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2018
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Invention
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Method and systems to control optical transmissivity of a polish pad material. A method and syste... |
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2015
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Invention
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Centrifugal casting of polymer polish pads. A method for making a multilayer polishing pad includ... |
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2014
|
Invention
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Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads. A m... |
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2013
|
Invention
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Methods and systems for centrifugal casting of polymer polish pads and polishing pads made by the... |
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2011
|
Invention
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Apparatuses and methods for scrubbing substrates.
One aspect of the present invention includes a... |
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Invention
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Apparatuses and methods for scrubbing substrates. One aspect of the present invention includes an... |
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2004
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Invention
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Stacked pad and method of use. The following is a description of a stacked pad (15) for chemical ... |
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2003
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Invention
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Conditioner and conditioning methods for smooth pads. Pad conditioners (15) and methods of condit... |
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Invention
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Smooth pads for cmp and polishing substrates. Pads and methods of making the pads for application... |
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2002
|
Invention
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Pads for cmp and polishing substrates. Pads and methods of making the pads for applications such ... |
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Invention
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Polishing pads and manufacturing methods. Disclosed is a method of manufacturing polymer material... |
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|
Invention
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Methods and apparatus for polishing and planarization. A pad (15) for processing substrates (17) ... |
