A dustproof structure for a laser output window of a laser includes a discharge chamber, a gas purifier, a dust prevention pipeline, and a fan. A cavity is provided between the laser output window and a slit. The dust prevention pipeline includes a gas inlet end connected to the gas purifier, a middle part passing through the cavity, and a gas outlet end connected to the fan. At least a portion of a working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity. The fan guides the working gas so as to increase a flow rate of the gas passing through the cavity, thereby strengthening the blowing of the clean gas on the laser output window and effectively preventing dust particles in the working gas from approaching and contaminating the laser output window.
H01S 3/034 - Dispositifs optiques placés à l'intérieur du tube ou en faisant partie, p.ex. fenêtres, miroirs
H01S 3/036 - Moyens pour obtenir ou maintenir la pression désirée du gaz à l'intérieur du tube, p.ex. au moyen d'un getter ou d'une réactivation; Moyens pour faire circuler le gaz, p.ex. pour uniformiser la pression à l'intérieur du tube
2.
QUICK ELECTRICAL-CONNECTING STRUCTURE FOR HIGH-VOLTAGE HIGH-FREQUENCY PULSE ENVIRONMENT
A quick electrical-connecting structure for a high-voltage high-frequency pulse environment relates to the technical field of high-voltage high-frequency electrical engineering. The quick electrical-connecting structure includes a plug, a socket, and a cable, where the cable is connected to the socket through the plug; the plug and the socket internally enclose an annular cavity surrounding the cable; and a protective fluid is filled in the annular cavity. By charging a protective fluid to the annular cavity in the plug and the socket, a high-intensity insulating fluid protective layer is maintained around a connecting position of the cable in the annular cavity. Therefore, the quick electrical-connecting structure lowers an internal humidity, and can effectively reduce corona discharge and creepage.
H01R 13/53 - Socles ou boîtiers pour dures conditions de service; Socles ou boîtiers avec des moyens pour éviter l'effet couronne ou l'amorçage d'un arc
H01R 13/52 - Boîtiers protégés contre la poussière, les projections, les éclaboussures, l'eau ou les flammes
Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.
G06F 30/27 - Optimisation, vérification ou simulation de l’objet conçu utilisant l’apprentissage automatique, p.ex. l’intelligence artificielle, les réseaux neuronaux, les machines à support de vecteur [MSV] ou l’apprentissage d’un modèle
4.
DEVICE AND METHOD FOR ONLINE MEASURING SPECTRUM FOR LASER DEVICE
Provided are a device (4) and a method for online measuring a spectrum for a laser device. The device (4) for online measuring a spectrum for a laser device includes: a first optical path assembly (G1) and a second optical path assembly (G2), and the second optical path assembly (G2) and the first optical path assembly (G1) constitute a measurement optical path. The second optical path assembly (G2) includes: an FP etalon (15) and a grating (18). The homogenized laser beam passes through the FP etalon (15) to generate an interference fringe. The grating (18) is arranged after the FP etalon (15), or is arranged before the FP etalon (15) in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon (15). A high precision measurement in a wide range for a central wavelength of a laser beam and an accurate measurement for spectral parameters of a corresponding FWHM and E95 are achieved through an arrangement of the FP etalon and the grating “in series” in the measurement optical path. There is no moving element in the measurement optical path, the structure is simple and compact, the measurement precision is high, and the stability is high. The corresponding measurement algorithm is simple and efficient, and has an extremely high scientific research or commercial application value.
Provided in the present invention are a dustproof structure for a light emergent window sheet of a laser, and a laser. The dustproof structure for a light emergent window sheet of a laser comprises a discharge cavity body, a gas purifier, a dustproof pipeline and a fan, wherein an intermediate cavity is provided between the light emergent window sheet and a slit; an intake end of the dustproof pipeline passes through the intermediate cavity on the way to the gas purifier and is connected to the gas purifier; an output end of the dustproof pipeline is connected to the fan; at least part of a working gas purified by the gas purifier flows through the intermediate chamber by means of the dustproof pipeline; and the fan drains the working gas, so as to increase the flow of gas passing through the intermediate cavity, such that the sweeping of the light emergent window sheet by clean gas is enhanced, thereby effectively preventing particulate matter in the working gas, which enters the intermediate cavity from the discharge cavity body and passes through the window on the slit, from approaching and contaminating the light emergent window sheet.
Disclosed are an excimer laser, and a line width narrowing apparatus and method. The line width narrowing apparatus comprises: a control apparatus, and a beam shifter (5), a beam expanding element (6) and a dispersing element (7) disposed in sequence along a light output direction of a laser. The beam shifter (5) is used for shifting a laser beam incident at a Brewster angle by a set distance after exiting; the control device is connected to the beam shifter (5), and is used to control the beam shifter (5) to shift adjacent pulses exiting from the laser to different positions after exiting. By means of the beam splitter (5) dynamically changing the position of laser light entering the beam expanding element (6) and the dispersing element (7), different parts of the beam expanding element (6) and the dispersing element (7) share heat generated by the laser light, thereby preventing thermal deformation of the beam expanding element (6) and the dispersing element (7), and ensuring stability of a laser light spectrum output by the excimer laser.
H01S 3/101 - Lasers munis de moyens pour changer l'origine ou la direction du rayonnement émis
H01S 3/13 - Stabilisation de paramètres de sortie de laser, p.ex. fréquence ou amplitude
H01S 3/00 - Lasers, c. à d. dispositifs utilisant l'émission stimulée de rayonnement électromagnétique dans la gamme de l’infrarouge, du visible ou de l’ultraviolet
A high-stability excimer laser apparatus, comprising a discharge resonant cavity, a line width narrowing module, a measurement module and a control module. The line width narrowing module comprises a beam expanding apparatus and an echelle grating, which are sequentially arranged in a laser emission direction of a first side of the discharge resonant cavity. The measurement module comprises a central wavelength fine measurement apparatus and a central wavelength coarse measurement apparatus, wherein the central wavelength coarse measurement apparatus comprises a reflection apparatus, a light beam convergence apparatus and a first photoelectric detection apparatus, and is used for performing central wavelength coarse measurement, and the central wavelength fine measurement apparatus is arranged on a second side opposite the first side of the discharge resonant cavity, and is used for receiving a laser beam which is emitted from the second side, and for performing central wavelength fine measurement. The control module is respectively connected to the discharge resonant cavity, the central wavelength fine measurement apparatus and the central wavelength coarse measurement apparatus, and is used for adjusting a parameter in the discharge resonant cavity according to measurement results of the central wavelength fine measurement apparatus and the central wavelength coarse measurement apparatus.
Disclosed is a quick electric connection structure for a high-voltage high-frequency pulse environment, the quick electric connection structure comprising a plug (1), a socket (2) and a cable (100), wherein the cable (100) is connected to the socket (2) by means of the plug (1); an annular cavity (4) surrounding the cable (100) is enclosed inside the plug (1) and the socket (2); and the annular cavity (4) is filled with a protective fluid. By introducing the protective fluid into the annular cavity (4) inside the plug (1) and the socket (2), a high-strength insulating fluid protection layer is maintained in the annular cavity (4) and around a connection portion of the cable (100), such that the internal humidity is reduced, and the possibility of corona and creepage can be effectively reduced.
H01R 13/639 - Moyens additionnels pour maintenir ou verrouiller les pièces de couplage entre elles après l'engagement
H01R 13/53 - Socles ou boîtiers pour dures conditions de service; Socles ou boîtiers avec des moyens pour éviter l'effet couronne ou l'amorçage d'un arc
H01R 24/00 - Dispositifs de couplage en deux pièces, ou l'une des pièces qui coopèrent dans ces dispositifs, caractérisés par leur structure générale
9.
EXCIMER LASER ENERGY MODEL IDENTIFICATION METHOD AND APPARATUS
Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.
G06F 30/27 - Optimisation, vérification ou simulation de l’objet conçu utilisant l’apprentissage automatique, p.ex. l’intelligence artificielle, les réseaux neuronaux, les machines à support de vecteur [MSV] ou l’apprentissage d’un modèle
Disclosed are a vibration isolation structure, an impeller rotor system for a laser, and the laser. The vibration isolation structure is used for isolating vibration on a device body caused by a driving apparatus. The vibration isolation structure comprises: a partition plate (10), one side of the partition plate being fixedly connected to the driving apparatus (30), and the other side of the partition plate being connected to the device body (40) by means of a flexible connecting member (101); and a vibration damping unit (20) fixedly connected to the partition plate (10) and used for weakening vibration on the partition plate (10) caused by the driving device (30). The present vibration isolation structure remarkably reduces the impact of vibration.
F16F 15/02 - Suppression des vibrations dans les systèmes non rotatifs, p.ex. dans des systèmes alternatifs; Suppression des vibrations dans les systèmes rotatifs par l'utilisation d'organes ne se déplaçant pas avec le système rotatif
11.
METHOD FOR REGULATING OUTPUT POWER OF 213 NM LASER, AND APPARATUS THEREOF
Provided are a method for regulating the output power of a 213 nm laser, and an apparatus thereof, said method comprising: setting the temperature of a frequency tripling crystal (21) (S1); using the frequency tripling crystal (21) to output a 532 nm laser and a 355 nm laser (S2); summing the frequencies of the 532 nm laser and the 355 nm laser to obtain a 213 nm laser, and recording the output power of the 213 nm laser (S3); repeating the described steps (S1-S3) multiple times, the temperature of the frequency tripling crystal (21) being set differently each time, and recording the output power of the 213 nm laser at different temperatures to obtain a correlation between the temperature of the frequency tripling crystal (21) and the output power of the 213 nm laser (S4); according to said correlation, adjusting the temperature of the frequency tripling crystal (21) so as to regulate the output power of the 213 nm laser (S5).
H01S 3/10 - Commande de l'intensité, de la fréquence, de la phase, de la polarisation ou de la direction du rayonnement, p.ex. commutation, ouverture de porte, modulation ou démodulation
H01S 3/102 - Commande de l'intensité, de la fréquence, de la phase, de la polarisation ou de la direction du rayonnement, p.ex. commutation, ouverture de porte, modulation ou démodulation par commande du milieu actif, p.ex. par commande des procédés ou des appareils pour l'excitation
H01S 3/109 - Multiplication de la fréquence, p.ex. génération d'harmoniques
12.
CONTROL METHOD AND SYSTEM FOR STABLIZING EXCIMER LASER PULSE ENERGY
A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z−1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.
Disclosed are a laser wavelength measurement device (2) and method. The laser wavelength measurement device (2) comprises: a first optical path assembly and a second optical path assembly, the first optical path assembly and the second optical path assembly constituting a laser wavelength measurement optical path, wherein the second optical path assembly comprises an FP etalon assembly (11) and an optical classifier (13); a homogenized laser beam passes through the FP etalon assembly (11) to generate interference fringes; and the optical classifier (13) is arranged, in the laser wavelength measurement optical path, behind the FP etalon assembly (11) for carrying out deflection processing on the laser beam passing through the FP etalon assembly (11). The FP etalon assembly (11) has two FP etalons (FP1, FP2) sharing the same optical path for interference imaging, is compact in terms of structure, is small in size, and has a simple design and high stability, and in cooperation with the optical classifier (13), same can achieve the precise measurement of a laser wavelength and has a large wavelength measurement range, and is adapted for the on-line measurement of a laser wavelength and corresponding closed-loop control feedback.
G01J 9/02 - Mesure du déphasage des rayons lumineux; Recherche du degré de cohérence; Mesure de la longueur d'onde des rayons lumineux par des méthodes interférométriques
14.
LASER SPECTRUM ONLINE MEASUREMENT DEVICE AND METHOD
A laser spectrum online measurement device (4) and method. The laser spectrum online measurement device (4) comprises: a first optical path assembly (G1) and a second optical path assembly (G2), the second optical path assembly (G2) and the first optical path assembly (G1) forming a measurement optical path, wherein the second optical path assembly (G2) comprises an FP etalon (15) and a grating (18), and a homogenized laser beam passes through the FP etalon (15) to generate interference fringes; the grating (18) is arranged behind the FP etalon (15) in the measurement optical path, or is arranged before the FP etalon (15), and is used for carrying out dispersion processing on the laser beam which passes through the FP etalon (15). By configuring the FP etalon (15) and the grating (18) in series in the measurement optical path, high-precision measurement of a laser beam center wavelength in a wide range and accurate measurement of corresponding line width and E95 spectral parameters are realized; the measurement optical path is free of moving elements; the structure is simple and compact, the measurement precision is high, the stability is high, a corresponding measurement algorithm is simple and efficient, and the device and method have an extremely high scientific research or commercial application value.
A passivating method and apparatus applicable to an excimer laser discharge chamber. The passivating method comprises: S1, heating the discharge chamber to a first temperature, and maintaining the first temperature to bake the discharge chamber; S2, vacuumizing the discharge chamber so that foreign gas in the discharge chamber is discharged; S3, filling passivating gas into the discharge chamber to primarily passivate the discharge chamber; and S4, stopping baking after the primary passivation is finished, and filling working gas into the discharge chamber for discharging passivation. The method has the advantages that a passivation process can be quantitatively evaluated, an adverse effect on the performance of the laser caused by degassing of materials of the discharge chamber is avoided, and the passivation costs are reduced. The passivating apparatus comprises: a vacuum baking chamber (201), a display control unit, a vacuum pump (214), a gas supply unit, a residual gas analyzer (212), and a halogen filter (215). The apparatus has the advantages that the structure is simple, the used devices are common experimental devices, implementation is easily performed and the operation is simple.
H01S 3/03 - Lasers, c. à d. dispositifs utilisant l'émission stimulée de rayonnement électromagnétique dans la gamme de l’infrarouge, du visible ou de l’ultraviolet - Détails de structure des tubes laser à décharge dans le gaz
H01S 3/036 - Moyens pour obtenir ou maintenir la pression désirée du gaz à l'intérieur du tube, p.ex. au moyen d'un getter ou d'une réactivation; Moyens pour faire circuler le gaz, p.ex. pour uniformiser la pression à l'intérieur du tube
16.
EXCIMER LASER PULSE ENERGY STABILITY CONTROL METHOD AND SYSTEM
An excimer laser pulse energy stability control method. Said method comprises: first acquiring an energy measurement value of an nth pulse in a pulse sequence; then calculating the difference between the energy measurement value and an energy set value; taking a zth pulse of the sequence as a demarcation point, and when n is a positive integer less than z, calculating a discharge voltage value of the next pulse according to a first mathematical model, and when n is an integer greater than z-1, calculating a discharge voltage value of the next pulse according to a second mathematical model; and finally, generating a next pulse according to the calculated discharge voltage value. The control method can effectively control the energy overshoot in each pulse sequence and the stability of energy of all pulses in one pulse sequence. A control system based on the control method comprises: a high-voltage discharge module (1), a laser cavity (2), a laser parameter measurement module (3) and an energy stabilization controller (9). The system has a simple structure, and the energy stability control over the system can be realized only by separating a small amount of energy.
H01S 3/10 - Commande de l'intensité, de la fréquence, de la phase, de la polarisation ou de la direction du rayonnement, p.ex. commutation, ouverture de porte, modulation ou démodulation