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2021
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Invention
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Manufacture method of a high-resistivity silicon handle wafer for enabling a formation of a hybri... |
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2020
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Invention
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Manufacture method of a high-resistivity silicon handle wafer for a hybrid substrate structure. T... |
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2014
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Invention
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High-resistive silicon substrate with a reduced radio frequency loss for a radio-frequency integr... |
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2012
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Invention
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Method for depositing one or more polycrystalline silicon layers on substrate. c) on a substrate ... |
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Invention
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Method for depositing one or more polycrystalline silicon layers on substrate. The invention rela... |
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Invention
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Crystal manufacturing. An implementation of a Czochralski-type crystal growth has been shown and ... |
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2011
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Invention
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Thinning method and silicon wafer based structure.
A method for thinning a wafer layer to a pred... |
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2006
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Invention
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Thinning op a si wafer for mems-sensors applications. A method for thinning a wafer layer to a pr... |
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Invention
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Gettering method and a wafer using the same. It is shown in the invention a method for manufactur... |
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2005
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Invention
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Cvd doped structures. A CVD growing process of dopant doped silicon layers comprising epitaxial s... |
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Invention
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Thinning.
A method for thinning a wafer layer to a predetermined thickness comprises two phases ... |
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2004
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Invention
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Cvd doped structures. A new clean CVD growing process of dopant doped silicon layers comprising e... |
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2003
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Invention
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Lightly doped silicon carbide wafer and use thereof in high power devices. The first object of th... |
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2002
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Invention
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High resistivity silicon carbide single crystal and method of producing it. The purpose of the in... |
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1997
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Invention
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Adhesive agent for adhering an object to its base. The invention relates to an adhesive agent for... |
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1993
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Invention
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Method for cleaning semiconductor products. The invention relates to a method for cleaning a semi... |
