|
2018
|
Invention
|
System and methods of mold/substrate separation for imprint lithography.
A nanoimprint system an... |
|
|
Invention
|
Imprint lithography system and method for manufacturing.
A nanoimprint lithography system and me... |
|
2017
|
Invention
|
Electronic detectors inside nanofluidic channels for detection, analysis, and manipulation of mol... |
|
2014
|
Invention
|
Fast nanoimprinting methods using deformable mold. Methods for nanoimprint lithography using a de... |
|
|
Invention
|
System and methods of mold/substrate separation for imprint lithography. A nanoimprint system and... |
|
|
Invention
|
Mold and substrate separation for imprint lithography. A nanoimprint system and methods for separ... |
|
|
Invention
|
Imprint lithography system and method for manufacturing. A nanoimprint lithography system and met... |
|
2013
|
Invention
|
System and methods for nano-scale manufacturing.
A system and method for patterning a substrate ... |
|
2011
|
Invention
|
method and apparatus to apply surface release coating for imprint mold.
A surface coating appar... |
|
|
Invention
|
Fast nanoimprinting apparatus using deformale mold. The invention disclosed apparatuses and metho... |
|
2010
|
Invention
|
Methods and apparatus for rapid imprint lithography. A mold for imprinting a patterned region by ... |
|
|
Invention
|
Nanogap electronic detector for measuring properties of a biomolecule stretched in a nanochannel,... |
|
2007
|
Invention
|
Imprint lithography with improved substrate/mold separation. In imprint lithography, a mold (300)... |
|
|
Invention
|
Method and apparatus to apply surface release coating for imprint mold. In imprint lithography, t... |
|
|
Invention
|
Die imprint by double side force-balanced press for step-and-repeat imprint lithography. In accor... |
|
2005
|
G/S
|
Nanoimprint lithography machines |
|
2004
|
Invention
|
Apparatus for fluid pressure imprint lithography. Improved apparatus for imprint lithography invo... |
|
|
Invention
|
Apparatus for double-sided imprint lithography. Apparatus for double-sided imprint lithography of... |
|
|
G/S
|
Nanoimprint Lithography Machines And Resists and Masks For Use Therewith For Producing Nanoscale ... |
|
2002
|
Invention
|
Fluid pressure bonding. An improved method of bonding involves using direct fluid pressure to pre... |
|
2000
|
Invention
|
Fluid pressure imprint lithography. An improved method of imprint lithography involves using dire... |
