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2024
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Invention
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System for treating an individual wafer manufactured from semiconductor material, and methods. Sy... |
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2023
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Invention
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An exhaust abatement apparatus and a method for abating reactive gasses. An exhaust abatement app... |
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G/S
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Machines for depositing a layer of silicon wafer in the semiconductor industry; industrial robots... |
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G/S
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Semiconductor manufacturing equipment being reactors for processing semiconductor wafers, namely,... |
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2021
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Invention
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Multi-chamber apparatus and method for ald.
An atomic layer deposition apparatus comprising a fi... |
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Invention
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Multi-chamber apparatus and method for ald. An atomic layer deposition apparatus comprising a fir... |
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2019
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Invention
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Substrate processing apparatus and to a method for processing substrates. sbbss). |
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2012
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Invention
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Floating substrate monitoring and control device, and method for the same. Disclosed is a process... |
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2011
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Invention
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Method and apparatus for contactlessly advancing substrates. A method of contactlessly advancing ... |
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Invention
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Dynamic fluid valve and method for establishing the same. A method, comprising: - providing a pro... |
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2010
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Invention
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Floating wafer track with lateral stabilization mechanism. An apparatus (100) comprising: - a pro... |
