A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
B24D 11/00 - Caractéristiques de construction des matériaux abrasifs flexibles; Caractéristiques particulières de la fabrication de ces matériaux
B24D 13/14 - Meules dont le corps comporte des parties flexibles au travail, p.ex. meules souples de polissage; Accessoires pour le montage de ces meules travaillant par leur face frontale
B24B 37/22 - Tampons de rodage pour travailler les surfaces planes caractérisés par une structure multicouche
B24B 37/24 - Tampons de rodage pour travailler les surfaces planes caractérisés par la composition ou les propriétés des matériaux du tampon
B24B 37/20 - Tampons de rodage pour travailler les surfaces planes
B29C 41/04 - Coulée par rotation ou par centrifugation, c. à d. revêtement de la surface interne d'un moule par rotation du moule
2.
Method and systems to control optical transmissivity of a polish pad material
A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
B24B 49/12 - Appareillage de mesure ou de calibrage pour la commande du mouvement d'avance de l'outil de meulage ou de la pièce à meuler; Agencements de l'appareillage d'indication ou de mesure, p.ex. pour indiquer le début de l'opération de meulage impliquant des dispositifs optiques
B24D 13/14 - Meules dont le corps comporte des parties flexibles au travail, p.ex. meules souples de polissage; Accessoires pour le montage de ces meules travaillant par leur face frontale
B24D 11/00 - Caractéristiques de construction des matériaux abrasifs flexibles; Caractéristiques particulières de la fabrication de ces matériaux
A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.
B24B 37/22 - Tampons de rodage pour travailler les surfaces planes caractérisés par une structure multicouche
B24D 3/28 - Propriétés physiques des corps ou feuilles abrasives, p.ex. surfaces abrasives de nature particulière; Corps ou feuilles abrasives caractérisés par leurs constituants les constituants étant utilisés comme agglomérants et étant essentiellement organiques en résines
B29C 41/04 - Coulée par rotation ou par centrifugation, c. à d. revêtement de la surface interne d'un moule par rotation du moule
4.
METHOD AND SYSTEMS TO CONTROL OPTICAL TRANSMISSIVITY OF A POLISH PAD MATERIAL
A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
B24B 29/02 - Machines ou dispositifs pour polir des surfaces de pièces au moyen d'outils en matière souple ou flexible avec ou sans application de produits de polissage solides ou liquides conçus pour pièces particulières
5.
Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads
A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.
B24B 37/22 - Tampons de rodage pour travailler les surfaces planes caractérisés par une structure multicouche
B24B 37/26 - Tampons de rodage pour travailler les surfaces planes caractérisés par la forme ou le profil de la surface du tampon de rodage, p.ex. rainurée
B24D 11/00 - Caractéristiques de construction des matériaux abrasifs flexibles; Caractéristiques particulières de la fabrication de ces matériaux
B29C 41/04 - Coulée par rotation ou par centrifugation, c. à d. revêtement de la surface interne d'un moule par rotation du moule
B24D 18/00 - Fabrication d'outils pour meuler, p.ex. roues, non prévue ailleurs
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitement; Appareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
6.
METHODS AND SYSTEMS FOR CENTRIFUGAL CASTING OF POLYMER POLISH PADS AND POLISHING PADS MADE BY THE METHODS
A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer precursor. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer precursor has cured. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and curing sequentially at least two different polymer precursors. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.
B24D 11/00 - Caractéristiques de construction des matériaux abrasifs flexibles; Caractéristiques particulières de la fabrication de ces matériaux
B24D 13/02 - Meules dont le corps comporte des parties flexibles au travail, p.ex. meules souples de polissage; Accessoires pour le montage de ces meules travaillant par leur périphérie
7.
Methods and systems for centrifugal casting of polymer polish pads and polishing pads made by the methods
A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer mixture. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has gelled. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymer mixtures. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.
B24B 37/24 - Tampons de rodage pour travailler les surfaces planes caractérisés par la composition ou les propriétés des matériaux du tampon
B24B 37/26 - Tampons de rodage pour travailler les surfaces planes caractérisés par la forme ou le profil de la surface du tampon de rodage, p.ex. rainurée
B24D 18/00 - Fabrication d'outils pour meuler, p.ex. roues, non prévue ailleurs
B24D 11/00 - Caractéristiques de construction des matériaux abrasifs flexibles; Caractéristiques particulières de la fabrication de ces matériaux
B29C 41/04 - Coulée par rotation ou par centrifugation, c. à d. revêtement de la surface interne d'un moule par rotation du moule
One aspect of the present invention includes an apparatus for scrubbing substrates such as a roller scrubber. According to one embodiment, the apparatus comprises a scrubbing medium having an axial bore and a mandrel having a section disposed through the axial bore of the scrubbing medium. The mandrel is configured so that it exerts an adjustable axial compression on the scrubbing medium. According to another embodiment, the apparatus comprises a roller scrubber. The roller scrubber comprises a scrubbing medium comprising a plurality of discrete disks having a center hole. The disks are disposed side by side so that the center holes form an axial bore in the scrubbing medium. The combined outer edges of the plurality of disks form a scrubbing surface of the roller scrubber.
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