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2024
|
G/S
|
Downloadable software for aggregating and combining measurement parameters of semiconductor wafer... |
|
|
G/S
|
Software and framework for aggregating and combining
measurement parameters of semiconductor waf... |
|
|
G/S
|
Optical sensors; electronic devices and equipment for
measuring and characterising physical para... |
|
|
G/S
|
Optical sensors; electronic devices and equipment for measuring and characterising physical param... |
|
2023
|
Invention
|
Method and apparatus for measuring the thickness of a transparent layer on nanometer scale.
The ... |
|
2021
|
Invention
|
Method and device for the in-situ determination of the temperature of a sample.
The invention re... |
|
2016
|
G/S
|
Software to analyze and interpret in-situ and in-line
measurement parameters before, during and ... |
|
|
G/S
|
Software to analyze and interpret in-situ and in-line measurement parameters before, during and a... |
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2015
|
G/S
|
Optical sensors; electronic devices and plants assembled thereof for measuring physical parameter... |
|
|
G/S
|
Optical sensors; electronic devices and plants assembled
thereof for measuring physical paramete... |
|
2013
|
Invention
|
Apparatus and method for measuring the dimensions of 1-dimensional and 0-dimensional nanostructur... |
|
|
Invention
|
Flat light emitting plate for simulating thermal radiation, method for calibrating a pyrometer an... |
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2012
|
G/S
|
[Optical sensors; electronic devices and plants assembled thereof for measuring physical paramete... |
|
|
Invention
|
Method and apparatus for real-time determination of spherical and non-spherical curvature of a su... |
|
2010
|
Invention
|
Method and apparatus for real-time determination of curvature and azimuthal asymmetry of a surfac... |
|
|
Invention
|
Pyrometer adapted for detecting uv-radiation and use thereof. A pyrometer that is adapted for det... |
|
|
Invention
|
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wa... |
|
|
Invention
|
Method and apparatus for determining the layer thickness and the refractive index of a sample. Th... |
|
2006
|
G/S
|
Optical sensors for monitoring and controlling the layer growth during the manufacture of optoele... |
|
|
G/S
|
Optical sensors for measuring, monitoring and controlling
the layer growing during the manufactu... |
|
|
Invention
|
Device and method for the measurement of the curvature of a surface. The invention relates to a d... |
|
2003
|
Invention
|
Method and apparatus for the determination of characteristic layer parameters at high temperature... |
