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2026
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Invention
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Defect inspection apparatus and defect inspection method.
A defect inspection apparatus accordin... |
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Invention
|
Light source apparatus.
A light source apparatus capable of reducing deformation of a target hol... |
|
|
Invention
|
Image processing apparatus and image processing method.
An image processing apparatus and an ima... |
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2025
|
Invention
|
Information processing apparatus, inspection apparatus, information processing method, inspection... |
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Invention
|
Information processing apparatus, information processing method, and learning method.
The inform... |
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Invention
|
Defect classification method, analysis method, and inspection apparatus.
A defect classification... |
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|
Invention
|
Control apparatus and control method.
To provide a control apparatus and a control method that e... |
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Invention
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Image processing method, image processing apparatus, and learning method.
An image processing me... |
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Invention
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Inspection device and inspection method. An inspection device according to the present embodiment... |
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Invention
|
Optical apparatus and method for controlling optical apparatus.
An optical apparatus or the like... |
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Invention
|
Optical apparatus, inspection apparatus, image-capturing method, and non-transitory computer read... |
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|
Invention
|
Optical apparatus and control method of the same.
A light source emits illumination light. An ob... |
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Invention
|
Image processing apparatus, inspection apparatus, image processing method, and non-transitory com... |
|
|
Invention
|
Light source apparatus.
A light source apparatus according to the present embodiment includes: a... |
|
|
Invention
|
Control apparatus and light source apparatus.
A control apparatus for an optical apparatus inclu... |
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Invention
|
Optical device. The present disclosure provides an optical device that, in addition to being capa... |
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Invention
|
Light source apparatus and method for controlling light source apparatus.
A light source apparat... |
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Invention
|
Light source apparatus.
A light source apparatus according to the present disclosure includes a ... |
|
|
Invention
|
Light source apparatus.
A light source apparatus according to the present disclosure includes: a... |
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|
Invention
|
Optical apparatus and control method of optical apparatus.
An inspection apparatus according to ... |
|
|
Invention
|
Wavelength conversion apparatus and wavelength conversion method.
A wavelength conversion appara... |
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Invention
|
Image processing device and image processing method. This image processing device (2) according t... |
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Invention
|
Inspection apparatus and inspection method.
An inspection apparatus according to the present dis... |
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2024
|
Invention
|
Image processing device, optical apparatus, image processing method, and method of using optical ... |
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|
Invention
|
Image processing apparatus, inspection apparatus, review apparatus, image processing method, insp... |
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|
Invention
|
Optical apparatus and control method of optical apparatus.
An optical apparatus according to the... |
|
|
Invention
|
Light source apparatus and optical apparatus.
A light source apparatus according to the present ... |
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|
Invention
|
Image processing apparatus, inspection apparatus, image processing method, and inspection method.... |
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|
Invention
|
Light source apparatus, inspection apparatus, exposure apparatus, light source control method, in... |
|
|
Invention
|
Inspection apparatus and inspection method.
An inspection apparatus according to an embodiment i... |
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Invention
|
Photodetector.
Resolution is improved in a required direction while maintaining contrast in insp... |
|
|
Invention
|
Optical apparatus and method of preventing contamination of optical apparatus.
To provide an opt... |
|
|
Invention
|
Light source apparatus.
A light source apparatus according to an embodiment includes: a target m... |
|
|
Invention
|
Light source device, illumination method, and method for manufacturing light source device. A lig... |
|
|
Invention
|
Defect inspection apparatus and defect inspection method. A defect inspection apparatus according... |
|
|
Invention
|
Illumination apparatus and illumination method. Provided are an illumination apparatus and an ill... |
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|
Invention
|
Position detection apparatus, position detection method, and non-transitory computer-readable med... |
|
|
Invention
|
Optical apparatus and focus correction method. An optical apparatus according to the present embo... |
|
|
G/S
|
Optical inspection apparatus for semi-conductor materials and elements; semiconductor photomask p... |
|
|
G/S
|
Measuring apparatus; inspection apparatus for semi-conductor
materials and elements; semiconduct... |
|
2023
|
Invention
|
Light source device.
Provided is a light source device that makes it possible to suppress vibrat... |
|
|
Invention
|
Light source device. Provided is a light source device that makes it possible to suppress vibrati... |
|
|
Invention
|
Optical apparatus and examination apparatus. An optical apparatus and an examination apparatus th... |
|
|
Invention
|
Position detection apparatus, position detection method and non-transitory computer-readable med... |
|
|
G/S
|
Defect repairing machines for photomasks for semiconductors;
defect repairing machines for retic... |
|
|
Invention
|
Calculation method, image-capturing method, and image-capturing apparatus. A calculation method a... |
|
|
Invention
|
Calculation method, image-capturing method, and image-capturing apparatus. A calculation method, ... |
|
|
Invention
|
Light-source apparatus, inspection apparatus, and adjustment method. A light-source apparatus, an... |
|
2022
|
G/S
|
Optical inspection apparatus for semi-conductor materials and elements; semiconductor photomask o... |
|
|
G/S
|
Optical apparatus and instruments; measuring apparatus;
inspection apparatus for semi-conductor ... |
|
|
G/S
|
Defect repairing machines for photomasks for semiconductors; defect repairing machines for reticl... |
|
|
G/S
|
Measuring apparatus; inspection apparatus for semi-conductor
materials and elements; inspecting ... |
|
|
G/S
|
Optical inspection apparatus for semi-conductor materials and elements; Semiconductor photomask o... |
|
|
G/S
|
Optical inspection apparatus for semi-conductor materials and elements; semiconductor wafer optic... |
|
|
G/S
|
Optical inspection apparatus for semi-conductor materials and elements; confocal microscopes; sem... |
|
|
G/S
|
Semiconductor photomask optical inspection apparatus; semiconductor photomask imaging apparatus, ... |
|
|
G/S
|
Semiconductor photomask inspection apparatus; semiconductor
photomask imaging apparatus; semicon... |
|
|
Invention
|
Image processing apparatus and image processing method. An image processing apparatus according t... |
|
|
G/S
|
Semiconductor photomask optical inspection apparatus; semiconductor reticle optical inspection ap... |
|
|
G/S
|
Defect repair machines for photomasks for semiconductors; defect repair machines for reticles for... |
|
|
G/S
|
Semiconductor photomask inspection apparatus; semiconductor
reticle inspection apparatus; semico... |
|
|
G/S
|
Semiconductor photomask inspection apparatus; imaging
apparatus for inspection of semiconductor ... |
|
|
G/S
|
Defect repair machines for photomasks for semiconductors;
defect repair machines for reticles fo... |
|
|
G/S
|
Semiconductor photomask optical inspection apparatus; imaging apparatus, namely, optical imaging ... |
|
|
Invention
|
Light source apparatus and inspection apparatus. A decrease of an output of a wavelength converte... |
|
|
G/S
|
Semiconductor photomask blanks inspection apparatus; imaging
apparatus for inspection of semicon... |
|
|
G/S
|
Semiconductor wafer inspection apparatus; semiconductor
wafer edge inspection apparatus; inspect... |
|
|
G/S
|
Semiconductor wafer inspection apparatus; semiconductor
wafer measuring apparatus; inspection ap... |
|
|
G/S
|
Flat panel display photomask inspection apparatus; imaging
apparatus for inspection of flat pane... |
|
|
Invention
|
Euv mask inspection device, euv mask inspection method, non-transitory computer-readable medium s... |
|
2016
|
G/S
|
Confocal scanning microscopes; optical inspection apparatus for industrial use for inspection of ... |
|
2006
|
G/S
|
Confocal scanning microscopes; optical apparatus, namely
photomask and reticle inspection appara... |
|
2003
|
G/S
|
scanning laser microscopes, and optical apparatus, namely, photomask/reticle/inspection apparatus... |
