|
2023
|
Invention
|
Adaptive focusing and transport system for electroplating. A system and method for plating a work... |
|
2021
|
Invention
|
Method for cleaning semiconductor devices.
A method of cleaning a conducting film containing tin... |
|
2019
|
Invention
|
Substrate support features and method of application. iii) adhering the feature to the chuck.
... |
|
|
Invention
|
Batch processing system with vacuum isolation. A vapor deposition system comprises a vacuum chamb... |
|
|
Invention
|
Electrochemical deposition systems. An electrochemical deposition system for depositing metal ont... |
|
2016
|
Invention
|
Workpiece holder for a wet processing system. Techniques herein provide a workpiece holder that c... |
|
|
Invention
|
Workpiece loader for a wet processing system. Techniques herein provide a workpiece handling and ... |
|
2015
|
G/S
|
Semiconductor manufacturing machines and their component parts and fittings; electroplating machi... |
|
|
G/S
|
Semiconductor manufacturing machines and their component
parts and fittings; electroplating mach... |
|
2014
|
Invention
|
Electrochemical deposition apparatus and methods for controlling the chemistry therein. An electr... |
|
|
Invention
|
Method for increasing adhesion of copper to polymeric surfaces. Techniques disclosed herein a met... |
|
2013
|
Invention
|
Electrochemical deposition apparatus with remote catholyte fluid management. Techniques disclosed... |
|
|
Invention
|
Apparatus for fluid processing a workpiece. A method of fluid processing a semiconductor workpiec... |
|
2012
|
Invention
|
Edge bevel removal apparatus and method. A substrate edge bevel etch module for etching a materia... |
|
|
Invention
|
Parallel single substrate processing system. A system for processing surfaces of substrates havin... |
|
|
Invention
|
Parallel single substrate processing system with alignment features on a process section frame. A... |
|
|
Invention
|
Parallel single substrate marangoni module. A substrate drying apparatus for drying a width of a ... |
|
|
Invention
|
Parallel single substrate processing system. A system for fluid processing substrate surfaces arr... |
|
|
Invention
|
Electro chemical deposition and replenishment apparatus. A process electrolyte replenishment modu... |
|
|
Invention
|
Electro chemical deposition and replenishment apparatus. An electrochemical deposition apparatus ... |
|
|
Invention
|
Substrate holder. A rotary chuck adapted to hold a substrate. The rotary chuck has a rotatable ch... |
|
2011
|
Invention
|
Substrate loader and unloader having a bernoulli support. A substrate chuck includes a frame form... |
|
|
Invention
|
Substrate loader and unloader having an air bearing support. A substrate separation chuck which i... |
|
|
Invention
|
Substrate loader and unloader. A substrate loader adapted to load and unload a substrate to and f... |
|
|
Invention
|
Method and apparatus for fluid processing a workpiece. A workpiece holder for fluid processing a ... |
|
2010
|
Invention
|
Method for fluid processing a workpiece. A method of fluid processing a semiconductor workpiece, ... |
|
|
Invention
|
Balancing pressure to improve a fluid seal. A method of fluid sealing a workpiece is provided. Th... |
|
|
Invention
|
Method and apparatus for fluid processing a workpiece. A method of fluid sealing a workpiece is p... |
|
|
Invention
|
Seed layer deposition in microscale features. A method and system for coating the interior surfac... |
|
|
Invention
|
Wetting a workpiece surface in a fluid-processing system. A method and apparatus for wetting the ... |
|
2007
|
Invention
|
Substrate processing pallet with cooling. A substrate processing pallet can cool a substrate. A s... |
|
2005
|
Invention
|
Balancing pressure to improve a fluid seal. A method and apparatus for fluid sealing a workpiece ... |
|
2004
|
Invention
|
Method and apparatus for fluid processing a workpiece. A method and apparatus for retaining a wor... |
