proximity correction method and system applied to super-resolution photolithog... |
|
|
Invention
|
Photoresist composition and use thereof. The present disclosure provides a photoresist compositio... |
|
|
Invention
|
Near-field lithography immersion system, immersion unit and interface module thereof. Provided is... |
|
|
Invention
|
Near-field photolithography immersion system, and immersion unit and interface modules thereof. A... |
|
|
Invention
|
High-order rotational symmetry unit-based nonlinear geometric phase metasurface. The present disc... |
|
2021
|
Invention
|
Method for inverse optical proximity correction of super-resolution lithography based on level se... |
|
|
Invention
|
Level set algorithm based reverse optical proximity effect correction method for super-resolution... |
|
|
Invention
|
Method for preparing super-resolution lens based on metal-dielectric strip array, and using metho... |
|
|
Invention
|
Method for preparing super-resolution lens based on metal-dielectric strip array, and application... |
|
|
Invention
|
Raman spectrum-based particle detection and analysis system and method. A Raman spectrum-based pa... |
|
|
Invention
|
Mask topology optimization method and system for surface plasmon near-field photolithography. A m... |
|
|
Invention
|
Mask topology optimization method and system for surface plasmon near-field photolithography. The... |
|
|
Invention
|
Method for etching curved substrate. A method for etching a curved substrate is provided, includi... |
|
|
Invention
|
Method of fabricating micro-nano structure. Provided is a method of fabricating a micro-nano stru... |
|
|
Invention
|
Intelligent correction device control system for super-resolution lithography precision mask. Pro... |
|
|
Invention
|
Multifunctional lithography device. Provided is a multifunctional lithography device, including: ... |
