A reaction by-product collection apparatus is provided. The reaction by-product collection apparatus according to one aspect of the present invention collects powder from exhaust gas, which is a reaction by-product of a semiconductor process, and comprises: a powder collection unit for precipitating the powder from the exhaust gas and separating out and eliminating the precipitated powder; a powder transfer unit which is provided below the powder collection unit, and which transfers the powder separated out by the powder collection unit; and a powder collection unit which is detachably connected to the powder transfer unit, and which collects and stores the powder transferred by the powder transfer unit.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
B01D 45/14 - Séparation de particules dispersées dans des gaz ou des vapeurs par gravité, inertie ou force centrifuge en utilisant la force centrifuge produite par des pales, disques, tambours ou brosses rotatives
The present invention relates to a bypass-type apparatus for collecting semiconductor manufacturing byproducts. The apparatus for collecting semiconductor manufacturing byproducts between a process chamber and a vacuum pump comprises: a main collection unit for collecting semiconductor manufacturing byproducts; an upper three-way valve, which branches in three directions, has a first-direction end portion connected to the process chamber, and has a second-direction end portion detachably connected to an inlet of the main collection unit; a lower valve, which branches in three directions, has a first-direction end portion connected to the vacuum pump, and has a second-direction end portion detachably connected to an outlet of the main collection unit; and a bypass collection unit, which collects semiconductor manufacturing byproducts, has one end connected to a third-direction end portion of the upper three-way valve, and has the other end connected to a third-direction end portion of the lower valve.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
F16K 11/087 - Soupapes ou clapets à voies multiples, p. ex. clapets mélangeursRaccords de tuyauteries comportant de tels clapets ou soupapesAménagement d'obturateurs et de voies d'écoulement spécialement conçu pour mélanger les fluides dont toutes les faces d'obturation se déplacent comme un tout comportant uniquement des robinets à boisseau à noix sphérique
F16K 49/00 - Moyens portés par ou sur les soupapes pour chauffer ou refroidir
B01D 53/22 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par diffusion
F16L 57/00 - Protection des tuyaux ou d'objets de forme similaire contre les dommages ou les usures internes ou externes
3.
VOICE TRANSMITTING AND RECEIVING DEVICE AND METHOD USING NEAR FIELD WIRELESS COMMUNICATION
Disclosed are a voice transmitting and receiving device and method using near field wireless communication (NFC). A voice transmitting device using NFC comprises: a voice signal collecting module for collecting guide voice signals of a guide; a digital signal processing module for converting the guide voice signal of the guide collected by the voice signal collecting module to digital voice signal data; and a wireless transmitting unit for transmitting the guide voice signals of the guide, which have been converted to digital voice signals in the digital signal processing module, to a plurality of tourist user terminals connected through an NFC network. Accordingly, the transmission efficiency of voice signals can be improved.
H04W 4/06 - Répartition sélective de services de diffusion, p. ex. service de diffusion/multidiffusion multimédiaServices à des groupes d’utilisateursServices d’appel sélectif unidirectionnel
H04W 4/00 - Services spécialement adaptés aux réseaux de télécommunications sans filLeurs installations
The present invention relates to a percussive apparatus for disassembling electronic goods, which comprises: a table having a collecting box which collects shredded pieces; a disassembling part, provided in the upper portion of the table, for disassembling waste electronic goods; a hopper for introducing the waste electronic goods into the disassembling part; and a driving part for providing driving power to the disassembling part.
B02C 18/06 - Désagrégation par couteaux ou autres organes coupants ou déchirants qui transforment le matériau en fragmentsHachoirs ou appareils similaires utilisant des vis ou analogue à couteaux rotatifs
A small electronic product crushing device according to the present invention comprises: a table having a collection box for collecting crushed pieces; a crushing unit provided on the upper portion of the table to crush a waste electronic product; a hopper for injecting the waste electronic product into the crushing unit; and a driving unit for providing the crushing unit with driving power, wherein the crushing unit comprises a crusher body having a lower opening formed toward the collection box; a rotation shaft provided inside the crusher body and rotated by the driving unit; and a plurality of rotation blades coupled to the outer peripheral edge of the rotation shaft to rotate successively and crush the waste electronic product.
B02C 18/06 - Désagrégation par couteaux ou autres organes coupants ou déchirants qui transforment le matériau en fragmentsHachoirs ou appareils similaires utilisant des vis ou analogue à couteaux rotatifs
The present invention relates to a high efficiency carrier for thermal evaporation, which includes: an outer container for holding an evaporation material used in thermal evaporation, the outer container transferring the heat from a heater to the evaporation material; and a mesh mounted inside the outer container for preventing the evaporation material from flowing.
The present invention relates to a thermal deposition apparatus that reduces the rate of deposition variation using a plate-shaped metal heater instead of an existing tungsten filament or molybdenum boat, and more particularly, to a thermal deposition apparatus which uses a plate-shaped metal heater installed parallel to a processing axis of a substrate, and which uses a carrier positioned on the front surface of the plate-shaped metal heater. By using the thermal deposition apparatus of the present invention, the efficiency of use of deposited materials can be improved, and the deposited materials can be deposited on the substrate in a uniform and reproducible manner.
C23C 14/06 - Revêtement par évaporation sous vide, pulvérisation cathodique ou implantation d'ions du matériau composant le revêtement caractérisé par le matériau de revêtement
8.
LIQUID TARGET PRODUCING DEVICE BEING ABLE TO USE MULTIPLE CAPILLARY TUBE AND X-RAY AND EUV LIGHT SOURCE DEVICE WITH THE SAME
POSTECH ACADEMY-INDUSTRY FOUNDATION (République de Corée)
Inventeur(s)
Ahn, Byung-Nam
Kim, Dong-Eon
Kim, Jin-Gon
Son, Jae-Sik
Kim, Dong-Su
Abrégé
A liquid target producing device to which multiple capillary tubes are mountable includes a capillary tube for injecting a liquid target in a jet form; a gas storage tank connected to the capillary tube through a gas line and storing a gas to be supplied to the capillary tube; a metal jacket positioned at an outer circumference of the capillary tube such that a plurality of capillary tubes are installable thereto, the metal jacket liquefying the gas supplied through the gas line; a cryo-cooler connected to the metal jacket through a thermal conductive wire to cool the metal jacket; and a moving means for moving the metal jacket so as to set an initial position of the capillary tube.
brevets