|
2024
|
Invention
|
Blank mask and method of fabricating the same.
Provided is a blank mask, including an optical su... |
|
|
Invention
|
Blank mask and method of fabricating the same.
Provided is a method of fabricating a blank mask,... |
|
|
Invention
|
Blank mask and photomask using the same. A blank mask including a transparent substrate, a phase ... |
|
|
Invention
|
Blank mask and method of fabricating the same.
A method of fabricating a blank mask, the method ... |
|
|
Invention
|
Blank mask and method of fabricating the same.
A method of fabricating a blank mask. The method ... |
|
|
Invention
|
Apparatus for fabricating blank mask and method of fabricating the same.
Disclosed is an apparat... |
|
2023
|
Invention
|
Blank mask and photomask using the same.
A blank mask includes a light transmissive substrate an... |
|
|
Invention
|
Blank mask and photomask using the same.
A blank mask includes a light transmissive substrate, a... |
|
|
Invention
|
Shadow mask and method of manufacturing blank mask using the same.
A shadow mask includes a mask... |
|
|
Invention
|
Photomask for extreme ultraviolet.
An extreme ultraviolet photomask includes a conductive layer;... |
|
2022
|
Invention
|
Blank mask and photomask using the same.
A blank mask includes a transparent substrate and a lig... |
|
|
Invention
|
Method and apparatus for forming a blank mask and a layer for a blank mask.
A method and apparat... |
|
|
Invention
|
Blank mask and photomask using the same.
A blank mask includes a light-transmitting substrate; a... |
|
|
Invention
|
Method of preparing laminate and laminate for optical use.
The method of preparing a laminate in... |
|
|
Invention
|
Laminate for blank mask and manufacturing method for the same. 2, or any combination thereof. A s... |
|
|
Invention
|
Blank mask and photomask using the same.
The blank mask according to one embodiment of the prese... |
|
|
Invention
|
Method and apparatus for manufacturing a photomask from a blank mask. 2 or less. |
|
|
Invention
|
Blank mask and photomask using the same.
A blank mask including a transparent substrate and a li... |
|
|
Invention
|
Blank mask and photomask using the same. A blank mask including a transparent substrate and a lig... |
|
|
Invention
|
Method of cleaning substrate for blank mask, substrate for blank mask, and blank mask including t... |
|
|
Invention
|
Blank mask and photomask using the same. Disclosed is a blank mask including a transparent substr... |
|
|
Invention
|
Blank mask and photomask using the same.
A blank mask including: a transparent substrate and a l... |
|
|
Invention
|
Blank mask and photomask using the same. 1 [Equation 1]
1 value is an etching rate of the firs... |
|
|
Invention
|
Photomask blank, photomask, and manufacturing method of semiconductor element.
A photomask blank... |
|
|
Invention
|
Blank mask and photomask using the same. where, in the Equation 1, |Rsk| is an absolute value of ... |
|
|
Invention
|
Photomask blank and photomask using the same. 2O.
|
|
|
Invention
|
Blank mask and photomask using the same. The present disclosure relates to a blank mask and the l... |
