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2024
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Invention
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Spin-on carbon hard mask composition with high planarization performance and patterning method us... |
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Invention
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Molybdenum film etchant composition and etching method using same.
The present invention relates... |
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Invention
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Coating composition for preventing semiconductor pattern collapse, and pattern coated using same.... |
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Invention
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Coating composition for reinforcing pcb substrate glass, and pcb substrate glass manufactured by ... |
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2023
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Invention
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Cutting oil composition. The present invention relates to a cutting oil composition used in a wir... |
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Invention
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Rinse solution composition for extreme ultraviolet photolithography and pattern formation method ... |
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Invention
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Cmp slurry composition for polishing copper barrier layer. The present invention relates to a slu... |
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2020
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Invention
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Etching composition for silicon nitride film. The present invention relates to an etching composi... |
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Invention
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Method for forming silicon or silicon compound pattern in semiconductor manufacturing process. Di... |
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2019
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Invention
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Process liquid for extreme ultraviolet lithography and pattern forming method using same. Propose... |
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Invention
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Process solution composition for extreme ultraviolet lithography, and method for forming pattern ... |
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Invention
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Etching method for forming micro silicon pattern in semiconductor manufacturing process. A proces... |
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Invention
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Developer composition, for euv light source, for forming photosensitive photoresist micropattern.... |
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2018
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Invention
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Cutting oil composition. Disclosed is a cutting oil composition, which is vastly superior in view... |
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Invention
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Euv developer composition for forming photosensitive photoresist micropattern. An extreme ultravi... |
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Invention
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Composition for performing cleaning after chemical/ mechanical polishing. Disclosed is a post-che... |
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2017
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Invention
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High etch resistance spin-on carbon hard mask composition and patterning method using same. Provi... |
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Invention
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Photoresist pattern shrinking composition and pattern shrinking method. Provided is a composition... |
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Invention
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Method and composition for improving lwr in patterning step using negative tone photoresist. The ... |
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Invention
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Chemically-amplified-type negative-type photoresist composition. The present invention relates to... |
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Invention
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Negative photoresist composition for krf laser, having high resolution and high aspect ratio. Dis... |
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Invention
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Anti-reflection coating composition and anti-reflection film utilizing same. The present inventio... |
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2016
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Invention
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Slurry composition for cmp and polishing method using same. Provided are a slurry composition for... |
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Invention
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I-line negative type photoresist composition having excellent etching resistance. This invention ... |
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Invention
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Negative photoresist composition for krf laser for forming semiconductor patterns. Provided is a ... |
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Invention
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Cleaning composition for photolithography and method of forming photoresist pattern using the sam... |
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2013
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Invention
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Coating composition for preventing collapse of capacitor. Disclosed herein is a coating compositi... |
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2005
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Invention
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Photoresist coating composition and method for forming fine pattern using the same. A photoresist... |
