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2024
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G/S
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Weighing and measuring apparatus for use in the
semiconductor manufacturing industry. |
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Invention
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Apparatus for measuring the mass and/or the change in mass of an object. Apparatus for measuring ... |
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Invention
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Metrology apparatus. The invention provides a metrology apparatus. The metrology apparatus compri... |
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Invention
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Apparatus for measuring the mass and/or the change in mass of an object. An apparatus for measuri... |
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2023
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Invention
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Apparatus for measuring the weight or mass of an object. An apparatus for measuring the weight or... |
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Invention
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Device and wafer mass metrology apparatus. Device comprising: a surface for supporting a wafer; a... |
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Invention
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Support for a weighing device. A support for a weighing device, the support comprising : a suppor... |
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Invention
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Weighing device for a semiconductor wafer. An apparatus comprising: a measurement chamber, wherei... |
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Invention
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Weighing device. A weighing device for performing a weight measurement on a semiconductor wafer h... |
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2022
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Invention
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Device for changing the temperature of a wafer.
A device for changing the temperature of a wafer... |
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Invention
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Device for changing the temperature of a wafer. A device for changing the temperature of a wafer,... |
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Invention
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Apparatus comprising a weighing device.
An apparatus comprising: a weighing device for generatin... |
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Invention
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Apparatus comprising a weighing device. An apparatus comprising: a weighing device for generating... |
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2021
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Invention
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Method of using sensor-based machine learning to compensate error in mass metrology. Computer-imp... |
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2019
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Invention
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Method and apparatus for controlling the temperature of a semiconductor wafer.
A semiconductor w... |
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Invention
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Method and apparatus for controlling the temperature of a semiconductor wafer. A semiconductor wa... |
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Invention
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Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology method.
A se... |
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Invention
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Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology method. A sem... |
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2016
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G/S
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Semiconductor measurement machines; semiconductor substrate
measuring machines; semiconductor wa... |
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Invention
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Measurement apparatus and method. A method and apparatus for extracting the contents of voids and... |
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G/S
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Machines for manufacturing semiconductors; machines for the production for semiconductors; semico... |
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2015
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Invention
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Semiconductor wafer weighing apparatus and methods.
A semiconductor wafer weighing apparatus com... |
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Invention
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Semiconductor wafer weighing apparatus and methods. A semiconductor wafer weighing apparatus comp... |
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2014
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Invention
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Semiconductor wafer processing methods and apparatus. A semiconductor wafer processing method com... |
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Invention
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Method and device for determining information relating to the mass of a semiconductor wafer. A me... |
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Invention
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Semiconductor wafer metrology apparatus and method. A semiconductor wafer metrology technique whi... |
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2013
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G/S
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Measuring apparatus for measuring semiconductor wafer mass and mass changes occurring in the semi... |
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2012
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Invention
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Method of controlling semiconductor device fabrication. A semiconductor wafer fabrication metrolo... |
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Invention
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Semiconductor wafer weight metrology apparatus. A semiconductor wafer metrology technique compris... |
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Invention
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Measurement apparatus and method. A method and apparatus for extracting the contents (39) of void... |
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2011
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Invention
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Measuring apparatus. Measuring apparatus for monitoring the position of the center of mass of a s... |
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2009
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Invention
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Semiconductor wafer monitoring apparatus and method. Metrology methods and apparatus for semicond... |
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2008
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Invention
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Semiconductor wafer metrology apparatus and method. A semiconductor wafer metrology technique com... |
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Invention
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Measuring apparatus. Measuring apparatus and method for monitoring fabrication of a semiconductor... |
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2005
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Invention
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Apparatus and method for investigating parameters of layers deposited on semiconductor wafers. In... |
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2003
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Invention
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Apparatus and method for investigating semiconductors wafer. In order to determine the dielectric... |
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2001
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Invention
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Apparatus and method for investigating semiconductor wafers. In order to determine the dielectric... |
